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Class Information
Number: 257/E21.001
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Processes or apparatus adapted for manufacture or treatment of semiconductor or solid-state devices or of parts thereof (epo)
Description: This main group provides for processes or apparatus that are employed in the manufacture or treatment of semiconductor or solid-state devices or of parts thereof. This subclass is substantially the same in scope as ECLA classification H01L21/00.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7189661 |
Method of forming silicon oxynitride layer in semiconductor device and apparatus of forming the same |
Mar. 13, 2007 |
| 7176141 |
Plasma treatment to improve barrier layer performance over porous low-K insulating dielectrics |
Feb. 13, 2007 |
| 7163849 |
Fabrication method of semiconductor integrated circuit device |
Jan. 16, 2007 |
| 7160809 |
Process and device for the deposition of an at least partially crystalline silicium layer on a substrate |
Jan. 9, 2007 |
| 7160750 |
Method of producing a semiconductor sensor component |
Jan. 9, 2007 |
| 7151060 |
Device and method for thermally treating semiconductor wafers |
Dec. 19, 2006 |
| 7148134 |
Integrated circuitry and a semiconductor processing method of forming a series of conductive lines |
Dec. 12, 2006 |
| 7141487 |
Method for ultra thinning bumped wafers for flip chip |
Nov. 28, 2006 |
| 7141514 |
Selective plasma re-oxidation process using pulsed RF source power |
Nov. 28, 2006 |
| 7112834 |
Gate etch process |
Sep. 26, 2006 |
| 7078242 |
Manufacturing method of semiconducter device |
Jul. 18, 2006 |
| 7071009 |
MRAM arrays with reduced bit line resistance and method to make the same |
Jul. 4, 2006 |
| 7052933 |
Method of manufacturing an electronic device, and electronic device |
May. 30, 2006 |
| 7038222 |
System and method for using areas near photo global alignment marks or unpatterned areas of a semiconductor wafer to create structures for SIMS or E-Beam or XRD testing |
May. 2, 2006 |
| 6996453 |
Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module |
Feb. 7, 2006 |
| 6960774 |
Fault detection and control methodologies for ion implantation processes, and system for performing same |
Nov. 1, 2005 |
| 6956963 |
Imaging for a machine-vision system |
Oct. 18, 2005 |
| 6793905 |
Method for producing high-purity hydrochloric acid |
Sep. 21, 2004 |
| 6746237 |
Method and device for heat treating substrates |
Jun. 8, 2004 |
| 6693023 |
Ion implantation method and ion implantation equipment |
Feb. 17, 2004 |
| 6654659 |
Quartz crystal monitor wafer for lithography and etch process monitoring |
Nov. 25, 2003 |
| 6635184 |
Method for pattern-etching alumina layers and products |
Oct. 21, 2003 |
| 6629882 |
Precise polishing apparatus and method |
Oct. 7, 2003 |
| 6293846 |
Polishing apparatus |
Sep. 25, 2001 |
| 6059984 |
Process for fabricating thin film magnetic head including crater for recessed structure |
May. 9, 2000 |
| 6004047 |
Method of and apparatus for processing photoresist, method of evaluating photoresist film, and processing apparatus using the evaluation method |
Dec. 21, 1999 |
| 5991698 |
Electrical lap guide data acquisition unit and measurement scheme |
Nov. 23, 1999 |
| 5991007 |
Step and scan exposure system and semiconductor device manufactured using said system |
Nov. 23, 1999 |
| 5861103 |
Etching method and apparatus |
Jan. 19, 1999 |
| 5846442 |
Controlled diffusion partial etching |
Dec. 8, 1998 |
| 5833831 |
Method and system for generating electrolyzed water |
Nov. 10, 1998 |
| 5824200 |
Generation of electrolytically active water and wet process of a semiconductor substrate |
Oct. 20, 1998 |
| 5650897 |
Thin film magnetic head including lightning arrester and process for making the same |
Jul. 22, 1997 |
| 5473433 |
Method of high yield manufacture of VLSI type integrated circuit devices by determining critical surface characteristics of mounting films |
Dec. 5, 1995 |
| 5192370 |
Method and apparatus for forming thin film |
Mar. 9, 1993 |
| 5192588 |
Electroformed method for fabricating round mesa millimeter wave waffleline structure |
Mar. 9, 1993 |
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