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Class Information
Number: 257/E21.018
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having vertical extensions (epo)
Description: This subclass is indented under subclass E21.012. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2V.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6759705 |
Platinum-rhodium stack as an oxygen barrier in an integrated circuit capacitor |
Jul. 6, 2004 |
| 6756627 |
Container capacitor |
Jun. 29, 2004 |
| 6756262 |
Semiconductor integrated circuit device having spaced-apart electrodes and the method thereof |
Jun. 29, 2004 |
| 6753618 |
MIM capacitor with metal nitride electrode materials and method of formation |
Jun. 22, 2004 |
| 6746930 |
Oxygen barrier for cell container process |
Jun. 8, 2004 |
| 6740924 |
Semiconductor integrated circuit device and the method of producing the same |
May. 25, 2004 |
| 6737728 |
On-chip decoupling capacitor and method of making same |
May. 18, 2004 |
| 6716716 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth |
Apr. 6, 2004 |
| 6717202 |
HSG semiconductor capacitor with migration inhibition layer |
Apr. 6, 2004 |
| 6713805 |
Semiconductor memory device with increased capacitance |
Mar. 30, 2004 |
| 6713872 |
Multilayered semiconductor device |
Mar. 30, 2004 |
| 6709915 |
Methods of fabricating integrated circuit memory devices |
Mar. 23, 2004 |
| 6710390 |
Capacitors and DRAM arrays |
Mar. 23, 2004 |
| 6707706 |
Semiconductor memory device and method for manufacturing the same |
Mar. 16, 2004 |
| 6706607 |
Method for fabricating capacitor in semiconductor device |
Mar. 16, 2004 |
| 6707091 |
Semiconductor device having capacitor |
Mar. 16, 2004 |
| 6703657 |
DRAM cell having electrode with protection layer |
Mar. 9, 2004 |
| 6699766 |
Method of fabricating an integral capacitor and gate transistor having nitride and oxide polish stop layers using chemical mechanical polishing elimination |
Mar. 2, 2004 |
| 6696718 |
Capacitor having an electrode formed from a transition metal or a conductive metal-oxide, and method of forming same |
Feb. 24, 2004 |
| 6696716 |
Structures and methods for enhancing capacitors in integrated ciruits |
Feb. 24, 2004 |
| 6696715 |
Method and structure for reducing leakage current in capacitors |
Feb. 24, 2004 |
| 6696721 |
Semiconductor device having a three-dimensional capacitor such as a stack-type capacitor |
Feb. 24, 2004 |
| 6693792 |
Semiconductor integrated circuits and fabricating method thereof |
Feb. 17, 2004 |
| 6690052 |
Semiconductor device having a capacitor with a multi-layer dielectric |
Feb. 10, 2004 |
| 6689657 |
Method of forming a capacitor |
Feb. 10, 2004 |
| 6688584 |
Compound structure for reduced contact resistance |
Feb. 10, 2004 |
| 6689623 |
Method for forming a capacitor |
Feb. 10, 2004 |
| 6677217 |
Methods for manufacturing integrated circuit metal-insulator-metal capacitors including hemispherical grain lumps |
Jan. 13, 2004 |
| 6667505 |
Semiconductor device having a plurality of capacitors aligned at regular intervals |
Dec. 23, 2003 |
| 6667502 |
Structurally-stabilized capacitors and method of making of same |
Dec. 23, 2003 |
| 6667208 |
Method for manufacturing a capacitor lower electrode over a transistor and a bit line corresponding to a cell area of a semiconductor device |
Dec. 23, 2003 |
| 6664159 |
Mixed metal nitride and boride barrier layers |
Dec. 16, 2003 |
| 6661048 |
Semiconductor memory device having self-aligned wiring conductor |
Dec. 9, 2003 |
| 6653676 |
Integrated circuit capacitor |
Nov. 25, 2003 |
| 6653241 |
Methods of forming protective segments of material, and etch stops |
Nov. 25, 2003 |
| 6649959 |
Method for increasing a very-large-scale-integrated (VLSI) capacitor size on bulk silicon and silicon-on-insulator (SOI) wafers and structure formed thereby |
Nov. 18, 2003 |
| 6649483 |
Method for fabricating a capacitor configuration |
Nov. 18, 2003 |
| 6649466 |
Method of forming DRAM circuitry |
Nov. 18, 2003 |
| 6649536 |
Method for fabricating capacitor of semiconductor device |
Nov. 18, 2003 |
| 6635561 |
Semiconductor device, and method of manufacturing the semiconductor device |
Oct. 21, 2003 |
| 6632744 |
Manufacturing method of semiconductor integrated circuit device |
Oct. 14, 2003 |
| 6633062 |
Semiconductor device incorporated therein high K capacitor dielectric and method for the manufacture thereof |
Oct. 14, 2003 |
| 6624525 |
Contact plug in capacitor device |
Sep. 23, 2003 |
| 6624040 |
Self-integrated vertical MIM capacitor in the dual damascene process |
Sep. 23, 2003 |
| 6620734 |
Methods of forming protective segments of material, and etch stops |
Sep. 16, 2003 |
| 6620701 |
Method of fabricating a metal-insulator-metal (MIM) capacitor |
Sep. 16, 2003 |
| 6620685 |
Method for fabricating of semiconductor memory device having a metal plug or a landing pad |
Sep. 16, 2003 |
| 6617250 |
Methods of depositing a layer comprising tungsten and methods of forming a transistor gate line |
Sep. 9, 2003 |
| 6617635 |
Integrated circuit devices having contact and container structures |
Sep. 9, 2003 |
| 6613672 |
Apparatus and process of fabricating a trench capacitor |
Sep. 2, 2003 |
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