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Class Information
Number: 257/E21.027
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Making mask on semicond uctor body for further photolithographic processing (epo) > Comprising organic layer (epo) > Characterized by treatment of photoresist layer (epo) > Photolith ographic process (epo)
Description: This subclass is indented under subclass E21.026. This subclass is substantially the same in scope as ECLA classification H01L21/027B6B.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.029 Using anti-reflective coating (epo) 467
257/E21.028 Using laser (epo) 66

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8679922 Method of producing semiconductor device and method of producing solid-state image pickup device Mar. 25, 2014
8669623 Structure related to a thick bottom dielectric (TBD) for trench-gate devices Mar. 11, 2014
8664040 Exposing connectors in packages through selective treatment Mar. 4, 2014
8658538 Method of fabricating memory device Feb. 25, 2014
8647988 Memory device and method of fabricating the same Feb. 11, 2014
8637389 Resist feature and removable spacer pitch doubling patterning method for pillar structures Jan. 28, 2014
8633116 Dry etching method Jan. 21, 2014
8624313 Method of manufacturing semiconductor memory device Jan. 7, 2014
8609489 Methods of forming memory; and methods of forming vertical structures Dec. 17, 2013
8592882 Magnetic random access memory and manufacturing method thereof Nov. 26, 2013
8574926 Magnetic memory and manufacturing method thereof Nov. 5, 2013
8569821 Semiconductor devices and methods of forming the same Oct. 29, 2013
8536031 Method of fabricating dual damascene structures using a multilevel multiple exposure patterning scheme Sep. 17, 2013
8530247 Control of implant pattern critical dimensions using STI step height offset Sep. 10, 2013
8530932 Replacement spacer for tunnel FETS Sep. 10, 2013
8501619 Methods for forming a plurality of contact holes in a microelectronic device Aug. 6, 2013
8497204 Method for reducing dielectric overetch when making contact to conductive features Jul. 30, 2013
8481381 Superior integrity of high-k metal gate stacks by preserving a resist material above end caps of gate electrode structures Jul. 9, 2013
8466064 Semiconductor integrated circuit device and method of manufacturing a semiconductor integrated circuit device Jun. 18, 2013
8455981 Doped graphene electronic materials Jun. 4, 2013
8435822 Patterning electrode materials free from berm structures for thin film photovoltaic cells May. 7, 2013
8426287 Method of manufacturing semiconductor device, solid-state imaging device, and solid-state imaging apparatus Apr. 23, 2013
8426925 Memory device and method of fabricating the same Apr. 23, 2013
8415728 Memory device and method of fabricating the same Apr. 9, 2013
8409982 Method of forming solid blind vias through the dielectric coating on high density interconnect (HDI) substrate materials Apr. 2, 2013
8405185 Semiconductor device and semiconductor module including the same Mar. 26, 2013
8395699 Solid-state imaging device, camera, electronic apparatus, and method for manufacturing solid-state imaging device Mar. 12, 2013
8394719 System and method for implementing multi-resolution advanced process control Mar. 12, 2013
8383522 Micro pattern forming method Feb. 26, 2013
8354323 Doped graphene electronic materials Jan. 15, 2013
8313997 Method of manufacturing a semiconductor memory using two exposure masks to form a same wiring layer Nov. 20, 2012
8278724 Methods of fabricating a micromechanical structure Oct. 2, 2012
8252691 Method of forming semiconductor patterns Aug. 28, 2012
8178400 Replacement spacer for tunnel FETs May. 15, 2012
8173550 Method for positioning spacers for pitch multiplication May. 8, 2012
8129713 Photoelectric conversion element, method for manufacturing photoelectric conversion element, and electronic apparatus Mar. 6, 2012
8123968 Multiple deposition for integration of spacers in pitch multiplication process Feb. 28, 2012
8110880 Systems and methods for interconnect metallization using a stop-etch layer Feb. 7, 2012
8105961 Method and apparatus for using flex circuit technology to create a reference electrode channel Jan. 31, 2012
8101530 Lithography patterning method Jan. 24, 2012
8076729 Semiconductor device having a dual gate electrode and methods of making the same Dec. 13, 2011
8058151 Methods of die sawing Nov. 15, 2011
8048787 Methods of forming semiconductor devices Nov. 1, 2011
8048735 Manufacturing method of semiconductor device Nov. 1, 2011
8039937 Method of forming semiconductor chips, the semiconductor chips so formed and chip-stack package having the same Oct. 18, 2011
8017457 Method of manufacturing semiconductor memory device Sep. 13, 2011
8017460 Method of manufacturing flat panel display Sep. 13, 2011
8013423 Method for fabricating a metal interconnection using a dual damascene process and resulting semiconductor device Sep. 6, 2011
8008188 Method of forming solid blind vias through the dielectric coating on high density interconnect substrate materials Aug. 30, 2011
8008211 Pattern forming method, semiconductor device manufacturing apparatus and storage medium Aug. 30, 2011

1 2 3 4 5 6 7 8 9

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