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Class Information
Number: 257/E21.101
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Deposition of semiconductor material on substrate, e.g., epitaxial growth, solid phase epitaxy (epo) > Using reduction or decomposition of gaseous compound yielding solid condensate, i.e., chemical deposition (epo)
Description: This subclass is indented under subclass E21.09. This subclass is substantially the same in scope as ECLA classification H01L21/205.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.107 Deposition of diamond (epo) 11
257/E21.108 Epitaxial deposition of group iii-v compound (epo) 322
257/E21.102 Epitaxial deposition of group iv elements, e.g., si, ge, c (epo) 233

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8709863 Antimony and germanium complexes useful for CVD/ALD of metal thin films Apr. 29, 2014
8670475 Catalytic generation of metastable singlet oxygen Mar. 11, 2014
8669164 Method of fabricating free-form, high-aspect ratio components for high-current, high-speed microelectronics Mar. 11, 2014
8617970 Method of manufacturing semiconductor device Dec. 31, 2013
8609519 Combinatorial approach for screening of ALD film stacks Dec. 17, 2013
8502191 Semiconductor device, manufacturing method therefor, and solar cell Aug. 6, 2013
8497192 Method of manufacturing a semiconductor device and substrate processing apparatus Jul. 30, 2013
8486777 Method for manufacturing microcrystalline semiconductor and thin film transistor Jul. 16, 2013
8455346 Method for manufacturing nonvolatile memory device Jun. 4, 2013
8389387 Segmented nanowires displaying locally controllable properties Mar. 5, 2013
8389345 Thin film transistor and manufacturing method of the same Mar. 5, 2013
8329532 Process for the simultaneous deposition of crystalline and amorphous layers with doping Dec. 11, 2012
8273641 Plasma deposition of amorphous semiconductors at microwave frequencies Sep. 25, 2012
8212234 Method of fabricating nanosized filamentary carbon devices over a relatively large-area Jul. 3, 2012
8193020 Method for heteroepitaxial growth of high-quality N-face GaN, InN, and AlN and their alloys by metal organic chemical vapor deposition Jun. 5, 2012
8148274 Semiconductor device having oxidized metal film and manufacture method of the same Apr. 3, 2012
8133803 Method for fabricating semiconductor substrates and semiconductor devices Mar. 13, 2012
8102052 Process for the simultaneous deposition of crystalline and amorphous layers with doping Jan. 24, 2012
8048785 Method of fabricating nanosized filamentary carbon devices over a relatively large-area Nov. 1, 2011
8026535 Thin film transistor and organic electroluminescence display using the same Sep. 27, 2011
8008117 Antimony and germanium complexes useful for CVD/ALD of metal thin films Aug. 30, 2011
7947580 Hybrid semiconductor structure May. 24, 2011
7947552 Process for the simultaneous deposition of crystalline and amorphous layers with doping May. 24, 2011
7932137 Thin film transistor and manufacturing method of the same Apr. 26, 2011
7902087 Organic electroluminescent display device and method of preparing the same Mar. 8, 2011
7897491 Separate injection of reactive species in selective formation of films Mar. 1, 2011
7736928 Precision printing electroplating through plating mask on a solar cell substrate Jun. 15, 2010
7723217 Method for manufacturing gallium nitride single crystalline substrate using self-split May. 25, 2010
7718518 Low temperature doped silicon layer formation May. 18, 2010
7713874 Periodic plasma annealing in an ALD-type process May. 11, 2010
7709287 Method of forming a multijunction solar cell structure with a GaAs/AIGaAs tunnel diode May. 4, 2010
7678614 Thermal interface material and method for making the same Mar. 16, 2010
7674713 Atmospheric pressure chemical vapor deposition Mar. 9, 2010
7670881 Method of manufacturing a semiconductor device Mar. 2, 2010
7651935 Process of forming an electronic device including active regions and gate electrodes of different compositions overlying the active regions Jan. 26, 2010
7635647 Atmospheric pressure chemical vapor deposition Dec. 22, 2009
7629256 In situ silicon and titanium nitride deposition Dec. 8, 2009
7589031 Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films Sep. 15, 2009
7517772 Selective etch for patterning a semiconductor film deposited non-selectively Apr. 14, 2009
7407869 Method for manufacturing a free-standing substrate made of monocrystalline semiconductor material Aug. 5, 2008
7365028 Methods of forming metal oxide and semimetal oxide Apr. 29, 2008
7351668 Film formation method and apparatus for semiconductor process Apr. 1, 2008
7329554 Reactive codoping of GaAlInP compound semiconductors Feb. 12, 2008
7208412 Method of forming metal oxide and semimetal oxide Apr. 24, 2007
7192888 Low selectivity deposition methods Mar. 20, 2007
7183208 Methods for treating pluralities of discrete semiconductor substrates Feb. 27, 2007
7153726 Semiconductor device with magnetically permeable heat sink Dec. 26, 2006
7135389 Irradiation method of laser beam Nov. 14, 2006
7074641 Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element Jul. 11, 2006
7041342 Thin-film solar cells and method of making May. 9, 2006

1 2 3 4 5 6 7 8 9 10 11

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