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Class Information
Number: 257/415
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Responsive to non-electrical signal (e.g., chemical, stress, light, or magnetic field sensors) > Physical deformation
Description: Subject matter wherein the non-electrical signal incident upon the active solid-state device is a force which physically deforms the device.

Sub-classes under this class:

Class Number Class Name Patents
257/416 Acoustic wave 360
257/420 Means to reduce sensitivity to physical deformation 218
257/417 Strain sensors 605

Patents under this class:

Patent Number Title Of Patent Date Issued
8710598 High-density 3-dimensional structure Apr. 29, 2014
8709264 (4928 Apr. 29, 2014
8704331 MEMS integrated chip with cross-area interconnection Apr. 22, 2014
8704317 Microstructure device with an improved anchor Apr. 22, 2014
8704316 Etchant-free methods of producing a gap between two layers, and devices produced thereby Apr. 22, 2014
8704315 CMOS integrated micromechanical resonators and methods for fabricating the same Apr. 22, 2014
8704314 Mechanical memory transistor Apr. 22, 2014
8704275 Semiconductor die micro electro-mechanical switch management method Apr. 22, 2014
8703517 Method of Manufacturing a Semiconductor Device Including Removing a Reformed Layer Apr. 22, 2014
8703516 MEMS substrates, devices, and methods of manufacture thereof Apr. 22, 2014
8692340 MEMS acoustic sensor with integrated back cavity Apr. 8, 2014
8692338 Micro electronic device having CMOS circuit and MEMS resonator formed on common silicon substrate Apr. 8, 2014
8692337 Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration Apr. 8, 2014
8687827 Micro-electro-mechanical system microphone chip with expanded back chamber Apr. 1, 2014
8686519 MEMS accelerometer using capacitive sensing and production method thereof Apr. 1, 2014
8680665 Encapsulation, MEMS and encapsulation method Mar. 25, 2014
8680664 Structure for encapsulating an electronic device Mar. 25, 2014
8680631 High aspect ratio capacitively coupled MEMS devices Mar. 25, 2014
8679886 Microelectronic device and MEMS package structure and fabricating method thereof Mar. 25, 2014
8674518 Chip package and method for forming the same Mar. 18, 2014
8674463 Multifunction MEMS element and integrated method for making MOS and multifunction MEMS Mar. 18, 2014
8674462 Sensor package Mar. 18, 2014
8671752 Sensor system Mar. 18, 2014
8669627 MEMS element and method for manufacturing same Mar. 11, 2014
8664732 Magnetic pressure sensor Mar. 4, 2014
8664731 Strengthened micro-electromechanical system devices and methods of making thereof Mar. 4, 2014
8664730 Manufacturing method for electronic component, electronic component, and electronic equipment Mar. 4, 2014
8661900 Z-axis microelectromechanical device with improved stopper structure Mar. 4, 2014
8659101 Physical quantity detector Feb. 25, 2014
8659098 Resonator and fabrication method thereof Feb. 25, 2014
8658453 Capacitive micromachined ultrasonic transducer Feb. 25, 2014
8656784 Flat covered leadless pressure sensor assemblies suitable for operation in extreme environments Feb. 25, 2014
8653634 EMI-shielded semiconductor devices and methods of making Feb. 18, 2014
8653612 Semiconductor device Feb. 18, 2014
8652961 Methods and structure for adapting MEMS structures to form electrical interconnections for integrated circuits Feb. 18, 2014
8648430 Microelectromechanical system having movable element integrated into substrate-based package Feb. 11, 2014
8648429 Semiconductor having chip stack, semiconductor system, and method of fabricating the semiconductor apparatus Feb. 11, 2014
8643140 Suspended beam for use in MEMS device Feb. 4, 2014
8643129 MEMS device Feb. 4, 2014
8643128 Micro-electro-mechanical-system sensor and method for making same Feb. 4, 2014
8643127 Sensor device packaging Feb. 4, 2014
8643125 Structure and process for microelectromechanical system-based sensor Feb. 4, 2014
8633554 MEMS device etch stop Jan. 21, 2014
8633553 Process for manufacturing a micromechanical structure having a buried area provided with a filter Jan. 21, 2014
8633552 ESD protection for MEMS resonator devices Jan. 21, 2014
8629516 Bulk silicon moving member with dimple Jan. 14, 2014
8629011 Epitaxial silicon CMOS-MEMS microphones and method for manufacturing Jan. 14, 2014
8627720 Acceleration sensor Jan. 14, 2014
8624380 Vertical mount package for MEMS sensors Jan. 7, 2014
8624339 Vibrating device and electronic apparatus Jan. 7, 2014

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