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Class Information
Number: 257/E21.133
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Deposition of semiconductor material on substrate, e.g., epitaxial growth, solid phase epitaxy (epo) > Epitaxial re-growth of non-monocrystalline semiconductor material, e.g., lateral epitaxy by seeded solidific ation, solid-state crystallization, solid-state graphoepitaxy, explosive crystallization, grain growth in polycrystalline material (epo)
Description: This subclass is indented under subclass E21.09. This subclass is substantially the same in scope as ECLA classification H01L21/20D.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7413939 |
Method of growing a germanium epitaxial film on insulator for use in fabrication of CMOS integrated circuit |
Aug. 19, 2008 |
| 7384860 |
Method of manufacturing a semiconductor device |
Jun. 10, 2008 |
| 7375011 |
Ex-situ doped semiconductor transport layer |
May. 20, 2008 |
| 7364990 |
Epitaxial crystal growth process in the manufacturing of a semiconductor device |
Apr. 29, 2008 |
| 7358165 |
Semiconductor device and method for manufacturing semiconductor device |
Apr. 15, 2008 |
| 7348222 |
Method for manufacturing a thin film transistor and method for manufacturing a semiconductor device |
Mar. 25, 2008 |
| 7335539 |
Method for making thin-film semiconductor device |
Feb. 26, 2008 |
| 7317205 |
Light emitting device and method of manufacturing a semiconductor device |
Jan. 8, 2008 |
| 7297983 |
Method for fabricating an integrated circuit on a semiconductor substrate |
Nov. 20, 2007 |
| 7294539 |
Semiconductor substrate, semiconductor device, method of manufacturing semiconductor substrate, and method of manufacturing semiconductor device |
Nov. 13, 2007 |
| 7294857 |
Polysilicon thin film transistor array panel and manufacturing method thereof |
Nov. 13, 2007 |
| 7273774 |
Method for making thin-film semiconductor device |
Sep. 25, 2007 |
| 7271041 |
Method for manufacturing thin film transistor |
Sep. 18, 2007 |
| 7256109 |
Isotropic polycrystalline silicon |
Aug. 14, 2007 |
| 7253010 |
Method of deciding focal plane and method of crystallization using thereof |
Aug. 7, 2007 |
| 7247527 |
Method for manufacturing semiconductor device, and laser irradiation apparatus |
Jul. 24, 2007 |
| 7227186 |
Thin film transistor and method of manufacturing the same |
Jun. 5, 2007 |
| 7223627 |
Memory element and its method of formation |
May. 29, 2007 |
| 7220660 |
Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method |
May. 22, 2007 |
| 7217642 |
Mask for crystallizing polysilicon and a method for forming thin film transistor using the mask |
May. 15, 2007 |
| 7214592 |
Method and apparatus for forming a semiconductor substrate with a layer structure of activated dopants |
May. 8, 2007 |
| 7186597 |
Method of manufacturing transistors |
Mar. 6, 2007 |
| 7176049 |
Method of increasing a free carrier concentration in a semiconductor substrate |
Feb. 13, 2007 |
| 7141491 |
Method for fabricating a semiconductor device |
Nov. 28, 2006 |
| 7142297 |
Method for simulating the movement of particles |
Nov. 28, 2006 |
| 7129522 |
Semiconductor device and its manufacturing method |
Oct. 31, 2006 |
| 7112516 |
Fabrication of abrupt ultra-shallow junctions |
Sep. 26, 2006 |
| 7084081 |
Display device and method of manufacturing the same |
Aug. 1, 2006 |
| 7060596 |
Process for fabricating a single-crystal substrate and integrated circuit comprising such a substrate |
Jun. 13, 2006 |
| 7049183 |
Semiconductor film, method for manufacturing semiconductor film, semiconductor device, and method for manufacturing semiconductor device |
May. 23, 2006 |
| 7045403 |
Method for producing insulated gate thin film semiconductor device |
May. 16, 2006 |
| 7037811 |
Method for fabricating a semiconductor device |
May. 2, 2006 |
| 7029995 |
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy |
Apr. 18, 2006 |
| 7026201 |
Method for forming polycrystalline silicon thin film transistor |
Apr. 11, 2006 |
| 7026200 |
Method for manufacturing a semiconductor device |
Apr. 11, 2006 |
| 7022191 |
Method of crystallizing amorphous silicon layer and crystallizing apparatus thereof |
Apr. 4, 2006 |
| 7018468 |
Process for long crystal lateral growth in silicon films by UV and IR pulse sequencing |
Mar. 28, 2006 |
| 7015121 |
Semiconductor device and method of manufacturing the same |
Mar. 21, 2006 |
| 6998282 |
Method of manufacturing a semiconductor device |
Feb. 14, 2006 |
| 6998639 |
Method for manufacturing a semiconductor device |
Feb. 14, 2006 |
| 6991976 |
Method for manufacturing a semiconductor thin film |
Jan. 31, 2006 |
| 6987037 |
Strained Si/SiGe structures by ion implantation |
Jan. 17, 2006 |
| 6987036 |
Method for forming crystalline semiconductor film and apparatus for forming the same |
Jan. 17, 2006 |
| 6987283 |
Semiconductor device structure |
Jan. 17, 2006 |
| 6979632 |
Fabrication method for thin-film semiconductor |
Dec. 27, 2005 |
| 6977221 |
Methods of forming an electrically conductive line |
Dec. 20, 2005 |
| 6977206 |
Heating plate crystallization method |
Dec. 20, 2005 |
| 6974747 |
Method of manufacturing semiconductor device |
Dec. 13, 2005 |
| 6974732 |
Semiconductor device method of manufacturing |
Dec. 13, 2005 |
| 6965122 |
Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them |
Nov. 15, 2005 |
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