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Class Information
Number: 257/E21.019
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having vertical extensions (epo) > Made by depositing layers, e.g., alternatingly conductive and insulating layers (epo)
Description: This subclass is indented under subclass E21.018. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2V2.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7420210 |
Light emitting device, method of manufacturing the same, and manufacturing apparatus therefor |
Sep. 2, 2008 |
| 7408232 |
Semiconductor device and method for fabricating the same |
Aug. 5, 2008 |
| 7393742 |
Semiconductor device having a capacitor and a fabrication method thereof |
Jul. 1, 2008 |
| 7381613 |
Self-aligned MIM capacitor process for embedded DRAM |
Jun. 3, 2008 |
| 7358146 |
Method of forming a capacitor |
Apr. 15, 2008 |
| 7327011 |
Multi-surfaced plate-to-plate capacitor and method of forming same |
Feb. 5, 2008 |
| 7321146 |
DRAM memory cell and method of manufacturing the same |
Jan. 22, 2008 |
| 7314795 |
Methods of forming electronic devices including electrodes with insulating spacers thereon |
Jan. 1, 2008 |
| 7279728 |
Variable capacitance device with high accuracy |
Oct. 9, 2007 |
| 7276409 |
Method of forming a capacitor |
Oct. 2, 2007 |
| 7273778 |
Method of electroplating a substance over a semiconductor substrate |
Sep. 25, 2007 |
| 7223661 |
Method of manufacturing semiconductor device |
May. 29, 2007 |
| 7179716 |
Method of forming a metal-containing layer over selected regions of a semiconductor substrate |
Feb. 20, 2007 |
| 7135955 |
Electrical component with a negative temperature coefficient |
Nov. 14, 2006 |
| 7098134 |
Method for fabricating semiconductor device |
Aug. 29, 2006 |
| 7071058 |
Methods of forming capacitors, and methods of forming DRAM circuitry |
Jul. 4, 2006 |
| 7064029 |
Semiconductor memory device and method of producing the same |
Jun. 20, 2006 |
| 7064028 |
Semiconductor memory and method of producing the same |
Jun. 20, 2006 |
| 7057285 |
Aluminum interconnects with metal silicide diffusion barriers |
Jun. 6, 2006 |
| 7052957 |
Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules |
May. 30, 2006 |
| 7052956 |
Method for forming capacitor of semiconductor device |
May. 30, 2006 |
| 7053432 |
Enhanced surface area capacitor fabrication methods |
May. 30, 2006 |
| 7053435 |
Electronic devices including electrodes with insulating spacers thereon |
May. 30, 2006 |
| 7053462 |
Planarization of metal container structures |
May. 30, 2006 |
| 7049648 |
Semiconductor memory device for reducing damage to interlevel dielectric layer and fabrication method thereof |
May. 23, 2006 |
| 7049646 |
Capacitor for semiconductor integrated devices |
May. 23, 2006 |
| 7042042 |
Integrated circuit capacitors having a dielectric layer between a U-shaped lower electrode and a support layer |
May. 9, 2006 |
| 7038262 |
Integrated circuit devices including an intaglio pattern |
May. 2, 2006 |
| 7037778 |
Method for fabricating capacitor in semiconductor memory device |
May. 2, 2006 |
| 7034350 |
Capacitors including a cavity containing a buried layer |
Apr. 25, 2006 |
| 7029985 |
Method of forming MIS capacitor |
Apr. 18, 2006 |
| 7029970 |
Method for fabricating semiconductor device |
Apr. 18, 2006 |
| 7029983 |
Methods of forming MIM type capacitors by forming upper and lower electrode layers in a recess that exposes a source/drain region of a transistor and MIM capacitors so formed |
Apr. 18, 2006 |
| 7030439 |
DRAM memory cell and method of manufacturing the same |
Apr. 18, 2006 |
| 7022569 |
Lower electrode contact structure and method of forming the same |
Apr. 4, 2006 |
| 7018892 |
Semiconductor capacitor structure and method for manufacturing the same |
Mar. 28, 2006 |
| 7018933 |
Method of forming a metal-insulator-metal capacitor |
Mar. 28, 2006 |
| 7015528 |
Reduced aspect ratio digit line contact process flow used during the formation of a semiconductor device |
Mar. 21, 2006 |
| 7015110 |
Method and structure of manufacturing high capacitance metal on insulator capacitors in copper |
Mar. 21, 2006 |
| 7012294 |
Semiconductor constructions |
Mar. 14, 2006 |
| 7008842 |
Process for fabricating a component, such as a capacitor in an integrated circuit, and integrated-circuit component |
Mar. 7, 2006 |
| 7009240 |
Structures and methods for enhancing capacitors in integrated circuits |
Mar. 7, 2006 |
| 7009234 |
Semiconductor device and method of manufacturing the same |
Mar. 7, 2006 |
| 7002199 |
Semiconductor device using high-dielectric-constant material and method of manufacturing the same |
Feb. 21, 2006 |
| 6999298 |
MIM multilayer capacitor |
Feb. 14, 2006 |
| 6995070 |
Fabricating method of thin film capacitor |
Feb. 7, 2006 |
| 6995071 |
Methods of forming MIM type capacitor structures using low temperature plasma processing |
Feb. 7, 2006 |
| 6995416 |
Memory device for storing electrical charge and method for fabricating the same |
Feb. 7, 2006 |
| 6992346 |
Integrated circuit devices with metal-insulator-metal capacitors |
Jan. 31, 2006 |
| 6991980 |
Methods of manufacturing multi-layer integrated circuit capacitor electrodes |
Jan. 31, 2006 |
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