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Class Information
Number: 257/419
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Responsive to non-electrical signal (e.g., chemical, stress, light, or magnetic field sensors) > Physical deformation > Strain sensors > With means to concentrate stress > With thinned central active portion of semiconductor surrounded by thick insensitive portion (e.g. diaphragm type strain gauge)
Description: Subject matter wherein the means to concentrate the physically deforming stress is a thinned central active portion of semiconductor surrounded by a thick insensitive portion (e.g., a diaphragm type strain gauge).










Patents under this class:
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Patent Number Title Of Patent Date Issued
8710600 Semiconductor pressure sensor Apr. 29, 2014
8710597 Method and structure for adding mass with stress isolation to MEMS structures Apr. 29, 2014
8710598 High-density 3-dimensional structure Apr. 29, 2014
8710601 MEMS structure and method for making the same Apr. 29, 2014
8701496 Systems and methods for a pressure sensor having a two layer die structure Apr. 22, 2014
8692340 MEMS acoustic sensor with integrated back cavity Apr. 8, 2014
8674463 Multifunction MEMS element and integrated method for making MOS and multifunction MEMS Mar. 18, 2014
8674464 MEMS component, method for producing a MEMS component, and method for handling a MEMS component Mar. 18, 2014
8674462 Sensor package Mar. 18, 2014
8659101 Physical quantity detector Feb. 25, 2014
8659100 MEMS component having a diaphragm structure Feb. 25, 2014
8653613 Electromechanical transducer and method of manufacturing the same Feb. 18, 2014
8647908 Semiconductor pressure sensor and method of manufacturing semiconductor pressure sensor Feb. 11, 2014
8648433 Method for producing oblique surfaces in a substrate and wafer having an oblique surface Feb. 11, 2014
8643128 Micro-electro-mechanical-system sensor and method for making same Feb. 4, 2014
8643129 MEMS device Feb. 4, 2014
8629517 Wafer level packaging Jan. 14, 2014
8613287 Apparatus for preventing stiction of MEMS microstructure Dec. 24, 2013
8614492 Nanowire stress sensors, stress sensor integrated circuits, and design structures for a stress sensor integrated circuit Dec. 24, 2013
8604559 Method of placing a semiconducting nanostructure and semiconductor device including the semiconducting nanostructure Dec. 10, 2013
8590389 MEMS pressure sensor device and manufacturing method thereof Nov. 26, 2013
8587078 Integrated circuit and fabricating method thereof Nov. 19, 2013
8581354 Semiconductor device carrying micro electro mechanical system Nov. 12, 2013
8569850 Ultra low pressure sensor Oct. 29, 2013
8569851 Sensor and method for fabricating the same Oct. 29, 2013
8558330 Deep well process for MEMS pressure sensor Oct. 15, 2013
8558250 Displays with embedded MEMS sensors and related methods Oct. 15, 2013
8553911 Diaphragm of MEMS electroacoustic transducer Oct. 8, 2013
8552513 Semiconductor pressure sensor Oct. 8, 2013
8552514 Semiconductor physical quantity sensor Oct. 8, 2013
8535967 Method and system for etching a diaphragm pressure sensor Sep. 17, 2013
8536667 Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy Sep. 17, 2013
8525185 RF-MEMS capacitive switches with high reliability Sep. 3, 2013
8525279 Single element three terminal piezoresistive pressure sensor Sep. 3, 2013
8519491 MEMS sensing device and method for making same Aug. 27, 2013
8519494 Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate Aug. 27, 2013
8502329 Micro-electro-mechanical systems (MEMS) device and method for fabricating the same Aug. 6, 2013
8497149 MEMS device Jul. 30, 2013
8497558 System and method for wafer level packaging Jul. 30, 2013
8492857 MEMS diaphragm Jul. 23, 2013
8492855 Micromechanical capacitive pressure transducer and production method Jul. 23, 2013
8487389 Uniaxial acceleration sensor Jul. 16, 2013
8471346 Semiconductor device including a cavity Jun. 25, 2013
8466523 Differential pressure sensor device Jun. 18, 2013
8461657 Methods for forming a micro electro-mechanical device Jun. 11, 2013
8461656 Device structures for in-plane and out-of-plane sensing micro-electro-mechanical systems (MEMS) Jun. 11, 2013
8455964 Electromechanical transducer and production method therefor Jun. 4, 2013
8450817 Microelectromechanical system package with strain relief bridge May. 28, 2013
8445307 Monolithic IC and MEMS microfabrication process May. 21, 2013
8445978 Electromechanical transducer device and method of forming a electromechanical transducer device May. 21, 2013

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