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Class Information
Number: 257/E21.091
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising group iv elements or group iii-v compounds with or without impurities, e.g., doping materials (epo) > Deposition of semiconductor material on substrate, e.g., epitaxial growth, solid phase epitaxy (epo) > Using physical deposition, e.g., vacuum deposition, sputtering (epo)
Description: This subclass is indented under subclass E21.09. This subclass is substantially the same in scope as ECLA classification H01L21/203.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.096 Deposition of diamond (epo) 9
257/E21.097 Epitaxial deposition of group iii-v compound (epo) 204
257/E21.092 Epitaxial deposition of group iv element, e.g., si, ge (epo) 116

Patents under this class:
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Patent Number Title Of Patent Date Issued
8709858 Tailoring the band gap of solar cells made of liquid silane by adding germanium Apr. 29, 2014
8680581 Method for producing group III nitride semiconductor and template substrate Mar. 25, 2014
8618617 Field effect transistor device Dec. 31, 2013
8587104 Wiring board and semiconductor package Nov. 19, 2013
8551884 Method of manufacturing semiconductor device Oct. 8, 2013
8501559 Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same Aug. 6, 2013
8492862 Sputtering target and manufacturing method thereof, and transistor Jul. 23, 2013
8492234 Field effect transistor device Jul. 23, 2013
8399339 Nanosensors Mar. 19, 2013
8338249 Semiconductor device and method for manufacturing the same having improved polarization reversal characteristic Dec. 25, 2012
8278200 Metal-semiconductor intermixed regions Oct. 2, 2012
8268706 Semiconductor device manufacturing method Sep. 18, 2012
8263480 Methods for site-selective growth of horizontal nanowires, nanowires grown by the methods and nanodevices comprising the nanowires Sep. 11, 2012
8253179 Semiconductor device and manufacturing method of the same Aug. 28, 2012
8133750 Method for forming extended gate field effect transistor (EGFET) based sensor and the sensor therefrom Mar. 13, 2012
8133768 Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system Mar. 13, 2012
8110880 Systems and methods for interconnect metallization using a stop-etch layer Feb. 7, 2012
8101508 Silicon substrate and manufacturing method thereof Jan. 24, 2012
8093133 Transient voltage suppressor and methods Jan. 10, 2012
8076224 Thin-film deposition and recirculation of a semi-conductor material Dec. 13, 2011
7958842 Substrate processing apparatus Jun. 14, 2011
7915157 Chip structure and process for forming the same Mar. 29, 2011
7875535 Compound semiconductor device using SiC substrate and its manufacture Jan. 25, 2011
7709318 Method for fabricating a semiconductor device May. 4, 2010
7648867 Method for fabricating a semiconductor device Jan. 19, 2010
7629184 RFID temperature sensing wafer, system and method Dec. 8, 2009
7557046 Systems and methods for interconnect metallization using a stop-etch layer Jul. 7, 2009
7544603 Method of fabricating silicon nitride layer and method of fabricating semiconductor device Jun. 9, 2009
7381657 Biased pulse DC reactive sputtering of oxide films Jun. 3, 2008
7345002 Replication and transfer of microstructures and nanostructures Mar. 18, 2008
7271081 Metal/ZnOx/metal current limiter Sep. 18, 2007
7259110 Manufacturing method of display device and semiconductor device Aug. 21, 2007
7115533 Semiconductor device manufacturing method Oct. 3, 2006
6789499 Apparatus to sputter silicon films Sep. 14, 2004
6566175 Method of manufacturing gate insulated field effect transistors May. 20, 2003
6531408 Method for growing ZnO based oxide semiconductor layer and method for manufacturing semiconductor light emitting device using the same Mar. 11, 2003
6429097 Method to sputter silicon films Aug. 6, 2002
6365478 Solid state electronic device fabrication using crystalline defect control Apr. 2, 2002
6362097 Collimated sputtering of semiconductor and other films Mar. 26, 2002
6261877 Method of manufacturing gate insulated field effect transistors Jul. 17, 2001
6177302 Method of manufacturing a thin film transistor using multiple sputtering chambers Jan. 23, 2001
6057557 Semiconductor substrate semiconductor device and liquid crystal display device May. 2, 2000
6022458 Method of production of a semiconductor substrate Feb. 8, 2000
5712187 Variable temperature semiconductor film deposition Jan. 27, 1998
5602418 Nitride based semiconductor device and manufacture thereof Feb. 11, 1997
5554257 Method of treating surfaces with atomic or molecular beam Sep. 10, 1996
5525538 Method for intrinsically doped III-A and V-A compounds Jun. 11, 1996
5500102 Method of forming deposited semiconductor film Mar. 19, 1996
5427055 Method for controlling roughness on surface of monocrystal Jun. 27, 1995
5419785 Intrinsically doped III-A and V-A compounds having precipitates of V-A element May. 30, 1995

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