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Class Information
Number: 257/E21.021
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having multilayers, e.g., comprising barrier layer and metal layer (epo)
Description: This subclass is indented under subclass E21.012. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C4.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8710657 Semiconductor assembly and semiconductor package including a solder channel Apr. 29, 2014
8680599 Semiconductor device and method of manufacturing the same Mar. 25, 2014
8671560 In system reflow of low temperature eutectic bond balls Mar. 18, 2014
8664046 Manufacturing method thereof and a semiconductor device Mar. 4, 2014
8658532 Method and material for forming a double exposure lithography pattern Feb. 25, 2014
8642400 Method of manufacturing semiconductor device including capacitor element Feb. 4, 2014
8618645 Package process and package structure Dec. 31, 2013
8617985 High temperature tungsten metallization process Dec. 31, 2013
8614104 Method for manufacturing semiconductor device Dec. 24, 2013
8569080 Method for packaging light emitting diode Oct. 29, 2013
8541867 Metal insulator metal structure with remote oxygen scavenging Sep. 24, 2013
8497537 Semiconductor device with ferro-electric capacitor Jul. 30, 2013
8461012 Device with ground plane for high frequency signal transmission and method therefor Jun. 11, 2013
8455360 Method for fabricating storage node of semiconductor device Jun. 4, 2013
8441077 Method for forming a ruthenium metal layer and a structure comprising the ruthenium metal layer May. 14, 2013
8426972 Semiconductor device and method for manufacturing the same Apr. 23, 2013
8283227 Method for manufacturing semiconductor memory device Oct. 9, 2012
8258056 Method and material for forming a double exposure lithography pattern Sep. 4, 2012
8258626 Copper interconnection, method for forming copper interconnection structure, and semiconductor device Sep. 4, 2012
8254175 Semiconductor device and method of manufacturing the same Aug. 28, 2012
8242498 Compound semiconductor substrate, semiconductor device, and processes for producing them Aug. 14, 2012
8227893 Semiconductor device with capacitor element Jul. 24, 2012
8188599 Semiconductor device, its manufacturing method, and sputtering target material for use in the method May. 29, 2012
8169079 Copper interconnection structures and semiconductor devices May. 1, 2012
8158512 Atomic layer deposition method and semiconductor device formed by the same Apr. 17, 2012
8143138 Method for fabricating interconnect structures for semiconductor devices Mar. 27, 2012
8133792 Method for reducing capacitance variation between capacitors Mar. 13, 2012
8134194 Memory cells, memory cell constructions, and memory cell programming methods Mar. 13, 2012
8114752 Structure of capacitor set Feb. 14, 2012
8093698 Gettering/stop layer for prevention of reduction of insulating oxide in metal-insulator-metal device Jan. 10, 2012
8034709 Method for forming composite barrier layer Oct. 11, 2011
8030772 Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region Oct. 4, 2011
8008161 Capacitor assemblies Aug. 30, 2011
8003479 Low temperature deposition and ultra fast annealing of integrated circuit thin film capacitor Aug. 23, 2011
8004082 Electronic component formed with barrier-seed layer on base material Aug. 23, 2011
7989362 Hafnium lanthanide oxynitride films Aug. 2, 2011
7968436 Low-K SiC copper diffusion barrier films Jun. 28, 2011
7939872 Multi-dielectric films for semiconductor devices and methods of fabricating multi-dielectric films May. 10, 2011
7928479 Semiconductor device and method for manufacturing the same Apr. 19, 2011
7897507 Barrier layer configurations and methods for processing microelectronic topographies having barrier layers Mar. 1, 2011
7867916 Horizontal coffee-stain method using control structure to pattern self-organized line structures Jan. 11, 2011
7863609 Compound semiconductor substrate, semiconductor device, and processes for producing them Jan. 4, 2011
7847384 Semiconductor package and manufacturing method thereof Dec. 7, 2010
7847405 Semiconductor device and manufacturing method of semiconductor device Dec. 7, 2010
7842604 Low-k b-doped SiC copper diffusion barrier films Nov. 30, 2010
7833899 Multi-layer thick metallization structure for a microelectronic device, intergrated circuit containing same, and method of manufacturing an integrated circuit containing same Nov. 16, 2010
7825014 Method for fabricating semiconductor device Nov. 2, 2010
7785977 Thin film capacitor and manufacturing method therefor Aug. 31, 2010
7781820 Semiconductor memory device and method of manufacturing the same Aug. 24, 2010
7755125 Semiconductor device including ferroelectric capacitor Jul. 13, 2010

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