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Class Information
Number: 257/E21.025
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Making mask on semicond uctor body for further photolithographic processing (epo) > Comprising organic layer (epo) > For lift-off process (epo)
Description: This subclass is indented under subclass E21.024. This subclass is substantially the same in scope as ECLA classification H01L21/027B2.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8703611 Method for manufacturing a semiconductor structure Apr. 22, 2014
8633069 Array substrate and manufacturing method thereof, active display Jan. 21, 2014
8575004 Lift-off structure for substrate of a photoelectric device and the method thereof Nov. 5, 2013
8236689 Method for applying a structure to a semiconductor element Aug. 7, 2012
8178374 Thin film patterning method and method for manufacturing a liquid crystal display device May. 15, 2012
8153475 Back-end processes for substrates re-use Apr. 10, 2012
8133775 Semiconductor device with mushroom electrode and manufacture method thereof Mar. 13, 2012
8048789 Mesoscale pyramids, arrays and methods of preparation Nov. 1, 2011
8039353 Semiconductor device and manufacturing method of semiconductor device Oct. 18, 2011
8030772 Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Oct. 4, 2011
7994060 Dual exposure track only pitch split process Aug. 9, 2011
7977146 Method for manufacturing a photovoltaic module Jul. 12, 2011
7943519 Etchant, method for fabricating interconnection line using the etchant, and method for fabricating thin film transistor substrate using the etchant May. 17, 2011
7871908 Method of manufacturing semiconductor device Jan. 18, 2011
7858412 Thin-film transistor substrate and method of fabricating the same Dec. 28, 2010
7851244 Methods for forming metal layers for a MEMS device integrated circuit Dec. 14, 2010
7795144 Method for forming electrode structure for use in light emitting device and method for forming stacked structure Sep. 14, 2010
7704885 Semiconductor device and method for fabricating the same Apr. 27, 2010
7700483 Method for fabricating pixel structure Apr. 20, 2010
7695982 Refurbishing a wafer having a low-k dielectric layer Apr. 13, 2010
7569484 Plasma and electron beam etching device and method Aug. 4, 2009
7528466 Copper gate electrode of liquid crystal display device and method of fabricating the same May. 5, 2009
7488687 Methods of forming electrical interconnect structures using polymer residues to increase etching selectivity through dielectric layers Feb. 10, 2009
7482271 Manufacturing method for electronic substrate, manufacturing method for electro-optical device, and manufacturing method for electronic device Jan. 27, 2009
7473607 Method of manufacturing a multi-workfunction gates for a CMOS circuit Jan. 6, 2009
7439144 CMOS gate structures fabricated by selective oxidation Oct. 21, 2008
7316784 Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof Jan. 8, 2008
7220612 Liquid crystal display device and fabricating method thereof May. 22, 2007
7183224 Liftoff process for thin photoresist Feb. 27, 2007
7071088 Method for fabricating bulbous-shaped vias Jul. 4, 2006
7008810 Method for fabricating at least one mesa or ridge structure or at least one electrically pumped region in a layer or layer sequence Mar. 7, 2006
6933099 Method of forming a patterned metal layer Aug. 23, 2005
6924230 Method for forming a conductive layer Aug. 2, 2005
6881656 Production process for semiconductor apparatus Apr. 19, 2005
6835635 Electrode forming method and field effect transistor Dec. 28, 2004
6825122 Method for fabricating a patterned thin film and a micro device Nov. 30, 2004
6737202 Method of fabricating a tiered structure using a multi-layered resist stack and use May. 18, 2004
6727126 Masking member for forming fine electrode and manufacturing method therefor, method for forming electrode, and field effect transistor Apr. 27, 2004
6569763 Method to separate a metal film from an insulating film in a semiconductor device using adhesive tape May. 27, 2003
6458682 Method of manufacturing a bump electrode semiconductor device using photosensitive resin Oct. 1, 2002
6440846 Method for forming semiconductor device Aug. 27, 2002
6420252 Methods of forming robust metal contacts on compound semiconductors Jul. 16, 2002
6340635 Resist pattern, process for the formation of the same, and process for the formation of wiring pattern Jan. 22, 2002
6340626 Method for making a metallic pattern by photolithography Jan. 22, 2002
6207499 Semiconductor device, method of fabricating the same, and sputtering apparatus Mar. 27, 2001
6156665 Trilayer lift-off process for semiconductor device metallization Dec. 5, 2000
6156672 Method of forming dielectric thin film pattern and method of forming laminate pattern comprising dielectric thin film and conductive thin film Dec. 5, 2000
6080514 Fabrication method of mask for semiconductor device Jun. 27, 2000
5981319 Method of forming a T-shaped gate Nov. 9, 1999
5953595 Method of manufacturing thin film transistor Sep. 14, 1999

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