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Class Information
Number: 257/E21.023
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Making mask on semicond uctor body for further photolithographic processing (epo)
Description: This subclass is indented under subclass E21.002. This subclass is substantially the same in scope as ECLA classification H01L21/027.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7413962 |
Method for forming sublithographic features during the manufacture of a semiconductor device and a resulting in-process apparatus |
Aug. 19, 2008 |
| 7410891 |
Method of manufacturing a superjunction device |
Aug. 12, 2008 |
| 7393728 |
Method of manufacturing an array substrate of a transflective liquid crystal display |
Jul. 1, 2008 |
| 7384874 |
Method of forming hardmask pattern of semiconductor device |
Jun. 10, 2008 |
| 7386182 |
Optimization of multiple feature lithography |
Jun. 10, 2008 |
| 7381655 |
Mandrel/trim alignment in SIT processing |
Jun. 3, 2008 |
| 7381644 |
Pulsed PECVD method for modulating hydrogen content in hard mask |
Jun. 3, 2008 |
| 7378289 |
Method for forming photomask having test patterns in blading areas |
May. 27, 2008 |
| 7368362 |
Methods for increasing photo alignment margins |
May. 6, 2008 |
| 7361523 |
Three-axis accelerometer |
Apr. 22, 2008 |
| 7361569 |
Methods for increasing photo-alignment margins |
Apr. 22, 2008 |
| 7354808 |
Resist composition and method for manufacturing semiconductor device using the same |
Apr. 8, 2008 |
| 7354781 |
Method of manufacturing field emission device |
Apr. 8, 2008 |
| 7341893 |
Structure and method for thin film device |
Mar. 11, 2008 |
| 7329936 |
Mask for sequential lateral solidification and crystallization method using thereof |
Feb. 12, 2008 |
| 7327013 |
Stencil mask with charge-up prevention and method of manufacturing the same |
Feb. 5, 2008 |
| 7314773 |
Low resistance thin film organic solar cell electrodes |
Jan. 1, 2008 |
| 7303994 |
Process for interfacial adhesion in laminate structures through patterned roughing of a surface |
Dec. 4, 2007 |
| 7271094 |
Multiple shadow mask structure for deposition shadow mask protection and method of making and using same |
Sep. 18, 2007 |
| 7268054 |
Methods for increasing photo-alignment margins |
Sep. 11, 2007 |
| 7259107 |
Method of forming isolated features of semiconductor devices |
Aug. 21, 2007 |
| 7247574 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography |
Jul. 24, 2007 |
| 7242100 |
Method for manufacturing semiconductor device with plural semiconductor chips |
Jul. 10, 2007 |
| 7189646 |
Method of enhancing the adhesion between photoresist layer and substrate and bumping process |
Mar. 13, 2007 |
| 7176114 |
Method of depositing patterned films of materials using a positive imaging process |
Feb. 13, 2007 |
| 7160814 |
Method for forming contact in semiconductor device |
Jan. 9, 2007 |
| 7151040 |
Methods for increasing photo alignment margins |
Dec. 19, 2006 |
| 7132361 |
System for and method of forming via holes by multiple deposition events in a continuous inline shadow mask deposition process |
Nov. 7, 2006 |
| 7129176 |
Optical device having micro lens array and method for manufacturing the same |
Oct. 31, 2006 |
| 7122453 |
Methods of patterning radiation, methods of forming radiation-patterning tools, and radiation-patterning tools |
Oct. 17, 2006 |
| 7122455 |
Patterning with rigid organic under-layer |
Oct. 17, 2006 |
| 7109110 |
Method of manufacturing a superjunction device |
Sep. 19, 2006 |
| 7084445 |
High-throughput thin-film fabrication vacuum flange |
Aug. 1, 2006 |
| 7071074 |
Structure and method for placement, sizing and shaping of dummy structures |
Jul. 4, 2006 |
| 6436220 |
Process for the collective removal of resist material and side wall protective film |
Aug. 20, 2002 |
| 6358763 |
Methods of forming a mask pattern and methods of forming a field emitter tip mask |
Mar. 19, 2002 |
| 6165878 |
Method of manufacturing semiconductor device |
Dec. 26, 2000 |
| 6143580 |
Methods of forming a mask pattern and methods of forming a field emitter tip mask |
Nov. 7, 2000 |
| 6042738 |
Pattern film repair using a focused particle beam system |
Mar. 28, 2000 |
| 5939240 |
Semiconductor element structure with stepped portion for formation of element patterns |
Aug. 17, 1999 |
| 5798543 |
Semiconductor element structure with stepped portion for formation of element patterns |
Aug. 25, 1998 |
| 5654354 |
Compositions for diffusion patterning |
Aug. 5, 1997 |
| 5166888 |
Fabrication of particle beam masks |
Nov. 24, 1992 |
| 5038322 |
Method of and device for sub-micron processing a surface |
Aug. 6, 1991 |
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