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Class Information
Number: 257/48
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Test or calibration structure
Description: Subject matter in which structures are provided on active solid-state devices to permit or facilitate the measurement, test, or calibration of the characteristics of the devices.


Patents under this class:
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Patent Number Title Of Patent Date Issued
6437423 Method for fabricating semiconductor components with high aspect ratio features Aug. 20, 2002
6437364 Internal probe pads for failure analysis Aug. 20, 2002
6433410 Semiconductor device tester and method of testing semiconductor device Aug. 13, 2002
6433360 Structure and method of testing failed or returned die to determine failure location and type Aug. 13, 2002
6429675 Structure and method for probing wiring bond pads Aug. 6, 2002
6429452 Test structure and methodology for characterizing ion implantation in an integrated circuit fabrication process Aug. 6, 2002
6429454 Semiconductor device with test circuit Aug. 6, 2002
6429453 Substrate assembly for burn in test of integrated circuit chip Aug. 6, 2002
6426516 Kerf contact to silicon redesign for defect isolation and analysis Jul. 30, 2002
6423981 Low-loss elementary standard structure for the calibration of an integrated circuit probe Jul. 23, 2002
6423555 System for determining overlay error Jul. 23, 2002
6420702 Non-charging critical dimension SEM metrology standard Jul. 16, 2002
6414334 Semi-conductor device with test element group for evaluation of interlayer dielectric and process for producing the same Jul. 2, 2002
6414336 Semiconductor device capable of improving manufacturing Jul. 2, 2002
6414335 Selective state change analysis of a SOI die Jul. 2, 2002
6410354 Semiconductor substrate test device and method Jun. 25, 2002
6410937 Integrated circuit chip carrier Jun. 25, 2002
6410353 Contact chain for testing and its relevantly debugging method Jun. 25, 2002
6410936 Semiconductor device Jun. 25, 2002
6403389 Method for determining on-chip sheet resistivity Jun. 11, 2002
6403979 Test structure for measuring effective channel length of a transistor Jun. 11, 2002
6404217 Enhanced security semiconductor device, semiconductor circuit arrangement and method or production thereof Jun. 11, 2002
6403978 Test pattern for measuring variations of critical dimensions of wiring patterns formed in the fabrication of semiconductor devices Jun. 11, 2002
6399401 Test structures for electrical linewidth measurement and processes for their formation Jun. 4, 2002
6399958 Apparatus for visual inspection during device analysis Jun. 4, 2002
6400037 Method of marking on metallic layer, metallic layer with marks thereon and semiconductor device having the metallic layer Jun. 4, 2002
6400038 Alignment method and semiconductor device Jun. 4, 2002
6400425 TFT-LCD array substrate for testing the short/open-circuit of electric line and a method for fabricating the same Jun. 4, 2002
6396075 Transient fuse for change-induced damage detection May. 28, 2002
6396076 Test structures for substrate etching May. 28, 2002
6392251 Test structures for identifying open contacts and methods of making the same May. 21, 2002
6392252 Semiconductor device May. 21, 2002
6392307 Semiconductor device May. 21, 2002
6392434 Method for testing semiconductor wafers May. 21, 2002
6388269 Metal interconnection structure for evaluation on electromigration May. 14, 2002
6384426 System for testing semiconductor chip leads constrained in dielectric media May. 7, 2002
6384425 Nonconductive substrate forming a strip or a panel on which a multiplicity of carrier elements is formed May. 7, 2002
6383827 Electrical alignment test structure using local interconnect ladder resistor May. 7, 2002
6380729 Testing integrated circuit dice Apr. 30, 2002
6380557 Test chip for evaluating fillers of molding material with dams formed on a semiconductor substrate to define slits for capturing the fillers Apr. 30, 2002
6380555 Bumped semiconductor component having test pads, and method and system for testing bumped semiconductor components Apr. 30, 2002
6380554 Test structure for electrically measuring the degree of misalignment between successive layers of conductors Apr. 30, 2002
6380556 Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure Apr. 30, 2002
6376261 Method for varying nitride strip makeup process based on field oxide loss and defect count Apr. 23, 2002
6373143 Integrated circuit having wirebond pads suitable for probing Apr. 16, 2002
6372525 Wafer-level antenna effect detection pattern for VLSI Apr. 16, 2002
6369407 Semiconductor device Apr. 9, 2002
6369406 Method for localizing point defects causing leakage currents in a non-volatile memory device Apr. 9, 2002
6365914 Semiconductor device provided with a built-in minute charge detecting circuit Apr. 2, 2002
6366209 Method and apparatus for early detection of reliability degradation of electronic devices Apr. 2, 2002

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