| |
 |
|
Class Information
Number: 257/E21.009
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo) > Manufacture or treatment of semiconductor device (epo) > Manufacture of two-terminal component for integrated circuit (epo) > Of capacitor (epo) > Dielectric having perovskite structure (epo)
Description: This subclass is indented under subclass E21.008. This subclass is substantially the same in scope as ECLA classification H01L21/02B3B.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618859 |
Thin film capacitor and fabrication method thereof |
Nov. 17, 2009 |
| 7611958 |
Method of making a semiconductor element |
Nov. 3, 2009 |
| 7601548 |
Methods of fabricating ferroelectric capacitors having oxidation barrier conductive layers and lower electrodes disposed in trenches defined by supporting insulating layers |
Oct. 13, 2009 |
| 7595250 |
Semiconductor device and method of manufacturing the same |
Sep. 29, 2009 |
| 7592626 |
Capacitor and method of manufacturing same |
Sep. 22, 2009 |
| 7592272 |
Manufacturing method of semiconductor integrated circuit |
Sep. 22, 2009 |
| 7582574 |
Diethylsilane as a silicon source in the deposition of metal silicate films |
Sep. 1, 2009 |
| 7560392 |
Electrical components for microelectronic devices and methods of forming the same |
Jul. 14, 2009 |
| 7550344 |
Semiconductor device and method for fabricating the same |
Jun. 23, 2009 |
| 7527995 |
Method of making prestructure for MEMS systems |
May. 5, 2009 |
| 7514734 |
Hardmask for forming ferroelectric capacitors in a semiconductor device and methods for fabricating the same |
Apr. 7, 2009 |
| 7504275 |
Layout design and fabrication of SDA micro motor for low driving voltage and high lifetime application |
Mar. 17, 2009 |
| 7476602 |
N.sub.2 based plasma treatment for enhanced sidewall smoothing and pore sealing porous low-k dielectric films |
Jan. 13, 2009 |
| 7473598 |
Method for forming stack capacitor |
Jan. 6, 2009 |
| 7452770 |
Reduced cell-to-cell shorting for memory arrays |
Nov. 18, 2008 |
| 7446361 |
Capacitor and semiconductor device having a ferroelectric material |
Nov. 4, 2008 |
| 7436016 |
MIM capacitor with a cap layer over the conductive plates |
Oct. 14, 2008 |
| 7435678 |
Method of depositing noble metal electrode using oxidation-reduction reaction |
Oct. 14, 2008 |
| 7417276 |
Thin film capacitor and fabrication method thereof |
Aug. 26, 2008 |
| 7408232 |
Semiconductor device and method for fabricating the same |
Aug. 5, 2008 |
| 7390756 |
Atomic layer deposited zirconium silicon oxide films |
Jun. 24, 2008 |
| 7390678 |
Method for fabricating semiconductor device |
Jun. 24, 2008 |
| 7371633 |
Dielectric layer for semiconductor device and method of manufacturing the same |
May. 13, 2008 |
| 7361549 |
Method for fabricating memory cells for a memory device |
Apr. 22, 2008 |
| 7344898 |
Method for manufacturing semiconductor device |
Mar. 18, 2008 |
| 7332391 |
Method for forming storage node contacts in semiconductor device |
Feb. 19, 2008 |
| 7329548 |
Integration processes for fabricating a conductive metal oxide gate ferroelectric memory transistor |
Feb. 12, 2008 |
| 7326981 |
Methods and apparatuses for producing a polymer memory device |
Feb. 5, 2008 |
| 7291530 |
Semiconductor storage device and method of manufacturing the same |
Nov. 6, 2007 |
| 7256088 |
Semiconductor device and manufacturing method thereof |
Aug. 14, 2007 |
| 7253102 |
Methods for forming and integrated circuit structures containing enhanced-surface-area conductive layers |
Aug. 7, 2007 |
| 7252773 |
Clean for high density capacitors |
Aug. 7, 2007 |
| 7241691 |
Conducting metal oxide with additive as p-MOS device electrode |
Jul. 10, 2007 |
| 7223614 |
Method for manufacturing semiconductor device, and semiconductor device |
May. 29, 2007 |
| 7205247 |
Atomic layer deposition of hafnium-based high-k dielectric |
Apr. 17, 2007 |
| 7195928 |
Method of manufacturing ferroelectric substance thin film and ferroelectric memory using the ferroelectric substance thin film |
Mar. 27, 2007 |
| 7179705 |
Ferroelectric capacitor and its manufacturing method, and ferroelectric memory device |
Feb. 20, 2007 |
| 7176100 |
Capacitor and its manufacturing method, and semiconductor device |
Feb. 13, 2007 |
| 7167387 |
Variable resistance element, method of manufacturing the element, memory containing the element, and method of driving the memory |
Jan. 23, 2007 |
| 7160772 |
Structure and method for integrating MIM capacitor in BEOL wiring levels |
Jan. 9, 2007 |
| 7095067 |
Oxidation-resistant conducting perovskites |
Aug. 22, 2006 |
| 7074624 |
Ferroelectric film, method of manufacturing ferroelectric film, ferroelectric capacitor, method of manufacturing ferroelectric capacitor, and ferroelectric memory |
Jul. 11, 2006 |
| 7075134 |
Ferroelectric and high dielectric constant integrated circuit capacitors with three-dimensional orientation for high-density memories, and method of making the same |
Jul. 11, 2006 |
| 7071007 |
Method of forming a low voltage drive ferroelectric capacitor |
Jul. 4, 2006 |
| 7071053 |
Method of forming capacitor with ruthenium top and bottom electrodes by MOCVD |
Jul. 4, 2006 |
| 7071508 |
Capacitor constructions, semiconductor constructions, and methods of forming electrical contacts and semiconductor constructions |
Jul. 4, 2006 |
| 7067458 |
Multi-layered unit including electrode and dielectric layer |
Jun. 27, 2006 |
| 7064365 |
Ferroelectric capacitors including a seed conductive film |
Jun. 20, 2006 |
| 7060193 |
Method to form both high and low-k materials over the same dielectric region, and their application in mixed mode circuits |
Jun. 13, 2006 |
| 7060552 |
Memory device with hydrogen-blocked ferroelectric capacitor |
Jun. 13, 2006 |
|
|
|
