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Class Information
Number: 257/415
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Responsive to non-electrical signal (e.g., chemical, stress, light, or magnetic field sensors) > Physical deformation
Description: Subject matter wherein the non-electrical signal incident upon the active solid-state device is a force which physically deforms the device.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619291 |
Devices having horizontally-disposed nanofabric articles and methods of making the same |
Nov. 17, 2009 |
| 7615788 |
Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry |
Nov. 10, 2009 |
| 7612423 |
Signal-carrying flexure structure for micro-electromechanical devices |
Nov. 3, 2009 |
| 7612424 |
Nanoelectromechanical bistable cantilever device |
Nov. 3, 2009 |
| 7605675 |
Electromechanical switch with partially rigidified electrode |
Oct. 20, 2009 |
| 7605391 |
Optically coupled resonator |
Oct. 20, 2009 |
| 7598109 |
Method for fabricating micrometer or nanometer channels |
Oct. 6, 2009 |
| 7598825 |
Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator |
Oct. 6, 2009 |
| 7595539 |
Method for release of surface micromachined structures in an epitaxial reactor |
Sep. 29, 2009 |
| 7586165 |
Microelectromechanical systems (MEMS) device including a superlattice |
Sep. 8, 2009 |
| 7586164 |
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods |
Sep. 8, 2009 |
| 7582940 |
Semiconductor device using MEMS technology |
Sep. 1, 2009 |
| 7579662 |
MEMS resonator and method of enhancing an output signal current from a MEMS resonator |
Aug. 25, 2009 |
| 7579663 |
Hermetic packaging and method of manufacture and use therefore |
Aug. 25, 2009 |
| 7576901 |
Method and device for selective adjustment of hysteresis window |
Aug. 18, 2009 |
| 7572660 |
Electrical through-plating of semiconductor chips |
Aug. 11, 2009 |
| 7573022 |
Method for fabricating vertically-offset interdigitated comb actuator device |
Aug. 11, 2009 |
| 7566940 |
Electromechanical devices having overlying support structures |
Jul. 28, 2009 |
| 7566582 |
Systems, methods and devices relating to actuatably moveable machines |
Jul. 28, 2009 |
| 7566939 |
Fabrication of silicon micro-mechanical structures |
Jul. 28, 2009 |
| 7560788 |
Microelectromechanical system pressure sensor and method for making and using |
Jul. 14, 2009 |
| 7560789 |
Semiconductor device |
Jul. 14, 2009 |
| 7557441 |
Package of MEMS device and method for fabricating the same |
Jul. 7, 2009 |
| 7557417 |
Module comprising a semiconductor chip comprising a movable element |
Jul. 7, 2009 |
| 7554136 |
Micro-switch device and method for manufacturing the same |
Jun. 30, 2009 |
| 7554167 |
Three-dimensional analog input control device |
Jun. 30, 2009 |
| 7550810 |
MEMS device having a layer movable at asymmetric rates |
Jun. 23, 2009 |
| 7545236 |
Electromechanical filter utilizing a quantum device and sensing electrode |
Jun. 9, 2009 |
| 7541939 |
Mounted shock sensor |
Jun. 2, 2009 |
| 7540192 |
Physical quantity sensor having optical part and method for manufacturing the same |
Jun. 2, 2009 |
| 7540191 |
Angular rate sensor and method of manufacturing the same |
Jun. 2, 2009 |
| 7534640 |
Support structure for MEMS device and methods therefor |
May. 19, 2009 |
| 7535621 |
Aluminum fluoride films for microelectromechanical system applications |
May. 19, 2009 |
| 7527998 |
Method of manufacturing MEMS devices providing air gap control |
May. 5, 2009 |
| 7524693 |
Method and apparatus for forming an electrical connection to a semiconductor substrate |
Apr. 28, 2009 |
| 7518200 |
Semiconductor integrated circuit chip with a nano-structure-surface passivation film |
Apr. 14, 2009 |
| 7518283 |
Nanometer-scale electrostatic and electromagnetic motors and generators |
Apr. 14, 2009 |
| 7514760 |
IC-compatible MEMS structure |
Apr. 7, 2009 |
| 7504658 |
Sensor elements with cantilevered bar structures made of semiconductors based on group III-nitride |
Mar. 17, 2009 |
| 7504275 |
Layout design and fabrication of SDA micro motor for low driving voltage and high lifetime application |
Mar. 17, 2009 |
| 7493815 |
MEMS switch triggered by shock and/or acceleration |
Feb. 24, 2009 |
| 7493819 |
Micromechanical pressure sensor system |
Feb. 24, 2009 |
| 7492040 |
Glass lid, and package provided with such a lid, for the encapsulation of electronic components |
Feb. 17, 2009 |
| 7492020 |
Micro structure with interlock configuration |
Feb. 17, 2009 |
| 7492019 |
Micromachined assembly with a multi-layer cap defining a cavity |
Feb. 17, 2009 |
| 7491567 |
MEMS device packaging methods |
Feb. 17, 2009 |
| 7489004 |
Micro-electro-mechanical variable capacitor for radio frequency applications with reduced influence of a surface roughness |
Feb. 10, 2009 |
| 7489027 |
Accessible electronic storage apparatus |
Feb. 10, 2009 |
| 7482192 |
Method of making dimple structure for prevention of MEMS device stiction |
Jan. 27, 2009 |
| 7482664 |
Out-of-plane electrostatic actuator |
Jan. 27, 2009 |
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