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Browse by Category: Main > Physics
Class Information
Number: 257/E21.028
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Making mask on semicond uctor body for further photolithographic processing (epo) > Comprising organic layer (epo) > Characterized by treatment of photoresist layer (epo) > Photolith ographic process (epo) > Using laser (epo)
Description: This subclass is indented under subclass E21.027. This subclass is substantially the same in scope as ECLA classification H01L21/027B6B2.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8658532 Method and material for forming a double exposure lithography pattern Feb. 25, 2014
8574971 Method of manufacturing a thin-film transistor and method of manufacturing a display substrate using the same Nov. 5, 2013
8435807 Method for manufacturing a solid state laser having a passive Q-switch May. 7, 2013
8431467 Laser working method Apr. 30, 2013
8426324 Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method Apr. 23, 2013
8357598 Method for manufacturing antenna and method for manufacturing semiconductor device Jan. 22, 2013
8258056 Method and material for forming a double exposure lithography pattern Sep. 4, 2012
8211719 Method of processing substrate and method of manufacturing substrate for use in liquid ejection head Jul. 3, 2012
8093110 Method for manufacturing thin film transistor Jan. 10, 2012
8026154 Laser working method Sep. 27, 2011
7998846 3-D integrated circuit system and method Aug. 16, 2011
7994030 Method for manufacturing antenna and method for manufacturing semiconductor device Aug. 9, 2011
7951725 Manufacturing method of translucent solar cell May. 31, 2011
7923275 Surface emitting laser and manufacturing method thereof Apr. 12, 2011
7915153 Passivation film and method of forming the same Mar. 29, 2011
7910465 Manufacturing method of semiconductor substrate Mar. 22, 2011
7879742 Laser annealing method wherein reflected beams are minimized Feb. 1, 2011
7863186 Fully and uniformly silicided gate structure and method for forming same Jan. 4, 2011
7858451 Electronic device, semiconductor device and manufacturing method thereof Dec. 28, 2010
7795081 Method for manufacturing thin film transistor Sep. 14, 2010
7776667 Semiconductor device and manufacturing method thereof, liquid crystal television system, and EL television system Aug. 17, 2010
7704883 Annealing to improve edge roughness in semiconductor technology Apr. 27, 2010
7615389 GaN lasers on ALN substrates and methods of fabrication Nov. 10, 2009
7592269 Method and apparatus for depositing charge and/or nanoparticles Sep. 22, 2009
7531465 Method of manufacturing nitride-based semiconductor light emitting device May. 12, 2009
7482270 Fully and uniformly silicided gate structure and method for forming same Jan. 27, 2009
7410852 Opto-thermal annealing methods for forming metal gate and fully silicided gate field effect transistors Aug. 12, 2008
7329936 Mask for sequential lateral solidification and crystallization method using thereof Feb. 12, 2008
7232771 Method and apparatus for depositing charge and/or nanoparticles Jun. 19, 2007
7067894 Semiconductor devices using anti-reflective coatings Jun. 27, 2006
7060635 Method of manufacturing semiconductor device and method of forming pattern Jun. 13, 2006
7026253 Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask Apr. 11, 2006
7026099 Pattern forming method and method for manufacturing semiconductor device Apr. 11, 2006
7015529 Localized masking for semiconductor structure development Mar. 21, 2006
6960532 Suppressing lithography at a wafer edge Nov. 1, 2005
6933236 Method for forming pattern using argon fluoride photolithography Aug. 23, 2005
6924023 Method of manufacturing a structure having pores Aug. 2, 2005
6887649 Multi-layered resist structure and manufacturing method of semiconductor device May. 3, 2005
6713234 Fabrication of semiconductor devices using anti-reflective coatings Mar. 30, 2004
6610463 Method of manufacturing structure having pores Aug. 26, 2003
6573554 Localized masking for semiconductor structure development Jun. 3, 2003
6410348 Interface texturing for light-emitting device Jun. 25, 2002
6358793 Method for localized masking for semiconductor structure development Mar. 19, 2002
6340557 Pattern formation method Jan. 22, 2002
6200907 Ultra-thin resist and barrier metal/oxide hard mask for metal etch Mar. 13, 2001
6143671 Semiconductor device manufacturing method Nov. 7, 2000
6037967 Short wavelength pulsed laser scanner Mar. 14, 2000
5981149 Method for manufacturing semiconductor device Nov. 9, 1999
5902716 Exposure method and apparatus May. 11, 1999
5876901 Method for fabricating semiconductor device Mar. 2, 1999

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