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Class Information
Number: 257/E21.018
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having vertical extensions (epo)
Description: This subclass is indented under subclass E21.012. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2V.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6313497 |
Semiconductor device and method for manufacturing the same |
Nov. 6, 2001 |
| 6312985 |
Method of fabricating a bottom electrode |
Nov. 6, 2001 |
| 6312988 |
Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions |
Nov. 6, 2001 |
| 6309941 |
Methods of forming capacitors |
Oct. 30, 2001 |
| 6306705 |
Methods of forming capacitors, DRAM arrays, and monolithic integrated circuits |
Oct. 23, 2001 |
| 6307730 |
Capacitor formed by lower electrode having inner and outer uneven surfaces |
Oct. 23, 2001 |
| 6303456 |
Method for making a finger capacitor with tuneable dielectric constant |
Oct. 16, 2001 |
| 6303956 |
Conductive container structures having a dielectric cap |
Oct. 16, 2001 |
| 6294426 |
Method of fabricating a capacitor under bit line structure with increased capacitance without increasing the aspect ratio for a dry etched bit line contact hole |
Sep. 25, 2001 |
| 6288446 |
Semiconductor device with pillar-shaped capacitor storage node |
Sep. 11, 2001 |
| 6287910 |
Method for forming a capacitor using tantalum nitride as a capacitor dielectric |
Sep. 11, 2001 |
| 6268245 |
Method for forming a DRAM cell with a ragged polysilicon crown-shaped capacitor |
Jul. 31, 2001 |
| 6265280 |
Method for manufacturing a cylindrical semiconductor capacitor |
Jul. 24, 2001 |
| 6259127 |
Integrated circuit container having partially rugged surface |
Jul. 10, 2001 |
| 6258729 |
Oxide etching method and structures resulting from same |
Jul. 10, 2001 |
| 6258664 |
Methods of forming silicon-comprising materials having roughened outer surfaces, and methods of forming capacitor constructions |
Jul. 10, 2001 |
| 6255159 |
Method to form hemispherical grained polysilicon |
Jul. 3, 2001 |
| 6249019 |
Container capacitor with increased surface area and method for making same |
Jun. 19, 2001 |
| 6232168 |
Memory circuitry and method of forming memory circuitry |
May. 15, 2001 |
| 6232628 |
Semiconductor device having stacked capacitor structure |
May. 15, 2001 |
| 6225232 |
Semiconductor processing methods, and methods of forming capacitor constructions |
May. 1, 2001 |
| 6221714 |
Method of forming a contact hole in a semiconductor substrate using oxide spacers on the sidewalls of the contact hole |
Apr. 24, 2001 |
| 6222722 |
Storage capacitor having undulated lower electrode for a semiconductor device |
Apr. 24, 2001 |
| 6218296 |
Semiconductor device with pillar-shaped capacitor storage node and method of fabricating the same |
Apr. 17, 2001 |
| 6211033 |
Integrated capacitor bottom electrode for use with conformal dielectric |
Apr. 3, 2001 |
| 6207523 |
Methods of forming capacitors DRAM arrays, and monolithic integrated circuits |
Mar. 27, 2001 |
| 6207986 |
Semiconductor integrated circuit device |
Mar. 27, 2001 |
| 6204143 |
Method of forming high aspect ratio structures for semiconductor devices |
Mar. 20, 2001 |
| 6200905 |
Method to form sidewall polysilicon capacitors |
Mar. 13, 2001 |
| 6197652 |
Fabrication method of a twin-tub capacitor |
Mar. 6, 2001 |
| 6194263 |
Methods for forming capacitor structures including etching pits |
Feb. 27, 2001 |
| 6187629 |
Method of fabricating a DRAM capacitor |
Feb. 13, 2001 |
| 6180485 |
Methods of forming capacitors, DRAM arrays, and monolithic integrated circuits |
Jan. 30, 2001 |
| 6180452 |
Shared length cell for improved capacitance |
Jan. 30, 2001 |
| 6175129 |
Capacitor structures, DRAM cell structures, methods of forming capacitors, methods of forming DRAM cells, and integrated circuits incorporating capacitor structures and DRAM cell structures |
Jan. 16, 2001 |
| 6159791 |
Fabrication method of capacitor |
Dec. 12, 2000 |
| 6146942 |
Method of manufacturing a semiconductor memory device |
Nov. 14, 2000 |
| 6143617 |
Composite capacitor electrode for a DRAM cell |
Nov. 7, 2000 |
| 6133090 |
Method of fabricating cylindrical capacitor |
Oct. 17, 2000 |
| 6121108 |
Method for fabricating a capacitor in a dynamic random access memory |
Sep. 19, 2000 |
| 6121081 |
Method to form hemi-spherical grain (HSG) silicon |
Sep. 19, 2000 |
| 6097052 |
Semiconductor device and a method of manufacturing thereof |
Aug. 1, 2000 |
| RE36786 |
Process to manufacture crown stacked capacitor structures with HSG-rugged polysilicon on all sides of the storage node |
Jul. 18, 2000 |
| 6080633 |
Method for manufacturing capacitor's lower electrode |
Jun. 27, 2000 |
| 6066529 |
Method for enlarging surface area of a plurality of hemi-spherical grains on the surface of a semiconductor chip |
May. 23, 2000 |
| 6051859 |
DRAM having a cup-shaped storage node electrode recessed within an insulating layer |
Apr. 18, 2000 |
| 6037205 |
Method of forming capacitor for semiconductor device using N.sub.2 O gas |
Mar. 14, 2000 |
| 6025624 |
Shared length cell for improved capacitance |
Feb. 15, 2000 |
| 5986300 |
Semiconductor memory device and method of manufacturing the same |
Nov. 16, 1999 |
| 5985732 |
Method of forming integrated stacked capacitors with rounded corners |
Nov. 16, 1999 |
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