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Class Information
Number: 257/383
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Field effect device > Having insulated electrode (e.g., mosfet, mos diode) > Insulated gate field effect transistor in integrated circuit > With contact to source or drain region of refractory material (e.g., polysilicon, tungsten, or silicide) > Contact of refractory or platinum group metal (e.g., molybdenum, tungsten, or titanium)
Description: Subject matter wherein the contact to the source or drain region is made of a refractory or platinum group metal (e.g., molybdenum, tungsten, or titanium).










Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
8637937 Through silicon via for use in integrated circuit chips Jan. 28, 2014
8629510 Two-step silicide formation Jan. 14, 2014
8598004 Self aligned MOS structure with polysilicon contact Dec. 3, 2013
8581350 Field effect transistor and semiconductor device, and method for manufacturing same Nov. 12, 2013
8564068 Device and methods for small trench patterning Oct. 22, 2013
8536656 Self-aligned contacts for high k/metal gate process flow Sep. 17, 2013
8525270 Structures and methods to stop contact metal from extruding into replacement gates Sep. 3, 2013
8476680 Semiconductor device and method for manufacturing the same Jul. 2, 2013
8471343 Parasitic capacitance reduction in MOSFET by airgap ild Jun. 25, 2013
8466555 Gold-free ohmic contacts Jun. 18, 2013
8455343 Semiconductor device with buried gate and method for fabricating the same Jun. 4, 2013
8334187 Hard mask for thin film resistor manufacture Dec. 18, 2012
8330235 Method to reduce mol damage on NiSi Dec. 11, 2012
8330230 Semiconductor device pad having the same voltage level as that of a semiconductor substrate Dec. 11, 2012
8304840 Spacer structures of a semiconductor device Nov. 6, 2012
8304819 Semiconductor device including metal silicide layer and method for manufacturing the same Nov. 6, 2012
8299541 Process for producing a contact pad on a region of an integrated circuit, in particular on the electrodes of a transistor Oct. 30, 2012
8299455 Semiconductor structures having improved contact resistance Oct. 30, 2012
8299580 Semiconductor wafer and a method of separating the same Oct. 30, 2012
8288827 Field effect transistor with metal-semiconductor junction Oct. 16, 2012
8278721 Contact hole, semiconductor device and method for forming the same Oct. 2, 2012
8278718 Stressed barrier plug slot contact structure for transistor performance enhancement Oct. 2, 2012
8242567 Semiconductor device and manufacturing method thereof Aug. 14, 2012
8178928 Intermediate structures having reduced width contact holes that are formed during manufacture of memory cells having contact structures May. 15, 2012
8178931 Bridge for semiconductor internal node May. 15, 2012
8138554 Semiconductor device with local interconnects Mar. 20, 2012
8120119 Stressed barrier plug slot contact structure for transistor performance enhancement Feb. 21, 2012
8039902 Semiconductor devices having Si and SiGe epitaxial layers Oct. 18, 2011
8021971 Structure and method to form a thermally stable silicide in narrow dimension gate stacks Sep. 20, 2011
7999330 Dynamic random access memory device and electronic systems Aug. 16, 2011
7982272 Thin-film semiconductor device and method for manufacturing the same Jul. 19, 2011
7977232 Semiconductor wafer including cracking stopper structure and method of forming the same Jul. 12, 2011
7973367 Semiconductor device and manufacturing method thereof Jul. 5, 2011
7968949 Contact forming method and related semiconductor device Jun. 28, 2011
7968952 Stressed barrier plug slot contact structure for transistor performance enhancement Jun. 28, 2011
7960797 Semiconductor devices including fine pitch arrays with staggered contacts Jun. 14, 2011
7939897 Method of forming a low resistance semiconductor contact and structure therefor May. 10, 2011
7936026 Semiconductor device and method of manufacturing the same May. 3, 2011
7935997 Low resistance peripheral contacts while maintaining DRAM array integrity May. 3, 2011
7880256 Semiconductor device with passivation layer covering wiring layer Feb. 1, 2011
7859063 Semiconductor device using SOI-substrate Dec. 28, 2010
7834404 Semiconductor device Nov. 16, 2010
7759742 Metal oxide semiconductor transistor Jul. 20, 2010
7714435 Semiconductor device and method for fabricating the same May. 11, 2010
7705405 Methods for the formation of fully silicided metal gates Apr. 27, 2010
7696583 Thin film transistor and method of fabricating the same Apr. 13, 2010
7687865 Method and structure to reduce contact resistance on thin silicon-on-insulator device Mar. 30, 2010
7663191 Semiconductor device and manufacturing method thereof with rounded gate including a silicide on the top and at the corners Feb. 16, 2010
7659160 Field effect transistors (FETS) with inverted source/drain metallic contacts, and method of fabrication same Feb. 9, 2010
7655986 Systems and methods for reducing contact to gate shorts Feb. 2, 2010

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