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Class Information
Number: 257/E21.043
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising carbon, e.g., diamond, diamond-like carbon (epo) > Making n- or p-doped regions (epo) > Using ion im plantation (epo)
Description: This subclass is indented under subclass E21.042. This subclass is substantially the same in scope as ECLA classification H01L21/04D10B.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8664691 Silicon photomultiplier with trench isolation Mar. 4, 2014
8633116 Dry etching method Jan. 21, 2014
8604529 Apparatus with photodiode region in multiple epitaxial layers Dec. 10, 2013
8597962 Vertical structure LED current spreading by implanted regions Dec. 3, 2013
8569821 Semiconductor devices and methods of forming the same Oct. 29, 2013
8536031 Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme Sep. 17, 2013
8466064 Semiconductor integrated circuit device and method of manufacturing a semiconductor integrated circuit device Jun. 18, 2013
8343859 Non-uniform ion implantation apparatus and method thereof Jan. 1, 2013
8288252 Method for recovering damaged components in lower region of low dielectric insulating film Oct. 16, 2012
8252671 Semiconductor device and fabrication method Aug. 28, 2012
8247329 Nanotube semiconductor devices Aug. 21, 2012
8216923 Integrated shadow mask/carrier for patterned ion implantation Jul. 10, 2012
8198194 Methods of forming p-channel field effect transistors having SiGe source/drain regions Jun. 12, 2012
8178951 Compound semiconductor substrate and control for electrical property thereof May. 15, 2012
8153496 Self-aligned process and method for fabrication of high efficiency solar cells Apr. 10, 2012
8101492 Method for making semiconductor device Jan. 24, 2012
8101927 Masking apparatus for an ion implanter Jan. 24, 2012
8084312 Nitrogen based implants for defect reduction in strained silicon Dec. 27, 2011
8076197 Image sensor and method for fabricating the same Dec. 13, 2011
8058153 Method for recovering damage of low dielectric insulating film for manufacturing semiconductor device Nov. 15, 2011
8048754 Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer Nov. 1, 2011
8048787 Methods of forming semiconductor devices Nov. 1, 2011
8039374 Method for low temperature ion implantation Oct. 18, 2011
8039937 Method of forming semiconductor chips, the semiconductor chips so formed and chip-stack package having the same Oct. 18, 2011
8026135 Formation of shallow junctions by diffusion from a dielectric doped by cluster or molecular ion beams Sep. 27, 2011
8026160 Semiconductor device and semiconductor device manufacturing method Sep. 27, 2011
8013381 Semiconductor device Sep. 6, 2011
8003531 Method for manufacturing flash memory device Aug. 23, 2011
8003502 Semiconductor device and fabrication method Aug. 23, 2011
7980198 Doping apparatus, doping method, and method for fabricating thin film transistor Jul. 19, 2011
7960286 Narrow channel width effect modification in a shallow trench isolation device Jun. 14, 2011
7951695 Method for reducing plasma discharge damage during processing May. 31, 2011
7939438 Method of inhibiting background plating May. 10, 2011
7927988 Method of fabricating semiconductor device Apr. 19, 2011
7910417 Distributed high voltage JFET Mar. 22, 2011
7910424 Semiconductor memory and fabrication method for the same Mar. 22, 2011
7898038 Method to improve writer leakage in SiGe bipolar device Mar. 1, 2011
7898062 Epitaxial semiconductor layer and method Mar. 1, 2011
7883949 Methods of forming silicon carbide switching devices including P-type channels Feb. 8, 2011
7807537 Method for forming silicon oxide film and for manufacturing capacitor and semiconductor device Oct. 5, 2010
7790588 Dual gate of semiconductor device capable of forming a layer doped in high concentration over a recessed portion of substrate for forming dual gate with recess channel structure and method for Sep. 7, 2010
7713761 Doping apparatus, doping method, and method for fabricating thin film transistor May. 11, 2010
7705429 Epitaxial semiconductor layer and method Apr. 27, 2010
7674695 Wafer cleaning system Mar. 9, 2010
7663125 Ion beam current uniformity monitor, ion implanter and related method Feb. 16, 2010
7491631 Method of doping a gate electrode of a field effect transistor Feb. 17, 2009
7488638 Method for fabricating a voltage-stable PMOSFET semiconductor structure Feb. 10, 2009
7489019 Epitaxial semiconductor layer and method Feb. 10, 2009
7485536 Abrupt junction formation by atomic layer epitaxy of in situ delta doped dopant diffusion barriers Feb. 3, 2009
7465601 Method of forming suspended structure Dec. 16, 2008

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