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Browse by Category: Main > Material Science
Class Information
Number: 252/79.4
Name: Compositions > Etching or brightening compositions > Inorganic acid containing > With organic material
Description: Compositions which contain an organic material in addition to the acid.


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
7601273 Polishing slurry composition and method of using the same Oct. 13, 2009
7572758 Cleaning liquid and cleaning method Aug. 11, 2009
7563315 Composition and method for preparing chemically-resistant roughened copper surfaces for bonding to substrates Jul. 21, 2009
7563383 CMP composition with a polymer additive for polishing noble metals Jul. 21, 2009
7553430 Polishing slurries and methods for chemical mechanical polishing Jun. 30, 2009
7544307 Metal polishing liquid and polishing method using it Jun. 9, 2009
7514363 Chemical-mechanical planarization composition having benzenesulfonic acid and per-compound oxidizing agents, and associated method for use Apr. 7, 2009
7507350 Etching liquid composition Mar. 24, 2009
7497966 Chemical mechanical polishing slurry composition for shallow trench isolation process of semiconductor Mar. 3, 2009
7481949 Polishing composition and rinsing composition Jan. 27, 2009
7481950 Polishing composition and polishing method using the same Jan. 27, 2009
7473380 Etching liquid Jan. 6, 2009
7456107 Compositions and methods for CMP of low-k-dielectric materials Nov. 25, 2008
7456114 Microetching composition and method of using the same Nov. 25, 2008
7452481 Polishing slurry and method of reclaiming wafers Nov. 18, 2008
7449127 Cleaning method and solution for cleaning a wafer in a single wafer process Nov. 11, 2008
7435356 Abrasive-free chemical mechanical polishing compositions and methods relating thereto Oct. 14, 2008
7427362 Corrosion-resistant barrier polishing solution Sep. 23, 2008
7422700 Compositions and methods of electrochemical removal of material from a barrier layer of a wafer Sep. 9, 2008
7407601 Polymeric particle slurry system and method to reduce feature sidewall erosion Aug. 5, 2008
7399424 Compositions for dissolution of low-k dielectric films, and methods of use Jul. 15, 2008
7390429 Method and composition for electrochemical mechanical polishing processing Jun. 24, 2008
7384534 Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP Jun. 10, 2008
7368064 Cleaning solution and manufacturing method for semiconductor device May. 6, 2008
7347951 Method of manufacturing electronic device Mar. 25, 2008
7332436 Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition Feb. 19, 2008
7316603 Compositions and methods for tantalum CMP Jan. 8, 2008
7314578 Slurry compositions and CMP methods using the same Jan. 1, 2008
7311855 Polishing slurry for chemical mechanical polishing and method for polishing substrate Dec. 25, 2007
7311856 Polymeric inhibitors for enhanced planarization Dec. 25, 2007
7311857 Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device Dec. 25, 2007
7306747 Use of fluorinated additives in the etching or polishing of integrated circuits Dec. 11, 2007
7300601 Passivative chemical mechanical polishing composition for copper film planarization Nov. 27, 2007
7300602 Selective barrier metal polishing solution Nov. 27, 2007
7297633 Compositions for chemical mechanical polishing silica and silicon nitride having improved endpoint detection Nov. 20, 2007
7294044 Slurry composition and method for polishing organic polymer-based ophthalmic substrates Nov. 13, 2007
7288212 Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition Oct. 30, 2007
7279119 Silica and silica-based slurry Oct. 9, 2007
7276180 Chemical mechanical polishing composition and process Oct. 2, 2007
7273566 Gas compositions Sep. 25, 2007
7262409 Chemical etch solution and technique for imaging a device's shallow junction profile Aug. 28, 2007
7255810 Polishing system comprising a highly branched polymer Aug. 14, 2007
7255809 Polishing slurry for texturing Aug. 14, 2007
7253111 Barrier polishing solution Aug. 7, 2007
7252782 Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Aug. 7, 2007
7241920 Filterable surfactant composition Jul. 10, 2007
7235188 Aqueous phosphoric acid compositions for cleaning semiconductor devices Jun. 26, 2007
7232528 Surface treatment agent for copper and copper alloy Jun. 19, 2007
7232529 Polishing compound for chemimechanical polishing and polishing method Jun. 19, 2007
7229929 Multi-layer gate stack Jun. 12, 2007

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