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Class Information
Number: 257/E21.034
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Making mask on semicond uctor body for further photolithographic processing (epo) > Comprising inorganic layer (epo) > For lift-off process (epo)
Description: This subclass is indented under subclass E21.033. This subclass is substantially the same in scope as ECLA classification H01L21/033B.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8618001 Lifting-off method and method for manufacturing TFT array substrate Dec. 31, 2013
8575004 Lift-off structure for substrate of a photoelectric device and the method thereof Nov. 5, 2013
8513039 Method for fabricating semiconductor lighting chip Aug. 20, 2013
8394653 Method for fabricating semiconductor lighting chip Mar. 12, 2013
8232122 Method for fabricating light emitting diode chip Jul. 31, 2012
8153475 Back-end processes for substrates re-use Apr. 10, 2012
8153512 Patterning techniques Apr. 10, 2012
8048789 Mesoscale pyramids, arrays and methods of preparation Nov. 1, 2011
8039353 Semiconductor device and manufacturing method of semiconductor device Oct. 18, 2011
7927928 Spacer double patterning for lithography operations Apr. 19, 2011
7851244 Methods for forming metal layers for a MEMS device integrated circuit Dec. 14, 2010
7838435 Method for forming semiconductor fine-pitch pattern Nov. 23, 2010
7700482 Patterned material layer, method of forming the same, microdevice, and method of manufacturing the same Apr. 20, 2010
7695982 Refurbishing a wafer having a low-k dielectric layer Apr. 13, 2010
7696088 Manufacturing methods of metal wire, electrode and TFT array substrate Apr. 13, 2010
7579202 Method for fabricating light emitting diode element Aug. 25, 2009
7446030 Methods for fabricating current-carrying structures using voltage switchable dielectric materials Nov. 4, 2008
7291891 In-solid nuclear spin quantum calculation device Nov. 6, 2007
7041228 Substrate for and a process in connection with the product of structures May. 9, 2006
7033936 Process for making island arrays Apr. 25, 2006
7008810 Method for fabricating at least one mesa or ridge structure or at least one electrically pumped region in a layer or layer sequence Mar. 7, 2006
6916597 Method for fabricating a resist pattern, a method for patterning a thin film and a method for manufacturing a micro device Jul. 12, 2005
6914003 Method for manufacturing magnetic random access memory Jul. 5, 2005
6849532 Method of manufacturing a transistor in a semiconductor device Feb. 1, 2005
6846750 High precision pattern forming method of manufacturing a semiconductor device Jan. 25, 2005
6686128 Method of fabricating patterned layers of material upon a substrate Feb. 3, 2004
6627526 Method for fabricating a conductive structure for a semiconductor device Sep. 30, 2003
6623988 Method for fabricating ferroelectric capacitor of semiconductor device Sep. 23, 2003
6590250 DRAM capacitor array and integrated device array of substantially identically shaped devices Jul. 8, 2003
6537866 Method of forming narrow insulating spacers for use in reducing minimum component size Mar. 25, 2003
6521541 Surface preparation of substances for continuous convective assembly of fine particles Feb. 18, 2003
6451684 Semiconductor device having a conductive layer side surface slope which is at least and method for manufacturing the same Sep. 17, 2002
6383853 Method of fabricating semiconductor device May. 7, 2002
6365470 Method for manufacturing self-matching transistor Apr. 2, 2002
6274198 Shadow mask deposition Aug. 14, 2001
6180429 Process for selective area growth of III-V semiconductors Jan. 30, 2001
6156665 Trilayer lift-off process for semiconductor device metallization Dec. 5, 2000
6121653 Dram capacitor arrays with 3-capacitor and 6-capacitor geometries Sep. 19, 2000
6080514 Fabrication method of mask for semiconductor device Jun. 27, 2000
6048671 Ultra-fine microfabrication method using an energy beam Apr. 11, 2000
6015976 Fabrication apparatus employing energy beam Jan. 18, 2000
6010831 Ultra-fine microfabrication method using an energy beam Jan. 4, 2000
6007969 Ultra-fine microfabrication method using an energy beam Dec. 28, 1999
5950106 Method of patterning a metal substrate using spin-on glass as a hard mask Sep. 7, 1999
5894058 Ultra-fine microfabrication method using a fast atomic energy beam Apr. 13, 1999
5891804 Process for conductors with selective deposition Apr. 6, 1999
5871870 Mask for forming features on a semiconductor substrate and a method for forming the mask Feb. 16, 1999
5868952 Fabrication method with energy beam Feb. 9, 1999
5858847 Method for a lightly doped drain structure Jan. 12, 1999
5858861 Reducing nitride residue by changing the nitride film surface property Jan. 12, 1999

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