| |
 |
|
Class Information
Number: 257/E21.018
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having vertical extensions (epo)
Description: This subclass is indented under subclass E21.012. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2V.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6614642 |
Capacitor over plug structure |
Sep. 2, 2003 |
| 6613642 |
Method for surface roughness enhancement in semiconductor capacitor manufacturing |
Sep. 2, 2003 |
| 6613628 |
Method and structure for reducing leakage current in capacitors |
Sep. 2, 2003 |
| 6611017 |
Semiconductor device provided with capacitor having cavity-provided electrode |
Aug. 26, 2003 |
| 6605510 |
Semiconductor device with both memories and logic circuits and its manufacture |
Aug. 12, 2003 |
| 6599800 |
Methods of forming capacitors, and methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions |
Jul. 29, 2003 |
| 6600190 |
Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions |
Jul. 29, 2003 |
| 6593609 |
Semiconductor memory device |
Jul. 15, 2003 |
| 6593185 |
Method of forming embedded capacitor structure applied to logic integrated circuit |
Jul. 15, 2003 |
| 6586329 |
Semiconductor device and a method of manufacturing thereof |
Jul. 1, 2003 |
| 6583023 |
Method for making semiconductor integrated circuits |
Jun. 24, 2003 |
| 6576510 |
Method of producing a semiconductor memory device using a self-alignment process |
Jun. 10, 2003 |
| 6573552 |
Method to form hemispherical grained polysilicon |
Jun. 3, 2003 |
| 6573553 |
Semiconductor device and method for fabricating the same |
Jun. 3, 2003 |
| 6569729 |
Method of fabricating three dimensional CMOSFET devices for an embedded DRAM application |
May. 27, 2003 |
| 6566222 |
Methods of forming recessed hemispherical grain silicon capacitor structures |
May. 20, 2003 |
| 6566221 |
Capacitor structure and method for fabricating the same |
May. 20, 2003 |
| 6563190 |
Capacitor array preventing crosstalk between adjacent capacitors in semiconductor device |
May. 13, 2003 |
| 6563162 |
Semiconductor memory device for reducing parasitic bit line capacitance and method of fabricating the same |
May. 13, 2003 |
| 6563161 |
Memory-storage node and the method of fabricating the same |
May. 13, 2003 |
| 6559493 |
High density stacked mim capacitor structure |
May. 6, 2003 |
| 6555861 |
Semiconductor integrated circuit device and process for manufacturing the same |
Apr. 29, 2003 |
| 6555432 |
Integrated capacitor bottom electrode for use with conformal dielectric |
Apr. 29, 2003 |
| 6552383 |
Integrated decoupling capacitors |
Apr. 22, 2003 |
| 6551893 |
Atomic layer deposition of capacitor dielectric |
Apr. 22, 2003 |
| 6544842 |
Method of forming hemisphere grained silicon on a template on a semiconductor work object |
Apr. 8, 2003 |
| 6541335 |
Semiconductor device and method for manufacturing the same |
Apr. 1, 2003 |
| 6534361 |
Method of manufacturing a semiconductor device including metal contact and capacitor |
Mar. 18, 2003 |
| 6531728 |
Oxide etching method and structures resulting from same |
Mar. 11, 2003 |
| 6525364 |
Capacitor for semiconductor memory device and method of manufacturing the same |
Feb. 25, 2003 |
| 6525363 |
Integrated circuit configuration with at least one capacitor and method for producing the same |
Feb. 25, 2003 |
| 6524927 |
Semiconductor device and method of fabricating the same |
Feb. 25, 2003 |
| 6524867 |
Method for forming platinum-rhodium stack as an oxygen barrier |
Feb. 25, 2003 |
| 6521507 |
Selective deposition of undoped silicon film seeded in chlorine and hydride gas for a stacked capacitor |
Feb. 18, 2003 |
| 6518120 |
Capacitor and method of manufacturing the same |
Feb. 11, 2003 |
| 6514854 |
Method of producing semiconductor integrated circuit device having a plug |
Feb. 4, 2003 |
| 6511892 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness |
Jan. 28, 2003 |
| 6511896 |
Method of etching a substantially amorphous TA2O5 comprising layer |
Jan. 28, 2003 |
| 6507065 |
Doped silicon structure with impression image on opposing roughened surfaces |
Jan. 14, 2003 |
| 6507062 |
Capacitor for semiconductor memory device |
Jan. 14, 2003 |
| 6504205 |
Metal capacitors with damascene structures |
Jan. 7, 2003 |
| 6501120 |
Capacitor under bitline (CUB) memory cell structure employing air gap void isolation |
Dec. 31, 2002 |
| 6498063 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth |
Dec. 24, 2002 |
| 6498386 |
Cylindrical semiconductor capacitor |
Dec. 24, 2002 |
| 6495877 |
Metal capacitors with damascene structures and method for forming the same |
Dec. 17, 2002 |
| 6492241 |
Integrated capacitors fabricated with conductive metal oxides |
Dec. 10, 2002 |
| 6489197 |
Semiconductor memory device and method of fabricating the same |
Dec. 3, 2002 |
| 6486021 |
Method for manufacturing a semiconductor device having incorporated therein a high K capacitor dielectric |
Nov. 26, 2002 |
| 6483150 |
Semiconductor device with both memories and logic circuits and its manufacture |
Nov. 19, 2002 |
| 6483194 |
Semiconductor device having capacitor and method thereof |
Nov. 19, 2002 |
|
|
|
