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Class Information
Number: 257/E21.141
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Diffusion of impurity material, e.g., doping material, electrode material, into or out of a semiconductor body, or between semiconductor regions; interactions between two or more impurities; redistribution of impurities (epo) > Using diffusion into or out of a solid from or into a gaseous phase (epo)
Description: This subclass is indented under subclass E21.135. This subclass is substantially the same in scope as ECLA classification H01L21/223.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.142 Diffusion into or out of group iii-v compound (epo) 38
257/E21.143 From or into plasma phase (epo) 144

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8558308 Method of manufacturing a semiconductor device using a contact implant and a metallic recombination element and semiconductor Oct. 15, 2013
8524619 Method for fabricating semiconductor device including performing oxygen plasma treatment Sep. 3, 2013
8513058 Semiconductor device and method for producing the same Aug. 20, 2013
8486747 Backside silicon photovoltaic cell and method of manufacturing thereof Jul. 16, 2013
8450745 EL display device May. 28, 2013
8183571 EL display device and method for manufacturing the same May. 22, 2012
8138560 Microstructure, micromachine, and manufacturing method of microstructure and micromachine Mar. 20, 2012
7977793 Metal line of semiconductor device having a diffusion barrier with an amorphous TaBN layer and method for forming the same Jul. 12, 2011
7952103 EL display device and method for manufacturing the same May. 31, 2011
7910983 MOS transistor having an increased gate-drain capacitance Mar. 22, 2011
7883999 Method for increasing the penetration depth of material infusion in a substrate using a gas cluster ion beam Feb. 8, 2011
7855087 Floating sheet production apparatus and method Dec. 21, 2010
7846823 Masking paste, method of manufacturing same, and method of manufacturing solar cell using masking paste Dec. 7, 2010
7820532 Methods for simultaneously forming doped regions having different conductivity-determining type element profiles Oct. 26, 2010
7811916 Method for isotropic doping of a non-planar surface exposed in a void Oct. 12, 2010
7804175 Semiconductor structures including conductive vias continuously extending therethrough and methods of making the same Sep. 28, 2010
7791133 Semiconductor device with reduced gate-overlap capacitance and method of forming the same Sep. 7, 2010
7772064 Method of fabricating self-aligned contact Aug. 10, 2010
7745297 Method of substrate with transparent electrodes and devices incorporating it Jun. 29, 2010
7741216 Metal line of semiconductor device and method for forming the same Jun. 22, 2010
7713785 Surface mountable direct chip attach device and method including integral integrated circuit May. 11, 2010
7615813 Semiconductor device using fuse/anti-fuse system Nov. 10, 2009
7612452 Method for manufacturing a semiconductor device and semiconductor device Nov. 3, 2009
7518146 EL display device including color filter and light shielding film Apr. 14, 2009
7510946 Method for filling of nanoscale holes and trenches and for planarizing of a wafer surface Mar. 31, 2009
7511379 Surface mountable direct chip attach device and method including integral integrated circuit Mar. 31, 2009
7465606 Resistance welded solder crimp for joining stranded wire to a copper lead-frame Dec. 16, 2008
7303967 Method for fabricating transistor of semiconductor device Dec. 4, 2007
7268037 Method for fabricating microchips using metal oxide masks Sep. 11, 2007
7101812 Method of forming and/or modifying a dielectric film on a semiconductor surface Sep. 5, 2006
7019360 High voltage power mosfet having a voltage sustaining region that includes doped columns formed by trench etching using an etchant gas that is also a doping source Mar. 28, 2006
6984552 Method for doping semiconductor layer, method for producing thin film semiconductor element and thin film semiconductor element Jan. 10, 2006
6955991 Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holes Oct. 18, 2005
6919239 Method for forming a semiconductor device Jul. 19, 2005
6821871 Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus Nov. 23, 2004
6794277 Method of doping semiconductor layer, method of manufacturing thin film semiconductor device, and thin film semiconductor device Sep. 21, 2004
6762136 Method for rapid thermal processing of substrates Jul. 13, 2004
6750104 High voltage power MOSFET having a voltage sustaining region that includes doped columns formed by trench etching using an etchant gas that is also a doping source Jun. 15, 2004
6716712 Process for producing two differently doped adjacent regions in an integrated semiconductor Apr. 6, 2004
6667522 Silicon wafers for CMOS and other integrated circuits Dec. 23, 2003
6660575 Method for forming a semiconductor device Dec. 9, 2003
6655767 Active matrix display device Dec. 2, 2003
6645839 Method for improving a doping profile for gas phase doping Nov. 11, 2003
6635310 Method of heat treatment Oct. 21, 2003
6528384 Method for manufacturing a trench capacitor Mar. 4, 2003
6489207 Method of doping a gate and creating a very shallow source/drain extension and resulting semiconductor Dec. 3, 2002
6467297 Wafer holder for rotating and translating wafers Oct. 22, 2002
6426280 Method for doping spherical semiconductors Jul. 30, 2002
6424008 Memory device having a floating gate Jul. 23, 2002
6423615 Silicon wafers for CMOS and other integrated circuits Jul. 23, 2002

1 2 3 4

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