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Class Information
Number: 257/E21.018
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having vertical extensions (epo)
Description: This subclass is indented under subclass E21.012. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2V.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6476432 |
Structures and methods for enhancing capacitors in integrated circuits |
Nov. 5, 2002 |
| 6472721 |
Dual damascene interconnect structures that include radio frequency capacitors and inductors |
Oct. 29, 2002 |
| 6472266 |
Method to reduce bit line capacitance in cub drams |
Oct. 29, 2002 |
| 6468858 |
Method of forming a metal insulator metal capacitor structure |
Oct. 22, 2002 |
| 6465301 |
Method for fabricating capacitor of semiconductor device |
Oct. 15, 2002 |
| 6451667 |
Self-aligned double-sided vertical MIMcap |
Sep. 17, 2002 |
| 6445023 |
Mixed metal nitride and boride barrier layers |
Sep. 3, 2002 |
| 6441419 |
Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same |
Aug. 27, 2002 |
| 6436763 |
Process for making embedded DRAM circuits having capacitor under bit-line (CUB) |
Aug. 20, 2002 |
| 6426243 |
Methods of forming dynamic random access memory circuitry |
Jul. 30, 2002 |
| 6426250 |
High density stacked MIM capacitor structure |
Jul. 30, 2002 |
| 6424041 |
Semiconductor device |
Jul. 23, 2002 |
| 6417535 |
Vertical interdigitated metal-insulator-metal capacitor for an integrated circuit |
Jul. 9, 2002 |
| 6413833 |
Method for forming a CVD silicon film |
Jul. 2, 2002 |
| 6410954 |
Multilayered capacitor structure with alternately connected concentric lines for deep sub-micron CMOS |
Jun. 25, 2002 |
| 6410423 |
Semiconductor device and manufacturing method thereof |
Jun. 25, 2002 |
| 6411492 |
Structure and method for fabrication of an improved capacitor |
Jun. 25, 2002 |
| 6406968 |
Method of forming dynamic random access memory |
Jun. 18, 2002 |
| 6407420 |
Integrated circuit device having line width determined by side wall spacer provided in openings formed in insulating film for connection conductors |
Jun. 18, 2002 |
| 6403444 |
Method for forming storage capacitor having undulated lower electrode for a semiconductor device |
Jun. 11, 2002 |
| 6403495 |
Capacitor fabricating method of semiconductor device |
Jun. 11, 2002 |
| 6399439 |
Method for manufacturing semiconductor device |
Jun. 4, 2002 |
| 6391736 |
Method for fabricating a capacitor of a semiconductor device and a capacitor made thereby |
May. 21, 2002 |
| 6391707 |
Method of manufacturing a zero mask high density metal/insulator/metal capacitor |
May. 21, 2002 |
| 6384446 |
Grooved capacitor structure for integrated circuits |
May. 7, 2002 |
| 6383862 |
Method of forming a contact hole in a semiconductor substrate using oxide spacers on the sidewalls of the contact hole |
May. 7, 2002 |
| 6383866 |
Semiconductor device and manufacturing method thereof |
May. 7, 2002 |
| 6383863 |
Approach to integrate salicide gate for embedded DRAM devices |
May. 7, 2002 |
| 6383887 |
Methods of forming capacitors, DRAM arrays, and monolithic integrated circuits |
May. 7, 2002 |
| 6380581 |
DRAM technology compatible non volatile memory cells with capacitors connected to the gates of the transistors |
Apr. 30, 2002 |
| 6376874 |
Method for fabricating a capacitor of a semiconductor memory device |
Apr. 23, 2002 |
| 6372575 |
Method for fabricating capacitor of dram using self-aligned contact etching technology |
Apr. 16, 2002 |
| 6373084 |
Shared length cell for improved capacitance |
Apr. 16, 2002 |
| 6369446 |
Multilayered semiconductor device |
Apr. 9, 2002 |
| 6365517 |
Process for depositing thin films containing titanium and nitrogen |
Apr. 2, 2002 |
| 6362042 |
DRAM having a cup-shaped storage node electrode recessed within an insulating layer |
Mar. 26, 2002 |
| 6358791 |
Method for increasing a very-large-scale-integrated (VLSI) capacitor size on bulk silicon and silicon-on-insulator (SOI) wafers and structure formed thereby |
Mar. 19, 2002 |
| 6358790 |
Method of making a capacitor |
Mar. 19, 2002 |
| 6358789 |
Method for manufacturing a semiconductor device having a capacitor |
Mar. 19, 2002 |
| 6342425 |
Capacitor for semiconductor memory device and fabrication method thereof |
Jan. 29, 2002 |
| 6338999 |
Method for forming metal capacitors with a damascene process |
Jan. 15, 2002 |
| 6339009 |
Method of manufacturing capacitor of semiconductor device |
Jan. 15, 2002 |
| 6333241 |
Method for fabricating capacitor of semiconductor memory device |
Dec. 25, 2001 |
| 6329234 |
Copper process compatible CMOS metal-insulator-metal capacitor structure and its process flow |
Dec. 11, 2001 |
| 6329264 |
Method for forming a ragged polysilcon crown-shaped capacitor for a memory cell |
Dec. 11, 2001 |
| 6326277 |
Methods of forming recessed hemispherical grain silicon capacitor structures |
Dec. 4, 2001 |
| 6319790 |
Process for fabricating semiconductor device with multiple cylindrical capacitor |
Nov. 20, 2001 |
| 6320244 |
Integrated circuit device having dual damascene capacitor |
Nov. 20, 2001 |
| 6316312 |
Capacitor structures, DRAM cell structures, methods of forming capacitors, methods of forming DRAM cells, and integrated circuits incorporating capacitor structures and DRAM cell structures |
Nov. 13, 2001 |
| 6316306 |
Memory cell array in a dynamic random access memory and method for fabricating the same |
Nov. 13, 2001 |
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