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Class Information
Number: 257/E21.122
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Deposition of semiconductor material on substrate, e.g., epitaxial growth, solid phase epitaxy (epo) > Characterized by the substrate (epo) > Bonding of semiconductor wafer to insulating substrate or to semic onducting substrate using an intermediate insulating layer (epo)
Description: This subclass is indented under subclass E21.119. This subclass is substantially the same in scope as ECLA classification H01L21/20B2.


Sub-classes under this class:

Class Number Class Name Patents
257/E21.123 Substrate is crystalline semiconductor material, e.g., lattice adaptation, heteroepitaxy (epo) 142


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
6312797 Method for manufacturing bonded wafer and bonded wafer Nov. 6, 2001
6306729 Semiconductor article and method of manufacturing the same Oct. 23, 2001
6287941 Surface finishing of SOI substrates using an EPI process Sep. 11, 2001
6284628 Method of recycling a delaminated wafer and a silicon wafer used for the recycling Sep. 4, 2001
6281038 Methods for forming assemblies Aug. 28, 2001
6281032 Manufacturing method for nitride III-V compound semiconductor device using bonding Aug. 28, 2001
6274508 Apparatuses and methods used in forming assemblies Aug. 14, 2001
6258698 Process for producing semiconductor substrate Jul. 10, 2001
6255195 Method for forming a bonded substrate containing a planar intrinsic gettering zone and substrate formed by said method Jul. 3, 2001
6255731 SOI bonding structure Jul. 3, 2001
6242324 Method for fabricating singe crystal materials over CMOS devices Jun. 5, 2001
6239004 Method of forming oxide film on an SOI layer and method of fabricating a bonded wafer May. 29, 2001
6224668 Method for producing SOI substrate and SOI substrate May. 1, 2001
6225651 Structure with a micro-electronic component made of a semi-conductor material difficult to etch and with metallized holes May. 1, 2001
6221738 Substrate and production method thereof Apr. 24, 2001
6214702 Methods of forming semiconductor substrates using wafer bonding techniques and intermediate substrates formed thereby Apr. 10, 2001
6214701 Semiconductor substrate and thin film semiconductor device, method of manufacturing the same, and anodizing apparatus Apr. 10, 2001
6210479 Product and process for forming a semiconductor structure on a host substrate Apr. 3, 2001
6200878 SOI substrate processing method Mar. 13, 2001
6199563 Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method Mar. 13, 2001
6198159 Bonded wafer, process for producing same and substrate Mar. 6, 2001
6191037 Methods, apparatuses and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes Feb. 20, 2001
6190937 Method of producing semiconductor member and method of producing solar cell Feb. 20, 2001
6190985 Practical way to remove heat from SOI devices Feb. 20, 2001
6183857 Substrate for high frequency integrated circuits Feb. 6, 2001
6177359 Method for detaching an epitaxial layer from one substrate and transferring it to another substrate Jan. 23, 2001
6159778 Methods of forming semiconductor-on-insulator field effect transistors with reduced floating body parasitics Dec. 12, 2000
6156624 Method for production of SOI substrate by pasting and SOI substrate Dec. 5, 2000
6143628 Semiconductor substrate and method of manufacturing the same Nov. 7, 2000
6140209 Process for forming an SOI substrate Oct. 31, 2000
6133112 Thin film formation process Oct. 17, 2000
RE36890 Gradient chuck method for wafer bonding employing a convex pressure Oct. 3, 2000
6127243 Method for bonding two wafers Oct. 3, 2000
6120597 Crystal ion-slicing of single-crystal films Sep. 19, 2000
6114188 Method of fabricating an integrated complex-transition metal oxide device Sep. 5, 2000
6107638 Silicon nitride circuit substrate and semiconductor device containing same Aug. 22, 2000
6100166 Process for producing semiconductor article Aug. 8, 2000
6093577 Low temperature adhesion bonding method for composite substrates Jul. 25, 2000
6087242 Method to improve commercial bonded SOI material Jul. 11, 2000
6084284 Integrated circuit including inverted dielectric isolation Jul. 4, 2000
6083324 Gettering technique for silicon-on-insulator wafers Jul. 4, 2000
6071795 Separation of thin films from transparent substrates by selective optical processing Jun. 6, 2000
6066542 Method for the manufacture of a power semiconductor component May. 23, 2000
6059895 Strained Si/SiGe layers on insulator May. 9, 2000
6051498 Method for manufacturing a semiconductor wafer which is coated on one side and provided with a finish Apr. 18, 2000
6033925 Method for manufacturing a SOI-type semiconductor structure Mar. 7, 2000
6013563 Controlled cleaning process Jan. 11, 2000
6010579 Reusable substrate for thin film separation Jan. 4, 2000
6008110 Semiconductor substrate and method of manufacturing same Dec. 28, 1999
6004866 Method for manufacturing bonded wafer and bonded wafer manufactured thereby Dec. 21, 1999

1 2 3 4 5 6 7 8 9


 
 
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