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Class Information
Number: 257/E21.017
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having horizontal extensions (epo) > Made by patterning layers, e.g., etching conductive layers (epo)
Description: This subclass is indented under subclass E21.015. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2H6.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8642400 Method of manufacturing semiconductor device including capacitor element Feb. 4, 2014
8563367 Method of fabricating array substrate for in-plane switching mode liquid crystal display device Oct. 22, 2013
8492278 Method of forming a plurality of spaced features Jul. 23, 2013
8481426 Method of forming pattern structure and method of fabricating semiconductor device using the same Jul. 9, 2013
8482097 Semiconductor device Jul. 9, 2013
8445388 Methods of forming semiconductor devices and devices formed using such methods May. 21, 2013
8314034 Feature size reduction Nov. 20, 2012
8298961 Patterns of semiconductor device and method of forming the same Oct. 30, 2012
8288756 Hetero-structured, inverted-T field effect transistor Oct. 16, 2012
8283205 Semiconductor device and method of forming stepped interconnect layer for stacked semiconductor die Oct. 9, 2012
8283235 Method of manufacturing semiconductor device Oct. 9, 2012
8247904 Interconnection between sublithographic-pitched structures and lithographic-pitched structures Aug. 21, 2012
8236604 Fine line metallization of photovoltaic devices by partial lift-off of optical coatings Aug. 7, 2012
8193099 Protecting exposed metal gate structures from etching processes in integrated circuit manufacturing Jun. 5, 2012
8158465 Vertical coffee-stain method for forming self-organized line structures Apr. 17, 2012
8138089 Method and apparatus for measurement and control of photomask to substrate alignment Mar. 20, 2012
8105872 Semiconductor device and method of forming prefabricated EMI shielding frame with cavities containing penetrable material over semiconductor die Jan. 31, 2012
8097490 Semiconductor device and method of forming stepped interconnect layer for stacked semiconductor die Jan. 17, 2012
8076778 Method for preventing Al-Cu bottom damage using TiN liner Dec. 13, 2011
8026148 Methods of utilizing silicon dioxide-containing masking structures Sep. 27, 2011
7994053 Patterning method of metal oxide thin film using nanoimprinting, and manufacturing method of light emitting diode Aug. 9, 2011
7994060 Dual exposure track only pitch split process Aug. 9, 2011
7985693 Method of producing phase change memory device Jul. 26, 2011
7981756 Common plate capacitor array connections, and processes of making same Jul. 19, 2011
7943440 Fabrication method of thin film device May. 17, 2011
7939390 Gap capacitors for monitoring stress in solder balls in flip chip technology May. 10, 2011
7927977 Method of making damascene diodes using sacrificial material Apr. 19, 2011
7867916 Horizontal coffee-stain method using control structure to pattern self-organized line structures Jan. 11, 2011
7858451 Electronic device, semiconductor device and manufacturing method thereof Dec. 28, 2010
7855458 Electronic component Dec. 21, 2010
7847405 Semiconductor device and manufacturing method of semiconductor device Dec. 7, 2010
7795147 Semiconductor storage device and method for fabricating the same Sep. 14, 2010
7696517 NMOS transistors that mitigate fermi-level pinning by employing a hafnium-silicon gate electrode and high-k gate dieletric Apr. 13, 2010
7662724 Method of manufacturing a ferroelectric capacitor with a hydrogen barrier layer Feb. 16, 2010
7629222 Method of fabricating a semiconductor device Dec. 8, 2009
7592260 Method of manufacturing a semiconductor device Sep. 22, 2009
7579280 Method of patterning a film Aug. 25, 2009
7569452 Screen-printed filter capacitors for filtered feedthroughs Aug. 4, 2009
7563721 Method for fabricating semiconductor device capable of decreasing critical dimension in peripheral region Jul. 21, 2009
7560380 Chemical dissolution of barrier and adhesion layers Jul. 14, 2009
7557002 Methods of forming transistor devices Jul. 7, 2009
7544612 Method and structure for reducing the effect of vertical steps in patterned layers in semiconductor structures Jun. 9, 2009
7524709 Manufacturing method for a display device Apr. 28, 2009
7521802 Semiconductor device having a refractory metal containing film and method for manufacturing the same Apr. 21, 2009
7407890 Patterning sub-lithographic features with variable widths Aug. 5, 2008
7338887 Plasma control method and plasma control apparatus Mar. 4, 2008
7332425 Simultaneous deposition and etch process for barrier layer formation in microelectronic device interconnects Feb. 19, 2008
7326647 Dry etching process to form a conductive layer within an opening without use of a mask during the formation of a semiconductor device Feb. 5, 2008
7320924 Method of producing a chip-type solid electrolytic capacitor Jan. 22, 2008
7294566 Method for forming wiring pattern, method for manufacturing device, device, electro-optic apparatus, and electronic equipment Nov. 13, 2007

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