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Class Information
Number: 257/E21.026
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Making mask on semicond uctor body for further photolithographic processing (epo) > Comprising organic layer (epo) > Characterized by treatment of photoresist layer (epo)
Description: This subclass is indented under subclass E21.024. This subclass is substantially the same in scope as ECLA classification H01L21/027B6.

Sub-classes under this class:

Class Number Class Name Patents
257/E21.03 Electro-lithographic process (epo) 72
257/E21.032 Ion lithographic process (epo) 23
257/E21.027 Photolith ographic process (epo) 430
257/E21.031 X-ray lithographic process (epo) 21

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8652886 Thin film transistor array substrate for a display panel and a method for manufacturing a thin film transistor array substrate for a display panel Feb. 18, 2014
8617653 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent Dec. 31, 2013
8618002 Resist pattern formating method Dec. 31, 2013
8557645 Semiconductor device with a gate electrode having a shape formed based on a slope and gate lower opening and method of manufacturing the same Oct. 15, 2013
8414304 Organic light emitting diode lighting devices Apr. 9, 2013
8395699 Solid-state imaging device, camera, electronic apparatus, and method for manufacturing solid-state imaging device Mar. 12, 2013
8309469 Method of fabricating semiconductor device Nov. 13, 2012
8304262 Wiggling control for pseudo-hardmask Nov. 6, 2012
8298956 Method for fabricating fine pattern Oct. 30, 2012
8278724 Methods of fabricating a micromechanical structure Oct. 2, 2012
8173550 Method for positioning spacers for pitch multiplication May. 8, 2012
8123968 Multiple deposition for integration of spacers in pitch multiplication process Feb. 28, 2012
8030149 Method for manufacturing semiconductor device Oct. 4, 2011
8026564 Image sensor and fabrication method thereof Sep. 27, 2011
8008211 Pattern forming method, semiconductor device manufacturing apparatus and storage medium Aug. 30, 2011
8003542 Multiple spacer steps for pitch multiplication Aug. 23, 2011
7994060 Dual exposure track only pitch split process Aug. 9, 2011
7989156 Substrate treatment method and substrate treatment apparatus Aug. 2, 2011
7972964 Semiconductor device with contact structure and manufacturing method thereof Jul. 5, 2011
7879725 Stripping composition for removing a photoresist and method of manufacturing TFT substrate for a liquid crystal display device using the same Feb. 1, 2011
7855146 Photo-focus modulation method for forming transistor gates and related transistor devices Dec. 21, 2010
7838435 Method for forming semiconductor fine-pitch pattern Nov. 23, 2010
7786020 Method for fabricating nonvolatile memory device Aug. 31, 2010
7732341 Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same Jun. 8, 2010
7727895 Substrate processing system and substrate processing method Jun. 1, 2010
7718347 Method for making an improved thin film solar cell interconnect using etch and deposition process May. 18, 2010
7670761 Method of forming a fine pattern of a semiconductor device using a resist reflow measurement key Mar. 2, 2010
7671389 SRAM devices having buried layer patterns Mar. 2, 2010
7655568 Method for manufacturing underlying pattern of semiconductor device Feb. 2, 2010
7638373 Method of manufacturing a thin-film transistor substrate Dec. 29, 2009
7629595 Method for fabricating semiconductor device Dec. 8, 2009
7598176 Method for photoresist stripping and treatment of low-k dielectric material Oct. 6, 2009
7589375 Non-volatile memory devices including etching protection layers and methods of forming the same Sep. 15, 2009
7585781 Method of forming openings in an organic resin material Sep. 8, 2009
7575998 Semiconductor device and metal line fabrication method of the same Aug. 18, 2009
7560390 Multiple spacer steps for pitch multiplication Jul. 14, 2009
7553771 Method of forming pattern of semiconductor device Jun. 30, 2009
7534711 System and method for direct etching May. 19, 2009
7531465 Method of manufacturing nitride-based semiconductor light emitting device May. 12, 2009
7514361 Selective thin metal cap process Apr. 7, 2009
7482280 Method for forming a lithography pattern Jan. 27, 2009
7468327 Methods of fabricating a micromechanical structure Dec. 23, 2008
7452820 Radiation-resistant zone plates and method of manufacturing thereof Nov. 18, 2008
7361588 Etch process for CD reduction of arc material Apr. 22, 2008
7354781 Method of manufacturing field emission device Apr. 8, 2008
7332444 Method for smoothing areas in structures by utilizing the surface tension Feb. 19, 2008
7329618 Ion implanting methods Feb. 12, 2008
7294586 Method of processing a substrate, heating apparatus, and method of forming a pattern Nov. 13, 2007
7276452 Method for removing mottled etch in semiconductor fabricating process Oct. 2, 2007
7253113 Methods for using a silylation technique to reduce cell pitch in semiconductor devices Aug. 7, 2007

1 2 3 4

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