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Class Information
Number: 257/E21.036
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Making mask on semicond uctor body for further photolithographic processing (epo) > Comprising inorganic layer (epo) > Characterized by their size, orientation, disposition, behavior, shape, in horizontal or vertical plane (epo)
Description: This subclass is indented under subclass E21.033. This subclass is substantially the same in scope as ECLA classification H01L21/033F.










Sub-classes under this class:

Class Number Class Name Patents
257/E21.038 Characterized by process involved to create mask, e.g., lift-off mask, sidewalls, or to modify mask, such as pre-treatment, post-treatment (epo) 464
257/E21.037 Characterized by their behavior during process, e.g., soluble mask, re-deposited mask (epo) 40
257/E21.039 Process specially adapted to improve the resolution of the mask (epo) 194


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8575025 Templated circuitry fabrication Nov. 5, 2013
8551795 Mask Oct. 8, 2013
8461054 Method of manufacturing liquid crystal display device Jun. 11, 2013
8399350 Formation of air gap with protection of metal lines Mar. 19, 2013
8324094 Semiconductor device and manufacturing method thereof Dec. 4, 2012
8304266 Manufacturing method of thin film transistor substrate of liquid crystal display panel Nov. 6, 2012
8288272 Semiconductor device and manufacturing method thereof Oct. 16, 2012
8222140 Pitch division patterning techniques Jul. 17, 2012
8216949 Method for integrated circuit fabrication using pitch multiplication Jul. 10, 2012
8168534 Methods of fabricating electrodes and uses thereof May. 1, 2012
8153512 Patterning techniques Apr. 10, 2012
8114723 Method of forming multi-high-density memory devices and architectures Feb. 14, 2012
8084811 Power devices with super junctions and associated methods manufacturing Dec. 27, 2011
8026183 Method of forming a resist pattern Sep. 27, 2011
7989355 Method of pitch halving Aug. 2, 2011
7910487 Reverse masking profile improvements in high aspect ratio etch Mar. 22, 2011
7888780 Semiconductor structures incorporating multiple crystallographic planes and methods for fabrication thereof Feb. 15, 2011
7883945 Array substrate and method of manufacturing the same Feb. 8, 2011
7872263 Substrate structure for a thin film transistor Jan. 18, 2011
7855148 Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features Dec. 21, 2010
7833904 Methods for fabricating nanoscale electrodes and uses thereof Nov. 16, 2010
7833854 Structure and method of fabricating a hybrid substrate for high-performance hybrid-orientation silicon-on-insulator CMOS devices Nov. 16, 2010
7834425 Hybrid orientation SOI substrates, and method for forming the same Nov. 16, 2010
7804148 Opto-thermal mask including aligned thermal dissipative layer, reflective layer and transparent capping layer Sep. 28, 2010
7794793 Carbon nanotube arrays for field electron emission and methods of manufacture and use Sep. 14, 2010
7767507 Polycrystalline silicon thin film, fabrication method thereof, and thin film transistor without directional dependency on active channels fabricated using the same Aug. 3, 2010
7755172 Opto-electronic and electronic devices using N-face or M-plane GaN substrate prepared with ammonothermal growth Jul. 13, 2010
7736962 Advanced JFET with reliable channel control and method of manufacture Jun. 15, 2010
7696033 Method of fabricating complementary metal-oxide semiconductor (CMOS) thin film transistor (TFT) Apr. 13, 2010
7691688 Strained silicon CMOS on hybrid crystal orientations Apr. 6, 2010
7678627 Process for producing thin film transistor having LDD region Mar. 16, 2010
7674667 CMOS structure including topographic active region Mar. 9, 2010
7670860 Method of manufacturing semiconductor device and semiconductor device Mar. 2, 2010
7662706 Nanostructures formed of branched nanowhiskers and methods of producing the same Feb. 16, 2010
7649243 Semiconductor structures incorporating multiple crystallographic planes and methods for fabrication thereof Jan. 19, 2010
7608857 Field effect transistor having a structure in which an organic semiconductor that forms a channel is made of a single crystal or a polycrystal of organic molecules Oct. 27, 2009
7507674 Memory device including resistance change layer as storage node and method(s) for making the same Mar. 24, 2009
7495347 Ion implantation with multiple concentration levels Feb. 24, 2009
7425483 Structure and method of fabricating a hybrid substrate for high-performance hybrid-orientation silicon-on-insulator CMOS devices Sep. 16, 2008
7381654 Method for fabricating right-angle holes in a substrate Jun. 3, 2008
7355200 Ion-sensitive field effect transistor and method for producing an ion-sensitive field effect transistor Apr. 8, 2008
7329588 Forming a reticle for extreme ultraviolet radiation and structures formed thereby Feb. 12, 2008
7304323 Test mask structure Dec. 4, 2007
7276453 Methods for forming an undercut region and electronic devices incorporating the same Oct. 2, 2007
7276793 Semiconductor device and semiconductor module Oct. 2, 2007
7220612 Liquid crystal display device and fabricating method thereof May. 22, 2007
7196005 Dual damascene process with dummy features Mar. 27, 2007
7060996 Mask, method of producing mask, and method of producing semiconductor device Jun. 13, 2006
7057300 Mask, method of producing mask, and method of producing semiconductor device Jun. 6, 2006
6952055 Intermediate structures in porous substrates in which electrical and optical microdevices are fabricated and intermediate structures formed by the same Oct. 4, 2005

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