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Class Information
Number: 257/E21.016
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having horizontal extensions (epo) > Made by depositing layers, e.g., alternatingly conductive and insulating layers (epo)
Description: This subclass is indented under subclass E21.015. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2H2.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7439151 |
Method and structure for integrating MIM capacitors within dual damascene processing techniques |
Oct. 21, 2008 |
| 7414296 |
Method of manufacturing a metal-insulator-metal capacitor |
Aug. 19, 2008 |
| 7384808 |
Fabrication method of high-brightness light emitting diode having reflective layer |
Jun. 10, 2008 |
| 7385240 |
Storage cell capacitor compatible with high dielectric constant materials |
Jun. 10, 2008 |
| 7375002 |
MIM capacitor in a semiconductor device and method therefor |
May. 20, 2008 |
| 7375000 |
Discrete on-chip SOI resistors |
May. 20, 2008 |
| 7371598 |
Wiring substrate and method of manufacturing thereof, and thin film transistor and method of manufacturing thereof |
May. 13, 2008 |
| 7303936 |
Method for forming anti-stiction bumps on a micro-electro mechanical structure |
Dec. 4, 2007 |
| 7164203 |
Methods and procedures for engineering of composite conductive by atomic layer deposition |
Jan. 16, 2007 |
| 6977805 |
Capacitor element, semiconductor integrated circuit and method of manufacturing those |
Dec. 20, 2005 |
| 6936879 |
Increased capacitance trench capacitor |
Aug. 30, 2005 |
| 6927445 |
Method to form a corrugated structure for enhanced capacitance |
Aug. 9, 2005 |
| 6900496 |
Capacitor constructions |
May. 31, 2005 |
| 6893963 |
Method for forming a titanium nitride layer |
May. 17, 2005 |
| 6867094 |
Method of fabricating a stacked capacitor for a semiconductor device |
Mar. 15, 2005 |
| 6762450 |
Method of forming a capacitor and a capacitor construction |
Jul. 13, 2004 |
| 6737699 |
Enhanced on-chip decoupling capacitors and method of making same |
May. 18, 2004 |
| 6660611 |
Method to form a corrugated structure for enhanced capacitance with plurality of boro-phospho silicate glass including germanium |
Dec. 9, 2003 |
| 6627938 |
Capacitor constructions |
Sep. 30, 2003 |
| 6624018 |
Method of fabricating a DRAM device featuring alternate fin type capacitor structures |
Sep. 23, 2003 |
| 6620675 |
Increased capacitance trench capacitor |
Sep. 16, 2003 |
| 6617208 |
High capacitance damascene capacitors |
Sep. 9, 2003 |
| 6586312 |
Method for fabricating a DRAM capacitor and device made |
Jul. 1, 2003 |
| 6583461 |
Semiconductor device and method of manufacturing the same |
Jun. 24, 2003 |
| 6555433 |
Method of manufacture of a crown or stack capacitor with a monolithic fin structure made with a different oxide etching rate in hydrogen fluoride vapor |
Apr. 29, 2003 |
| 6548853 |
Cylindrical capacitors having a stepped sidewall and methods for fabricating the same |
Apr. 15, 2003 |
| 6548348 |
Method of forming a storage node contact hole in a porous insulator layer |
Apr. 15, 2003 |
| 6528366 |
Fabrication methods of vertical metal-insulator-metal (MIM) capacitor for advanced embedded DRAM applications |
Mar. 4, 2003 |
| 6528327 |
Method for fabricating semiconductor memory device having a capacitor |
Mar. 4, 2003 |
| 6518125 |
Method for forming flash memory with high coupling ratio |
Feb. 11, 2003 |
| 6476437 |
Crown or stack capacitor with a monolithic fin structure |
Nov. 5, 2002 |
| 6437385 |
Integrated circuit capacitor |
Aug. 20, 2002 |
| 6429087 |
Methods of forming capacitors |
Aug. 6, 2002 |
| 6429475 |
Cell capacitors, memory cells, memory arrays, and method of fabrication |
Aug. 6, 2002 |
| 6420270 |
Method of producing an etch pattern |
Jul. 16, 2002 |
| 6403440 |
Method for fabricating a stacked capacitor in a semiconductor configuration, and stacked capacitor fabricated by this method |
Jun. 11, 2002 |
| 6403444 |
Method for forming storage capacitor having undulated lower electrode for a semiconductor device |
Jun. 11, 2002 |
| 6399980 |
Fabrication of a T-shaped capacitor |
Jun. 4, 2002 |
| 6399437 |
Enhanced side-wall stacked capacitor |
Jun. 4, 2002 |
| 6395602 |
Method of forming a capacitor |
May. 28, 2002 |
| 6388284 |
Capacitor structures |
May. 14, 2002 |
| 6376303 |
Method of manufacturing a capacitor having oxide layers with different impurities and method of fabricating a semiconductor device comprising the same |
Apr. 23, 2002 |
| 6376326 |
Method of manufacturing DRAM capacitor |
Apr. 23, 2002 |
| 6368908 |
Method of fabricating dynamic random access memory capacitor |
Apr. 9, 2002 |
| 6359302 |
DRAM cells and integrated circuitry, and capacitor structures |
Mar. 19, 2002 |
| 6346455 |
Method to form a corrugated structure for enhanced capacitance |
Feb. 12, 2002 |
| 6344392 |
Methods of manufacture of crown or stack capacitor with a monolithic fin structure made with a different oxide etching rate in hydrogen fluoride vapor |
Feb. 5, 2002 |
| 6329684 |
Capacitor structures, DRAM cells and integrated circuitry |
Dec. 11, 2001 |
| 6323100 |
Method for manufacturing a semiconductor device |
Nov. 27, 2001 |
| 6319770 |
Method for fabricating a bottom electrode of a dynamic random access memory capacitor |
Nov. 20, 2001 |
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