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Class Information
Number: 257/E21.013
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Formation of electrode (epo) > With increased surface area, e.g., by roughening, texturing (epo) > With rough surface, e.g., using hemispherical grains (epo)
Description: This subclass is indented under subclass E21.012. This subclass is substantially the same in scope as ECLA classification H01L21/02B3C2B.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7432152 |
Methods of forming HSG layers and devices |
Oct. 7, 2008 |
| 7427545 |
Trench memory cells with buried isolation collars, and methods of fabricating same |
Sep. 23, 2008 |
| 7364968 |
Capacitor in semiconductor device and manufacturing method |
Apr. 29, 2008 |
| 7314795 |
Methods of forming electronic devices including electrodes with insulating spacers thereon |
Jan. 1, 2008 |
| 7271050 |
Silicon nanocrystal capacitor and process for forming same |
Sep. 18, 2007 |
| 7271051 |
Methods of forming a plurality of capacitor devices |
Sep. 18, 2007 |
| 7256147 |
Porous body and manufacturing method therefor |
Aug. 14, 2007 |
| 7247177 |
Production method for electric double-layer capacitor |
Jul. 24, 2007 |
| 7052957 |
Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules |
May. 30, 2006 |
| 7053432 |
Enhanced surface area capacitor fabrication methods |
May. 30, 2006 |
| 7052956 |
Method for forming capacitor of semiconductor device |
May. 30, 2006 |
| 7041570 |
Method of forming a capacitor |
May. 9, 2006 |
| 7037829 |
Compound structure for reduced contact resistance |
May. 2, 2006 |
| 7038318 |
Compound structure for reduced contact resistance |
May. 2, 2006 |
| 7034353 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity |
Apr. 25, 2006 |
| 7029985 |
Method of forming MIS capacitor |
Apr. 18, 2006 |
| 7026222 |
Method of forming a capacitor |
Apr. 11, 2006 |
| 7022570 |
Methods of forming hemispherical grained silicon on a template on a semiconductor work object |
Apr. 4, 2006 |
| 7019351 |
Transistor devices, and methods of forming transistor devices and circuit devices |
Mar. 28, 2006 |
| 7015529 |
Localized masking for semiconductor structure development |
Mar. 21, 2006 |
| 7015528 |
Reduced aspect ratio digit line contact process flow used during the formation of a semiconductor device |
Mar. 21, 2006 |
| 7012294 |
Semiconductor constructions |
Mar. 14, 2006 |
| 6995059 |
Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions |
Feb. 7, 2006 |
| 6987073 |
Low selectivity deposition methods |
Jan. 17, 2006 |
| 6977805 |
Capacitor element, semiconductor integrated circuit and method of manufacturing those |
Dec. 20, 2005 |
| 6974993 |
Double-sided capacitor structure for a semiconductor device and a method for forming the structure |
Dec. 13, 2005 |
| 6967154 |
Enhanced atomic layer deposition |
Nov. 22, 2005 |
| 6964901 |
Methods of forming rugged electrically conductive surfaces and layers |
Nov. 15, 2005 |
| 6964900 |
Capacitor in semiconductor device having dual dielectric film structure and method for fabricating the same |
Nov. 15, 2005 |
| 6960513 |
Capacitor having an electrode formed from a transition metal or a conductive metal-oxide, and method of forming same |
Nov. 1, 2005 |
| 6953739 |
Method for manufacturing a semiconductor device having hemispherical grains at very low atmospheric pressure using first, second, and third vacuum pumps |
Oct. 11, 2005 |
| 6949427 |
Methods of forming a capacitor structure |
Sep. 27, 2005 |
| 6946356 |
Capacitor and method for fabricating the same |
Sep. 20, 2005 |
| 6943089 |
Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
Sep. 13, 2005 |
| 6943079 |
Semiconductor devices and methods for manufacturing the same |
Sep. 13, 2005 |
| 6939762 |
Semiconductor devices and methods for manufacturing the same |
Sep. 6, 2005 |
| 6936879 |
Increased capacitance trench capacitor |
Aug. 30, 2005 |
| 6933590 |
Semiconductor device comprising plurality of semiconductor areas having the same top surface and different film thicknesses and manufacturing method for the same |
Aug. 23, 2005 |
| 6933041 |
Method for producing high surface area foil electrodes |
Aug. 23, 2005 |
| 6930015 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness |
Aug. 16, 2005 |
| 6927170 |
Methods for making semiconductor device structures with capacitor containers and contact apertures having increased aspect ratios |
Aug. 9, 2005 |
| 6927444 |
Semiconductor memory device having capacitor and method of forming the same |
Aug. 9, 2005 |
| 6924969 |
Silicon nanocrystal capacitor and process for forming same |
Aug. 2, 2005 |
| 6924523 |
Semiconductor memory device and method for manufacturing the device |
Aug. 2, 2005 |
| 6919257 |
Method of forming a capacitor |
Jul. 19, 2005 |
| 6917112 |
Conductive semiconductor structures containing metal oxide regions |
Jul. 12, 2005 |
| 6916380 |
System for depositing a layered film |
Jul. 12, 2005 |
| 6914769 |
High power capacitors from thin layers of metal powder or metal sponge particles |
Jul. 5, 2005 |
| 6911371 |
Capacitor forming methods with barrier layers to threshold voltage shift inducing material |
Jun. 28, 2005 |
| 6911373 |
Ultra-high capacitance device based on nanostructures |
Jun. 28, 2005 |
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