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Class Information
Number: 257/254
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Field effect device > Responsive to non-optical, non-electrical signal > Physical deformation (e.g., strain sensor, acoustic wave detector)
Description: Subject matter wherein the input is a physical deformation.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615810 |
Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus |
Nov. 10, 2009 |
| 7612423 |
Signal-carrying flexure structure for micro-electromechanical devices |
Nov. 3, 2009 |
| 7554136 |
Micro-switch device and method for manufacturing the same |
Jun. 30, 2009 |
| 7550794 |
Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
Jun. 23, 2009 |
| 7534640 |
Support structure for MEMS device and methods therefor |
May. 19, 2009 |
| 7487050 |
Techniques and devices for characterizing spatially non-uniform curvatures and stresses in thin-film structures on substrates with non-local effects |
Feb. 3, 2009 |
| 7459732 |
Gas-sensitive field-effect transistor with air gap |
Dec. 2, 2008 |
| 7411261 |
MEMS device and fabrication method thereof |
Aug. 12, 2008 |
| 7385268 |
Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation |
Jun. 10, 2008 |
| 7342263 |
Circuit device |
Mar. 11, 2008 |
| 7324096 |
Touch panel device |
Jan. 29, 2008 |
| 7321156 |
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device |
Jan. 22, 2008 |
| 7317233 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
Jan. 8, 2008 |
| 7312485 |
CMOS fabrication process utilizing special transistor orientation |
Dec. 25, 2007 |
| 7304358 |
MOS transistor with a deformable gate |
Dec. 4, 2007 |
| 7294895 |
Capacitive dynamic quantity sensor and semiconductor device |
Nov. 13, 2007 |
| 7280394 |
Field effect devices having a drain controlled via a nanotube switching element |
Oct. 9, 2007 |
| 7271459 |
Physical quantity sensor |
Sep. 18, 2007 |
| 7240428 |
Method for making probes for atomic force microscopy |
Jul. 10, 2007 |
| 7208831 |
Semiconductor device having multilayer wiring structure and method, wherein connecting portion and wiring layer are formed of same layer |
Apr. 24, 2007 |
| 7199448 |
Integrated circuit configuration comprising a sheet-like substrate |
Apr. 3, 2007 |
| 7187067 |
Sensor chip packaging structure |
Mar. 6, 2007 |
| 7157755 |
Polymer sacrificial light absorbing structure and method |
Jan. 2, 2007 |
| 7151057 |
Flexible MEMS transducer manufacturing method |
Dec. 19, 2006 |
| 7095064 |
Semiconductor sensor with pressure difference adjusting means |
Aug. 22, 2006 |
| 7071031 |
Three-dimensional integrated CMOS-MEMS device and process for making the same |
Jul. 4, 2006 |
| 7071520 |
MEMS with flexible portions made of novel materials |
Jul. 4, 2006 |
| 7064401 |
Thin film piezoelectric element, method of manufacturing the same, and actuator |
Jun. 20, 2006 |
| 7057246 |
Transition metal dielectric alloy materials for MEMS |
Jun. 6, 2006 |
| 7034375 |
Micro electromechanical systems thermal switch |
Apr. 25, 2006 |
| 7035083 |
Interdigitated capacitor and method for fabrication thereof |
Apr. 25, 2006 |
| 7030432 |
Method of fabricating an integrated circuit that seals a MEMS device within a cavity |
Apr. 18, 2006 |
| 7026697 |
Microstructures comprising a dielectric layer and a thin conductive layer |
Apr. 11, 2006 |
| 7015556 |
Packaging substrate and manufacturing method thereof, integrated circuit device and manufacturing method thereof, and saw device |
Mar. 21, 2006 |
| 7012026 |
Method for producing defined polycrystalline silicon areas in an amorphous silicon layer |
Mar. 14, 2006 |
| 6972447 |
Semiconductor component having a first earlier structure differing from a second earlier structure |
Dec. 6, 2005 |
| 6967362 |
Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone |
Nov. 22, 2005 |
| 6949766 |
Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern |
Sep. 27, 2005 |
| 6943391 |
Modification of carrier mobility in a semiconductor device |
Sep. 13, 2005 |
| 6939736 |
Ideal operational amplifier layout techniques for reducing package stress and configurations therefor |
Sep. 6, 2005 |
| 6900510 |
MEMS devices and methods for inhibiting errant motion of MEMS components |
May. 31, 2005 |
| 6876017 |
Polymer sacrificial light absorbing structure and method |
Apr. 5, 2005 |
| 6867061 |
Method for producing surface micromechanical structures, and sensor |
Mar. 15, 2005 |
| 6858911 |
MEMS actuators |
Feb. 22, 2005 |
| 6835589 |
Three-dimensional integrated CMOS-MEMS device and process for making the same |
Dec. 28, 2004 |
| 6833570 |
Structure comprising an insulated part in a solid substrate and method for producing same |
Dec. 21, 2004 |
| 6831340 |
Surface acoustic wave device and method of producing the same |
Dec. 14, 2004 |
| 6825512 |
Micromachined sensor with insulating protection of connections |
Nov. 30, 2004 |
| 6812055 |
MEMS devices and methods of manufacture |
Nov. 2, 2004 |
| 6809384 |
Method and apparatus for protecting wiring and integrated circuit device |
Oct. 26, 2004 |
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