| |
 |
|
Class Information
Number: 257/797
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Alignment marks
Description: Subject matter wherein the active solid-state device is provided with one or more indicia or marks used during fabrication of the device to facilitate accurate alignment of regions in the device.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459798 |
Overlay mark |
Dec. 2, 2008 |
| 7456079 |
EPI wafer and method of making the same |
Nov. 25, 2008 |
| 7456083 |
Semiconductor device and manufacturing method of the same |
Nov. 25, 2008 |
| 7456507 |
Die seal structure for reducing stress induced during die saw process |
Nov. 25, 2008 |
| 7453160 |
Simplified wafer alignment |
Nov. 18, 2008 |
| 7453161 |
Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus |
Nov. 18, 2008 |
| 7449792 |
Pattern registration mark designs for use in photolithography and methods of using the same |
Nov. 11, 2008 |
| 7449791 |
Printed circuit boards and method of producing the same |
Nov. 11, 2008 |
| 7449790 |
Methods and systems of enhancing stepper alignment signals and metrology alignment target signals |
Nov. 11, 2008 |
| 7449716 |
Bond quality indication by bump structure on substrate |
Nov. 11, 2008 |
| 7449265 |
Scatterometry target for determining CD and overlay |
Nov. 11, 2008 |
| 7439083 |
Technique for compensating for substrate shrinkage during manufacture of an electronic assembly |
Oct. 21, 2008 |
| 7440105 |
Continuously varying offset mark and methods of determining overlay |
Oct. 21, 2008 |
| 7436077 |
Semiconductor device and method of manufacturing the same |
Oct. 14, 2008 |
| 7437207 |
Method and apparatus for automatically processing multiple applications in a predetermined order to affect multi-application sequencing |
Oct. 14, 2008 |
| 7432605 |
Overlay mark, method for forming the same and application thereof |
Oct. 7, 2008 |
| 7429522 |
Dicing die-bonding film |
Sep. 30, 2008 |
| 7427459 |
Recticle pattern applied to mix-and-match lithography process and alignment method of thereof |
Sep. 23, 2008 |
| 7423282 |
Memory structure and method of manufacture |
Sep. 9, 2008 |
| 7419882 |
Alignment mark and alignment method for the fabrication of trench-capacitor dram devices |
Sep. 2, 2008 |
| 7419899 |
Method for manufacturing semiconductor device |
Sep. 2, 2008 |
| 7414324 |
Wafer structure with mirror shot |
Aug. 19, 2008 |
| 7414787 |
Phase contrast microscope for short wavelength radiation and imaging method |
Aug. 19, 2008 |
| 7411294 |
Display device having misalignment detection pattern for detecting misalignment between conductive layer and insulating layer |
Aug. 12, 2008 |
| 7408265 |
Use of a dual-tone resist to form photomasks including alignment mark protection, intermediate semiconductor device structures and bulk semiconductor device substrates |
Aug. 5, 2008 |
| 7405487 |
Method and apparatus for removing encapsulating material from a packaged microelectronic device |
Jul. 29, 2008 |
| 7402914 |
Semiconductor device featuring overlay-mark used in photolithography process |
Jul. 22, 2008 |
| 7393619 |
Method and lithographic structure for measuring lengths of lines and spaces |
Jul. 1, 2008 |
| 7393754 |
Tape carrier type semiconductor device and method of producing the same |
Jul. 1, 2008 |
| 7390723 |
Alignment method of using alignment marks on wafer edge |
Jun. 24, 2008 |
| 7382037 |
Semiconductor device with a peeling prevention layer |
Jun. 3, 2008 |
| 7379184 |
Overlay measurement target |
May. 27, 2008 |
| 7372736 |
Monolithic, combo nonvolatile memory allowing byte, page and block write with no disturb and divided-well in the cell array using a unified cell structure and technology with a new scheme of d |
May. 13, 2008 |
| 7368749 |
Method of detecting misalignment of ion implantation area |
May. 6, 2008 |
| 7368385 |
Method for producing a structure on the surface of a substrate |
May. 6, 2008 |
| 7368208 |
Measuring phase errors on phase shift masks |
May. 6, 2008 |
| 7365419 |
Surface-mount packaging for chip |
Apr. 29, 2008 |
| 7365909 |
Fabrication methods for micro compounds optics |
Apr. 29, 2008 |
| 7365413 |
Reduced power distribution mesh resistance using a modified swiss-cheese slotting pattern |
Apr. 29, 2008 |
| 7358619 |
Tape carrier for TAB |
Apr. 15, 2008 |
| 7359054 |
Overlay target and measurement method using reference and sub-grids |
Apr. 15, 2008 |
| 7355201 |
Test structure for measuring electrical and dimensional characteristics |
Apr. 8, 2008 |
| 7355291 |
Overlay marks, methods of overlay mark design and methods of overlay measurements |
Apr. 8, 2008 |
| 7348682 |
Method and structures for indexing dice |
Mar. 25, 2008 |
| 7349140 |
Triple alignment substrate method and structure for packaging devices |
Mar. 25, 2008 |
| 7338885 |
Alignment mark and method for manufacturing a semiconductor device having the same |
Mar. 4, 2008 |
| 7339282 |
Topographically indexed support substrates |
Mar. 4, 2008 |
| 7330261 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection |
Feb. 12, 2008 |
| 7313873 |
Surface position measuring method, exposure apparatus, and device manufacturing method |
Jan. 1, 2008 |
| 7315087 |
Angled elongated features for improved alignment process integration |
Jan. 1, 2008 |
|
|
|
