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Class Information
Number: 257/E21.015
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > Having horizontal extensions (epo)
Description: This subclass is indented under subclass E21.012. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2H.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7071070 |
Method of fabricating capacitor |
Jul. 4, 2006 |
| 7049246 |
Method for selective fabrication of high capacitance density areas in a low dielectric constant material |
May. 23, 2006 |
| 7001780 |
Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method |
Feb. 21, 2006 |
| 6992344 |
Damascene integration scheme for developing metal-insulator-metal capacitors |
Jan. 31, 2006 |
| 6975500 |
Capacitor having improved electrodes |
Dec. 13, 2005 |
| 6927100 |
Method of fabricating semiconductor device having blocking layer and fuse |
Aug. 9, 2005 |
| 6838338 |
Integrated capacitor bottom electrode for use with conformal dielectric |
Jan. 4, 2005 |
| 6819542 |
Interdigitated capacitor structure for an integrated circuit |
Nov. 16, 2004 |
| 6794262 |
MIM capacitor structures and fabrication methods in dual-damascene structures |
Sep. 21, 2004 |
| 6784048 |
Method of fabricating a DRAM cell having a thin dielectric access transistor and a thick dielectric storage |
Aug. 31, 2004 |
| 6744676 |
DRAM cell having a capacitor structure fabricated partially in a cavity and method for operating same |
Jun. 1, 2004 |
| 6704219 |
FeRAM memory and method for manufacturing it |
Mar. 9, 2004 |
| 6654295 |
Reduced topography DRAM cell fabricated using a modified logic process and method for operating same |
Nov. 25, 2003 |
| 6642098 |
DRAM cell having a capacitor structure fabricated partially in a cavity and method for operating same |
Nov. 4, 2003 |
| 6573548 |
DRAM cell having a capacitor structure fabricated partially in a cavity and method for operating same |
Jun. 3, 2003 |
| 6563191 |
Interdigitated capacitor with dielectric overlay |
May. 13, 2003 |
| 6555432 |
Integrated capacitor bottom electrode for use with conformal dielectric |
Apr. 29, 2003 |
| 6525363 |
Integrated circuit configuration with at least one capacitor and method for producing the same |
Feb. 25, 2003 |
| 6507065 |
Doped silicon structure with impression image on opposing roughened surfaces |
Jan. 14, 2003 |
| 6468855 |
Reduced topography DRAM cell fabricated using a modified logic process and method for operating same |
Oct. 22, 2002 |
| 6461981 |
Method of forming a conformal oxide film |
Oct. 8, 2002 |
| 6403444 |
Method for forming storage capacitor having undulated lower electrode for a semiconductor device |
Jun. 11, 2002 |
| 6380581 |
DRAM technology compatible non volatile memory cells with capacitors connected to the gates of the transistors |
Apr. 30, 2002 |
| 6333545 |
Semiconductor device having blocking layer and fuses |
Dec. 25, 2001 |
| 6236080 |
Method of manufacturing a capacitor for high density DRAMs |
May. 22, 2001 |
| 6222722 |
Storage capacitor having undulated lower electrode for a semiconductor device |
Apr. 24, 2001 |
| 6211033 |
Integrated capacitor bottom electrode for use with conformal dielectric |
Apr. 3, 2001 |
| 6211036 |
Semiconductor device having an improved capacitor structure, and a method of manufacturing the same |
Apr. 3, 2001 |
| 6146942 |
Method of manufacturing a semiconductor memory device |
Nov. 14, 2000 |
| 6133085 |
Method for making a DRAM capacitor using a rotated photolithography mask |
Oct. 17, 2000 |
| 6121108 |
Method for fabricating a capacitor in a dynamic random access memory |
Sep. 19, 2000 |
| 6080633 |
Method for manufacturing capacitor's lower electrode |
Jun. 27, 2000 |
| 6022806 |
Method of forming a film in recess by vapor phase growth |
Feb. 8, 2000 |
| 5986300 |
Semiconductor memory device and method of manufacturing the same |
Nov. 16, 1999 |
| 5900660 |
Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory calls |
May. 4, 1999 |
| 5849618 |
Method for fabricating capacitor of semiconductor device |
Dec. 15, 1998 |
| 5824593 |
Method for making a capacitor on a semiconductor device |
Oct. 20, 1998 |
| 5756388 |
Method for fabricating a rake-shaped capacitor |
May. 26, 1998 |
| 5726085 |
Method of fabricating a dynamic random access memory (DRAM) cell capacitor using hemispherical grain (HSG) polysilicon and selective polysilicon etchback |
Mar. 10, 1998 |
| 5521408 |
Hole capacitor for DRAM cell |
May. 28, 1996 |
| 5478769 |
Process for fabricating a stashed capacitor in a semiconductor device |
Dec. 26, 1995 |
| 5455204 |
Thin capacitor dielectric by rapid thermal processing |
Oct. 3, 1995 |
| 5422295 |
Method for forming a semiconductor memory device having a vertical multi-layered storage electrode |
Jun. 6, 1995 |
| 5387531 |
Hole capacitor for dram cell and a fabrication method thereof |
Feb. 7, 1995 |
| 5283204 |
Method of forming passivation oxidation for improving cell leakage and cell area |
Feb. 1, 1994 |
| 5049517 |
Method for formation of a stacked capacitor |
Sep. 17, 1991 |
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