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Class Information
Number: 257/E21.22
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Chemical or electrical treatment, e.g., electrolytic etching (epo) > Chemical etching (epo) > Etching of group iii-v compound (epo)
Description: This subclass is indented under subclass E21.219. This subclass is substantially the same in scope as ECLA classification H01L21/306B4.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.221 Anisotropic liquid etching (epo) 73
257/E21.222 Vapor phase etching (epo) 158

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8679922 Method of producing semiconductor device and method of producing solid-state image pickup device Mar. 25, 2014
8536061 Semiconductor device manufacturing method Sep. 17, 2013
8420543 Method for treating the dislocation in a GaN-containing semiconductor layer Apr. 16, 2013
8415253 Low-temperature in-situ removal of oxide from a silicon surface during CMOS epitaxial processing Apr. 9, 2013
8313966 Method for fabricating optical semiconductor tubes and devices thereof Nov. 20, 2012
8279615 Encapsulation module method for production and use thereof Oct. 2, 2012
8263500 Photoelectrochemical etching for laser facets Sep. 11, 2012
8252662 Method and structure for manufacture of light emitting diode devices using bulk GaN Aug. 28, 2012
8124497 Method of manufacturing nitride semiconductor device Feb. 28, 2012
8101481 Spacer lithography processes Jan. 24, 2012
8093082 Method of fabricating photoelectric device of group III nitride semiconductor and structure thereof Jan. 10, 2012
RE42955 GaN-based permeable base transistor and method of fabrication Nov. 22, 2011
8048700 Semiconductor light emitting element and manufacturing method thereof Nov. 1, 2011
7955982 Method for smoothing wafer surface and apparatus used therefor Jun. 7, 2011
7867787 Forming inductor and transformer structures with magnetic materials using damascene processing for integrated circuits Jan. 11, 2011
7851372 Composition for removing an insulation material, method of removing an insulation layer and method of recycling a substrate using the same Dec. 14, 2010
7807490 Manufacturing method of nitride semiconductor device and nitride semiconductor device Oct. 5, 2010
7790493 Wafer-level, polymer-based encapsulation for microstructure devices Sep. 7, 2010
7776752 Method of etching for multi-layered structure of semiconductors in group III-V and method for manufacturing vertical cavity surface emitting laser device Aug. 17, 2010
7759257 Precision synthesis of quantum dot nanostructures for fluorescent and optoelectronic devices Jul. 20, 2010
7723751 Semiconductor device and fabrication method of the same May. 25, 2010
7713878 Method of recovering and reproducing substrates and method of producing semiconductor wafers May. 11, 2010
7691735 Method for manufacturing metal chips by plasma from a layer comprising several elements Apr. 6, 2010
7569493 Nitride-based compound semiconductor, method of cleaning a compound semiconductor, method of producing the same, and substrate Aug. 4, 2009
7413958 GaN-based permeable base transistor and method of fabrication Aug. 19, 2008
7405096 Manufacturing method of nitride semiconductor device and nitride semiconductor device Jul. 29, 2008
7371694 Semiconductor device fabrication method and fabrication apparatus May. 13, 2008
7316961 Method of manufacturing semiconductor device Jan. 8, 2008
7282455 Method of producing a diffraction grating Oct. 16, 2007
7259080 Glass-type planar substrate, use thereof, and method for the production thereof Aug. 21, 2007
7202122 Cobalt silicidation process for substrates with a silicon--germanium layer Apr. 10, 2007
7026261 Method for fabricating semiconductor device Apr. 11, 2006
7026255 Method and device for photo-electrochemically etching a semiconductor sample, especially gallium nitride Apr. 11, 2006
6986693 Group III-nitride layers with patterned surfaces Jan. 17, 2006
6943050 Method for making semiconductor device, semiconductor element composite, electro-optical apparatus, and electronic system Sep. 13, 2005
6903392 Semiconductor device and its manufacturing method Jun. 7, 2005
6841410 Method for forming group-III nitride semiconductor layer and group-III nitride semiconductor device Jan. 11, 2005
6830945 Method for fabricating a non-planar nitride-based heterostructure field effect transistor Dec. 14, 2004
6806204 Semiconductor etch speed modification Oct. 19, 2004
6803248 Chemistry for etching quaternary interface layers on InGaAsP mostly formed between GaAs and InxGa(1-x)P layers Oct. 12, 2004
6780703 Method for forming a semiconductor device Aug. 24, 2004
6780702 Method of reducing device parasitic capacitance using underneath crystallographically selective wet etching Aug. 24, 2004
6762134 Metal-assisted chemical etch to produce porous group III-V materials Jul. 13, 2004
6737288 Method for fabricating a semiconductor device May. 18, 2004
6709881 Method for manufacturing semiconductor and method for manufacturing semiconductor device Mar. 23, 2004
6703639 Nanofabrication for InAs/AlSb heterostructures Mar. 9, 2004
6599843 In-situ mask technique for producing III-V semiconductor components Jul. 29, 2003
6524899 Process for forming a large area, high gate current HEMT diode Feb. 25, 2003
6468902 Semiconductor device and its manufacturing method Oct. 22, 2002
6239033 Manufacturing method of semiconductor device May. 29, 2001

1 2 3 4

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