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Class Information
Number: 257/E21.043
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Device having at least one potential-jump barrier or surface barrier, e.g., pn junction, depletion layer, carrier concentration layer (epo) > Device having semiconductor body comprising carbon, e.g., diamond, diamond-like carbon (epo) > Making n- or p-doped regions (epo) > Using ion im plantation (epo)
Description: This subclass is indented under subclass E21.042. This subclass is substantially the same in scope as ECLA classification H01L21/04D10B.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8664691 |
Silicon photomultiplier with trench isolation |
Mar. 4, 2014 |
| 8633116 |
Dry etching method |
Jan. 21, 2014 |
| 8604529 |
Apparatus with photodiode region in multiple epitaxial layers |
Dec. 10, 2013 |
| 8597962 |
Vertical structure LED current spreading by implanted regions |
Dec. 3, 2013 |
| 8569821 |
Semiconductor devices and methods of forming the same |
Oct. 29, 2013 |
| 8536031 |
Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme |
Sep. 17, 2013 |
| 8466064 |
Semiconductor integrated circuit device and method of manufacturing a semiconductor integrated circuit device |
Jun. 18, 2013 |
| 8343859 |
Non-uniform ion implantation apparatus and method thereof |
Jan. 1, 2013 |
| 8288252 |
Method for recovering damaged components in lower region of low dielectric insulating film |
Oct. 16, 2012 |
| 8252671 |
Semiconductor device and fabrication method |
Aug. 28, 2012 |
| 8247329 |
Nanotube semiconductor devices |
Aug. 21, 2012 |
| 8216923 |
Integrated shadow mask/carrier for patterned ion implantation |
Jul. 10, 2012 |
| 8198194 |
Methods of forming p-channel field effect transistors having SiGe source/drain regions |
Jun. 12, 2012 |
| 8178951 |
Compound semiconductor substrate and control for electrical property thereof |
May. 15, 2012 |
| 8153496 |
Self-aligned process and method for fabrication of high efficiency solar cells |
Apr. 10, 2012 |
| 8101492 |
Method for making semiconductor device |
Jan. 24, 2012 |
| 8101927 |
Masking apparatus for an ion implanter |
Jan. 24, 2012 |
| 8084312 |
Nitrogen based implants for defect reduction in strained silicon |
Dec. 27, 2011 |
| 8076197 |
Image sensor and method for fabricating the same |
Dec. 13, 2011 |
| 8058153 |
Method for recovering damage of low dielectric insulating film for manufacturing semiconductor device |
Nov. 15, 2011 |
| 8048754 |
Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer |
Nov. 1, 2011 |
| 8048787 |
Methods of forming semiconductor devices |
Nov. 1, 2011 |
| 8039374 |
Method for low temperature ion implantation |
Oct. 18, 2011 |
| 8039937 |
Method of forming semiconductor chips, the semiconductor chips so formed and chip-stack package having the same |
Oct. 18, 2011 |
| 8026135 |
Formation of shallow junctions by diffusion from a dielectric doped by cluster or molecular ion beams |
Sep. 27, 2011 |
| 8026160 |
Semiconductor device and semiconductor device manufacturing method |
Sep. 27, 2011 |
| 8013381 |
Semiconductor device |
Sep. 6, 2011 |
| 8003531 |
Method for manufacturing flash memory device |
Aug. 23, 2011 |
| 8003502 |
Semiconductor device and fabrication method |
Aug. 23, 2011 |
| 7980198 |
Doping apparatus, doping method, and method for fabricating thin film transistor |
Jul. 19, 2011 |
| 7960286 |
Narrow channel width effect modification in a shallow trench isolation device |
Jun. 14, 2011 |
| 7951695 |
Method for reducing plasma discharge damage during processing |
May. 31, 2011 |
| 7939438 |
Method of inhibiting background plating |
May. 10, 2011 |
| 7927988 |
Method of fabricating semiconductor device |
Apr. 19, 2011 |
| 7910417 |
Distributed high voltage JFET |
Mar. 22, 2011 |
| 7910424 |
Semiconductor memory and fabrication method for the same |
Mar. 22, 2011 |
| 7898038 |
Method to improve writer leakage in SiGe bipolar device |
Mar. 1, 2011 |
| 7898062 |
Epitaxial semiconductor layer and method |
Mar. 1, 2011 |
| 7883949 |
Methods of forming silicon carbide switching devices including P-type channels |
Feb. 8, 2011 |
| 7807537 |
Method for forming silicon oxide film and for manufacturing capacitor and semiconductor device |
Oct. 5, 2010 |
| 7790588 |
Dual gate of semiconductor device capable of forming a layer doped in high concentration over a recessed portion of substrate for forming dual gate with recess channel structure and method for |
Sep. 7, 2010 |
| 7713761 |
Doping apparatus, doping method, and method for fabricating thin film transistor |
May. 11, 2010 |
| 7705429 |
Epitaxial semiconductor layer and method |
Apr. 27, 2010 |
| 7674695 |
Wafer cleaning system |
Mar. 9, 2010 |
| 7663125 |
Ion beam current uniformity monitor, ion implanter and related method |
Feb. 16, 2010 |
| 7491631 |
Method of doping a gate electrode of a field effect transistor |
Feb. 17, 2009 |
| 7488638 |
Method for fabricating a voltage-stable PMOSFET semiconductor structure |
Feb. 10, 2009 |
| 7489019 |
Epitaxial semiconductor layer and method |
Feb. 10, 2009 |
| 7485536 |
Abrupt junction formation by atomic layer epitaxy of in situ delta doped dopant diffusion barriers |
Feb. 3, 2009 |
| 7465601 |
Method of forming suspended structure |
Dec. 16, 2008 |
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