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Browse by Category: Main > Physics
Class Information
Number: 257/254
Name: Active solid-state devices (e.g., transistors, solid-state diodes) > Field effect device > Responsive to non-optical, non-electrical signal > Physical deformation (e.g., strain sensor, acoustic wave detector)
Description: Subject matter wherein the input is a physical deformation.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8710597 Method and structure for adding mass with stress isolation to MEMS structures Apr. 29, 2014
8703517 Method of Manufacturing a Semiconductor Device Including Removing a Reformed Layer Apr. 22, 2014
8704315 CMOS integrated micromechanical resonators and methods for fabricating the same Apr. 22, 2014
8648431 Acoustic semiconductor device Feb. 11, 2014
8642986 Integrated circuit having microelectromechanical system device and method of fabricating the same Feb. 4, 2014
8643128 Micro-electro-mechanical-system sensor and method for making same Feb. 4, 2014
8624380 Vertical mount package for MEMS sensors Jan. 7, 2014
8592876 Micro-electro-mechanical system (MEMS) capacitive OHMIC switch and design structures Nov. 26, 2013
8592877 Embedded MEMS sensors and related methods Nov. 26, 2013
8592875 Semiconductor gas sensor Nov. 26, 2013
8587077 Integrated compact MEMS device with deep trench contacts Nov. 19, 2013
8587078 Integrated circuit and fabricating method thereof Nov. 19, 2013
8569089 Nano-devices formed with suspended graphene membrane Oct. 29, 2013
8564026 Chip, method for producing a chip and device for laser ablation Oct. 22, 2013
8564027 Nano-devices formed with suspended graphene membrane Oct. 22, 2013
8557686 Graphene-based non-volatile memory Oct. 15, 2013
8552513 Semiconductor pressure sensor Oct. 8, 2013
8552473 Micro-electro-mechanical device and manufacturing method for the same Oct. 8, 2013
8546170 MEMS process and device Oct. 1, 2013
8541812 Semiconductor device and method of manufacture thereof Sep. 24, 2013
8536663 Metal mesh lid MEMS package and method Sep. 17, 2013
8530982 Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure Sep. 10, 2013
8525389 MEMS device with protection rings Sep. 3, 2013
8519449 Thin-film transistor based piezoelectric strain sensor and method Aug. 27, 2013
8519450 Graphene-based non-volatile memory Aug. 27, 2013
8508193 Environmentally-powered wireless sensor module Aug. 13, 2013
8502279 Nano-electro-mechanical system (NEMS) structures with actuatable semiconductor fin on bulk substrates Aug. 6, 2013
8492801 Semiconductor structure with high breakdown voltage and resistance Jul. 23, 2013
8476675 Semiconductor device and method of manufacture thereof Jul. 2, 2013
8470921 Ultra-low permeability polymeric encapsulated acoustic device and method Jun. 25, 2013
8461656 Device structures for in-plane and out-of-plane sensing micro-electro-mechanical systems (MEMS) Jun. 11, 2013
8455928 Micro electro mechanical device and manufacturing method thereof Jun. 4, 2013
8441045 Semiconductor device and method for manufacturing the same May. 14, 2013
8432005 Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processes Apr. 30, 2013
8420382 Acoustic wave biosensor for the detection and identification of characteristic signaling molecules in a biological medium Apr. 16, 2013
8415717 Acoustic sensor Apr. 9, 2013
8368124 Electromechanical devices having etch barrier layers Feb. 5, 2013
8363859 Microelectromechanical system microphone package structure Jan. 29, 2013
8354290 Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches Jan. 15, 2013
8349634 Semiconductor device with sealed cap Jan. 8, 2013
8330191 Intrusion protection using stress changes Dec. 11, 2012
8304271 Integrated circuit having a bulk acoustic wave device and a transistor Nov. 6, 2012
8299506 Integration of MEMS and CMOS devices on a chip Oct. 30, 2012
8294184 EMS tunable transistor Oct. 23, 2012
8294225 Ultrasonic transducer and manufacturing method Oct. 23, 2012
8269291 Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters Sep. 18, 2012
8258554 Pressure detector and pressure detector array Sep. 4, 2012
8243964 Piezo speaker pressure sensor Aug. 14, 2012
8243770 Quantum photonic imagers and methods of fabrication thereof Aug. 14, 2012
8230576 Method of manufacturing capacitive electromechanical transducer Jul. 31, 2012

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