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Class Information
Number: 250/559.3
Name: Radiant energy > Photocells; circuits and apparatus > With circuit for evaluating a web, strand, strip, or sheet > Measuring position > With alignment detection
Description: Subject matter wherein the position detected is indicative of the alignment of two or more objects.










Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8687200 Method and device for measuring motion error of linear stage Apr. 1, 2014
8648320 Photoelectric sensor and photoelectric sensor system for comparing received light levels to detect objects Feb. 11, 2014
8559001 Inspection guided overlay metrology Oct. 15, 2013
8514382 Optical device and method for measuring the rotation of an object Aug. 20, 2013
8345242 Optical system for use in stage control Jan. 1, 2013
8321167 Surveying instrument and surveying compensation method Nov. 27, 2012
8294130 Methods and systems for optimizing the alignment of optical packages Oct. 23, 2012
8203131 Limiting plate shifting within a plate pallet Jun. 19, 2012
8193517 Fluoroscopy system, fluoroscopy apparatus, and fluoroscopy method Jun. 5, 2012
8178829 Wafer prescence detector with end effectors having optical couplers and fibers May. 15, 2012
8148704 Printing plate registration using a camera Apr. 3, 2012
8125651 Substrate detection device and substrate conveyance apparatus Feb. 28, 2012
8098412 Method for detecting the center of wafer and storage medium storing a program for executing the method Jan. 17, 2012
8099190 Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured Jan. 17, 2012
8031968 Image processing apparatus and image processing program Oct. 4, 2011
8028427 Apparatus and method for positioning a workpiece Oct. 4, 2011
8010307 In-line overlay measurement using charged particle beam system Aug. 30, 2011
7999243 Apparatus and method for determining a dimensional characteristic of an installed weld fastener Aug. 16, 2011
7989788 Determining position of a media page using a slot in the imaging drum Aug. 2, 2011
7945087 Alignment of printed circuit board targets May. 17, 2011
7902494 System for detecting motion of a body Mar. 8, 2011
7888664 Plate pallet alignment system Feb. 15, 2011
7884935 Pattern transfer apparatus, imprint apparatus, and pattern transfer method Feb. 8, 2011
7880155 Substrate alignment apparatus comprising a controller to measure alignment during transport Feb. 1, 2011
7873407 Systems and methods for in-vivo optical imaging and measurement Jan. 18, 2011
7855377 Alignment structures for an optical assembly Dec. 21, 2010
7854199 Printing plate registration using a camera Dec. 21, 2010
7840367 Multi-modality inspection system Nov. 23, 2010
7838858 Evaluation system and method of a search operation that detects a detection subject on an object Nov. 23, 2010
7777209 Product inspection system and a method for implementing same Aug. 17, 2010
7777210 Laser irradiation method in which a distance between an irradiation object and an optical system is controlled by an autofocusing mechanism and method for manufacturing semiconductor device us Aug. 17, 2010
7767982 Optical auto focusing system and method for electron beam inspection tool Aug. 3, 2010
7767956 Methods and systems for lithography process control Aug. 3, 2010
7760359 Beam detector distance measurement Jul. 20, 2010
7723710 System and method including a prealigner May. 25, 2010
7719732 Light sensing element having two functions May. 18, 2010
7717661 Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer May. 18, 2010
7711441 Aiming feedback control for multiple energy beams May. 4, 2010
7692144 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Apr. 6, 2010
7675051 Sheet detector mechanism including sheet detector further including photoreceptors, and image forming apparatus including the same Mar. 9, 2010
7633075 Through hole formation state detecting device and electronic timepiece using the detecting device Dec. 15, 2009
7633041 Apparatus for determining optimum position of focus of an imaging system Dec. 15, 2009
7570801 Device suitable for placing components on a substrate Aug. 4, 2009
7564557 Apparatus and methods for detecting overlay errors using scatterometry Jul. 21, 2009
7531821 Imprint apparatus and imprint method including dual movable image pick-up device May. 12, 2009
7504647 Method and apparatus for inspecting a sample having a controller for determining an estimated height of the detector from the sample Mar. 17, 2009
7485887 Passive alignment of photodiode active area in three axes using microscopic focus Feb. 3, 2009
7462814 Methods and systems for lithography process control Dec. 9, 2008
7456379 Printing plate registration and optical alignment device including locating at least a part of a reference edge in at least one digital camera image Nov. 25, 2008
7449690 Inspection method and inspection apparatus using charged particle beam Nov. 11, 2008

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