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Class Information
Number: 257/E21.02
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having vertical extensions (epo) > Made by patterning layers, e.g., etching conductive layers (epo)
Description: This subclass is indented under subclass E21.018. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2V6.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8623692 Method for manufacturing solar cell including etching Jan. 7, 2014
8617950 Method of forming a capacitor and method of manufacturing a semiconductor device using the same Dec. 31, 2013
8575731 Semiconductor device with a balun Nov. 5, 2013
8481426 Method of forming pattern structure and method of fabricating semiconductor device using the same Jul. 9, 2013
8383437 Echtant and method for manufacturing display device using the same Feb. 26, 2013
8354347 Method of forming high-k dielectric stop layer for contact hole opening Jan. 15, 2013
8314034 Feature size reduction Nov. 20, 2012
8268708 Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers Sep. 18, 2012
8193099 Protecting exposed metal gate structures from etching processes in integrated circuit manufacturing Jun. 5, 2012
8178958 Semiconductor device having antenna and method for manufacturing thereof May. 15, 2012
8138089 Method and apparatus for measurement and control of photomask to substrate alignment Mar. 20, 2012
8124490 Semiconductor device and method of forming passive devices Feb. 28, 2012
8076778 Method for preventing Al-Cu bottom damage using TiN liner Dec. 13, 2011
8012811 Methods of forming features in integrated circuits Sep. 6, 2011
8003544 Method of manufacturing semiconductor device Aug. 23, 2011
7943470 Chip-stacked semiconductor device and manufacturing method thereof May. 17, 2011
7939822 Active matrix display device May. 10, 2011
7927959 Method of patterning a metal on a vertical sidewall of an excavated feature, method of forming an embedded MIM capacitor using same, and embedded memory device produced thereby Apr. 19, 2011
7910483 Trim process for critical dimension control for integrated circuits Mar. 22, 2011
7888725 Electronic devices including electrode walls with insulating layers thereon Feb. 15, 2011
7858451 Electronic device, semiconductor device and manufacturing method thereof Dec. 28, 2010
7846801 Method of fabricating semiconductor device Dec. 7, 2010
7847405 Semiconductor device and manufacturing method of semiconductor device Dec. 7, 2010
7700433 MIM type capacitor Apr. 20, 2010
7700472 Method of forming a gate of a semiconductor device Apr. 20, 2010
7684003 Liquid crystal display device and method for manufacturing the same Mar. 23, 2010
7674682 Capacitor integration at top-metal level with a protective cladding for copper surface protection Mar. 9, 2010
7674710 Method of integrating metal-containing films into semiconductor devices Mar. 9, 2010
7670921 Structure and method for self aligned vertical plate capacitor Mar. 2, 2010
7662718 Trim process for critical dimension control for integrated circuits Feb. 16, 2010
7655530 Segmented end electrode capacitor and method of segmenting an end electrode of a capacitor Feb. 2, 2010
7646007 Silver-selenide/chalcogenide glass stack for resistance variable memory Jan. 12, 2010
7547638 Method for manufacturing semiconductor device Jun. 16, 2009
7482274 Metal wiring and method of manufacturing the same, and metal wiring substrate and method of manufacturing the same Jan. 27, 2009
7405418 Memory device electrode with a surface structure Jul. 29, 2008
7335526 Sensing system Feb. 26, 2008
7262108 Methods for forming resistors for integrated circuit devices Aug. 28, 2007
7241700 Methods for post offset spacer clean for improved selective epitaxy silicon growth Jul. 10, 2007
7187085 Semiconductor device including dual damascene interconnections Mar. 6, 2007
7115531 Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices Oct. 3, 2006
7060454 Method for sorting antifungal molecules acting on the glucanosyltransferase activity Jun. 13, 2006
7041551 Device and a method for forming a capacitor device May. 9, 2006
7022495 Method for sorting antifungal molecules acting on the glucanosyltransferase activity Apr. 4, 2006
7015529 Localized masking for semiconductor structure development Mar. 21, 2006
6972451 Trench capacitor in a substrate with two floating electrodes independent from the substrate Dec. 6, 2005
6949431 Method for fabricating cylinder type capacitor Sep. 27, 2005
6844268 Method for fabricating a semiconductor storage device having an increased dielectric film area Jan. 18, 2005
6815754 Spacer patterned, high dielectric constant capacitor Nov. 9, 2004
6723602 Method for spacer patterned, high dielectric constant capacitor Apr. 20, 2004
6693002 Semiconductor device and its manufacture Feb. 17, 2004

1 2 3 4 5

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