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Class Information
Number: 257/417
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Responsive to non-electrical signal (e.g., chemical, stress, light, or magnetic field sensors) > Physical deformation > Strain sensors
Description: Subject matter wherein the physically deforming force is that of an applied stress.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615835 |
Package for semiconductor acceleration sensor |
Nov. 10, 2009 |
| 7615834 |
Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane |
Nov. 10, 2009 |
| 7612423 |
Signal-carrying flexure structure for micro-electromechanical devices |
Nov. 3, 2009 |
| 7608900 |
Semiconductor device and method of manufacturing and inspection thereof |
Oct. 27, 2009 |
| 7603910 |
Micro-electromechanical capacitive strain sensor |
Oct. 20, 2009 |
| 7582940 |
Semiconductor device using MEMS technology |
Sep. 1, 2009 |
| 7582969 |
Hermetic interconnect structure and method of manufacture |
Sep. 1, 2009 |
| 7579662 |
MEMS resonator and method of enhancing an output signal current from a MEMS resonator |
Aug. 25, 2009 |
| 7572660 |
Electrical through-plating of semiconductor chips |
Aug. 11, 2009 |
| 7572659 |
Semiconductor dynamic sensor and method of manufacturing the same |
Aug. 11, 2009 |
| 7566939 |
Fabrication of silicon micro-mechanical structures |
Jul. 28, 2009 |
| 7560788 |
Microelectromechanical system pressure sensor and method for making and using |
Jul. 14, 2009 |
| 7554168 |
Semiconductor acceleration sensor device |
Jun. 30, 2009 |
| 7554136 |
Micro-switch device and method for manufacturing the same |
Jun. 30, 2009 |
| 7550810 |
MEMS device having a layer movable at asymmetric rates |
Jun. 23, 2009 |
| 7540191 |
Angular rate sensor and method of manufacturing the same |
Jun. 2, 2009 |
| 7524693 |
Method and apparatus for forming an electrical connection to a semiconductor substrate |
Apr. 28, 2009 |
| 7518202 |
Mechanical quantity measuring apparatus |
Apr. 14, 2009 |
| 7514283 |
Method of fabricating electromechanical device having a controlled atmosphere |
Apr. 7, 2009 |
| 7495301 |
Thin film accelerometer |
Feb. 24, 2009 |
| 7491567 |
MEMS device packaging methods |
Feb. 17, 2009 |
| 7491566 |
Method of forming a device by removing a conductive layer of a wafer |
Feb. 17, 2009 |
| 7489013 |
Destructor integrated circuit chip, interposer electronic device and methods |
Feb. 10, 2009 |
| 7476948 |
Microminiature moving device and method of making the same |
Jan. 13, 2009 |
| 7466000 |
Semiconductor device having multiple substrates |
Dec. 16, 2008 |
| 7462918 |
Pressure sensor having gold-silicon eutectic crystal layer interposed between contact layer and silicon substrate |
Dec. 9, 2008 |
| 7453129 |
Image sensor comprising isolated germanium photodetectors integrated with a silicon substrate and silicon circuitry |
Nov. 18, 2008 |
| 7443002 |
Encapsulated microstructure and method of producing one such microstructure |
Oct. 28, 2008 |
| 7436037 |
Moisture resistant pressure sensors |
Oct. 14, 2008 |
| 7427797 |
Semiconductor device having actuator |
Sep. 23, 2008 |
| 7425749 |
MEMS pixel sensor |
Sep. 16, 2008 |
| 7405099 |
Wide and narrow trench formation in high aspect ratio MEMS |
Jul. 29, 2008 |
| 7394138 |
Capacitance-type dynamic-quantity sensor and manufacturing method therefor |
Jul. 1, 2008 |
| 7393711 |
Method of producing a digital fingerprint sensor and the corresponding sensor |
Jul. 1, 2008 |
| 7380461 |
Micro-electromechanical capacitive strain sensor |
Jun. 3, 2008 |
| 7371600 |
Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same |
May. 13, 2008 |
| 7357032 |
Pressure transmitter |
Apr. 15, 2008 |
| 7358581 |
Quantum dot based pressure switch |
Apr. 15, 2008 |
| 7358579 |
Reducing the actuation voltage of microelectromechanical system switches |
Apr. 15, 2008 |
| 7355268 |
High reflector tunable stress coating, such as for a MEMS mirror |
Apr. 8, 2008 |
| 7348646 |
Micromechanical capacitive transducer and method for manufacturing the same |
Mar. 25, 2008 |
| 7337666 |
Movable sensor device |
Mar. 4, 2008 |
| 7329932 |
Microelectromechanical (MEM) viscosity sensor and method |
Feb. 12, 2008 |
| 7321156 |
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device |
Jan. 22, 2008 |
| 7317233 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
Jan. 8, 2008 |
| 7317199 |
Circuit device |
Jan. 8, 2008 |
| 7312485 |
CMOS fabrication process utilizing special transistor orientation |
Dec. 25, 2007 |
| 7309902 |
Microelectronic device with anti-stiction coating |
Dec. 18, 2007 |
| 7307325 |
High temperature interconnects for high temperature transducers |
Dec. 11, 2007 |
| 7304357 |
Devices having horizontally-disposed nanofabric articles and methods of making the same |
Dec. 4, 2007 |
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