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Class Information
Number: 257/E21.216
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Treatment of semiconductor body using process other than deposition of semiconductor material on a substrate, diffusion or alloying of impurity material, or radiation treatment (epo) > To change their surface-physical characteristics or shape, e.g., etching, polishing, cutting (epo) > Chemical or electrical treatment, e.g., electrolytic etching (epo) > Electrolytic etching (epo)
Description: This subclass is indented under subclass E21.215. This subclass is substantially the same in scope as ECLA classification H01L21/3063.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7276743 |
Retaining ring with conductive portion |
Oct. 2, 2007 |
| 7074317 |
Method for fabricating trench capacitors for large scale integrated semiconductor memories |
Jul. 11, 2006 |
| 6972438 |
Light emitting diode with porous SiC substrate and method for fabricating |
Dec. 6, 2005 |
| 6964732 |
Method and apparatus for continuous formation and lift-off of porous silicon layers |
Nov. 15, 2005 |
| 6875673 |
Method of producing semiconductor device |
Apr. 5, 2005 |
| 6852643 |
Method for using ammonium fluoride solution in a photoelectrochemical etching process of a silicon wafer |
Feb. 8, 2005 |
| 6818104 |
Anodizing apparatus |
Nov. 16, 2004 |
| 6790340 |
Method and apparatus for radiation assisted electrochemical etching and etched product |
Sep. 14, 2004 |
| 6756289 |
Method of producing semiconductor member and method of producing solar cell |
Jun. 29, 2004 |
| 6750153 |
Process for producing macroscopic cavities beneath the surface of a silicon wafer |
Jun. 15, 2004 |
| 6746932 |
Method of reducing the thickness of a silicon substrate |
Jun. 8, 2004 |
| 6693024 |
Semiconductor component with a semiconductor body having a multiplicity of pores and method for fabricating |
Feb. 17, 2004 |
| 6677183 |
Method of separation of semiconductor device |
Jan. 13, 2004 |
| 6664169 |
Process for producing semiconductor member, process for producing solar cell, and anodizing apparatus |
Dec. 16, 2003 |
| 6660654 |
Fabrication method and apparatus for fabricating a spatial structure in a semiconductor substrate |
Dec. 9, 2003 |
| 6656341 |
Method of etching, as well as frame element, mask and prefabricated substrate element for use in such etching |
Dec. 2, 2003 |
| 6649485 |
Method for the formation and lift-off of porous silicon layers |
Nov. 18, 2003 |
| 6617191 |
Method for anodizing silicon substrates for surface type acceleration sensors |
Sep. 9, 2003 |
| 6559069 |
Process for the electrochemical oxidation of a semiconductor substrate |
May. 6, 2003 |
| 6521118 |
Semiconductor etching process and apparatus |
Feb. 18, 2003 |
| 6518603 |
Selective electrochemical process for creating semiconductor nano- and micro-patterns |
Feb. 11, 2003 |
| 6511915 |
Electrochemical etching process |
Jan. 28, 2003 |
| 6506658 |
Method for manufacturing a SOI wafer |
Jan. 14, 2003 |
| 6428620 |
Substrate processing method and apparatus and SOI substrate |
Aug. 6, 2002 |
| 6426274 |
Method for making thin film semiconductor |
Jul. 30, 2002 |
| 6417075 |
Method for producing thin substrate layers |
Jul. 9, 2002 |
| 6376859 |
Variable porosity porous silicon isolation |
Apr. 23, 2002 |
| 6362079 |
Semiconductor device and method of anodization for the semiconductor device |
Mar. 26, 2002 |
| 6358861 |
Manufacturing method of silicon device |
Mar. 19, 2002 |
| 6326280 |
Thin film semiconductor and method for making thin film semiconductor |
Dec. 4, 2001 |
| 6319370 |
Apparatus for photoelectrochemical polishing of silicon wafers |
Nov. 20, 2001 |
| 6287936 |
Method of forming porous silicon in a silicon substrate, in particular for improving the performance of an inductive circuit |
Sep. 11, 2001 |
| 6284670 |
Method of etching silicon wafer and silicon wafer |
Sep. 4, 2001 |
| 6284671 |
Selective electrochemical process for creating semiconductor nano-and micro-patterns |
Sep. 4, 2001 |
| 6258244 |
Treating method and apparatus utilizing chemical reaction |
Jul. 10, 2001 |
| 6258240 |
Anodizing apparatus and method |
Jul. 10, 2001 |
| 6200878 |
SOI substrate processing method |
Mar. 13, 2001 |
| 6194239 |
Method for making thin film semiconductor |
Feb. 27, 2001 |
| 6194245 |
Method for making thin film semiconductor |
Feb. 27, 2001 |
| 6190937 |
Method of producing semiconductor member and method of producing solar cell |
Feb. 20, 2001 |
| 6180497 |
Method for producing semiconductor base members |
Jan. 30, 2001 |
| 6143629 |
Process for producing semiconductor substrate |
Nov. 7, 2000 |
| 6132592 |
Method of etching non-doped polysilicon |
Oct. 17, 2000 |
| 6128052 |
Semiconductor device applicable for liquid crystal display device, and process for its fabrication |
Oct. 3, 2000 |
| 6106613 |
Semiconductor substrate having compound semiconductor layer, process for its production, and electronic device fabricated on semiconductor substrate |
Aug. 22, 2000 |
| 6107213 |
Method for making thin film semiconductor |
Aug. 22, 2000 |
| 6103096 |
Apparatus and method for the electrochemical etching of a wafer |
Aug. 15, 2000 |
| 6074546 |
Method for photoelectrochemical polishing of silicon wafers |
Jun. 13, 2000 |
| 6058945 |
Cleaning methods of porous surface and semiconductor surface |
May. 9, 2000 |
| 6033925 |
Method for manufacturing a SOI-type semiconductor structure |
Mar. 7, 2000 |
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