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Class Information
Number: 250/548
Name: Radiant energy > Photocells; circuits and apparatus > Photocell controls its own optical systems > Controlling web, strand, strip, or sheet
Description: Subject matter wherein the photocell detects a material having a cross-sectional dimension which is small compared to length and produces an electrical output which through additional structure controls the position, size or speed of the material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7102730 |
Exposure device |
Sep. 5, 2006 |
| 7095480 |
Cooling apparatus |
Aug. 22, 2006 |
| 7092068 |
Reticle, exposure monitoring method, exposure method and manufacturing method for semiconductor device |
Aug. 15, 2006 |
| 7081944 |
Lithographic projection apparatus and device manufacturing method utilizing two arrays of focusing elements |
Jul. 25, 2006 |
| 7079222 |
Exposure apparatus |
Jul. 18, 2006 |
| 7075651 |
Image forming characteristics measuring method, image forming characteristics adjusting method, exposure method and apparatus, program and storage medium, and device manufacturing method |
Jul. 11, 2006 |
| 7072024 |
Lithographic projection method and apparatus |
Jul. 4, 2006 |
| 7069104 |
Management system, management apparatus, management method, and device manufacturing method |
Jun. 27, 2006 |
| 7057707 |
Method and device for adjusting an alignment microscope by means of a reflective alignment mask |
Jun. 6, 2006 |
| 7053390 |
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus |
May. 30, 2006 |
| 7050149 |
Exposure apparatus and exposure method |
May. 23, 2006 |
| 7049618 |
Virtual gauging method for use in lithographic processing |
May. 23, 2006 |
| 7049577 |
Semiconductor handler interface auto alignment |
May. 23, 2006 |
| 7049617 |
Thickness measurement in an exposure device for exposure of a film with a hologram mask, exposure method and semiconductor device manufacturing method |
May. 23, 2006 |
| 7046413 |
System and method for dose control in a lithographic system |
May. 16, 2006 |
| 7041998 |
Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering |
May. 9, 2006 |
| 7041996 |
Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby |
May. 9, 2006 |
| 7034917 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Apr. 25, 2006 |
| 7027127 |
Exposure apparatus, device manufacturing method, stage apparatus, and alignment method |
Apr. 11, 2006 |
| 7022969 |
LED measuring device |
Apr. 4, 2006 |
| 7023523 |
Exposure system and exposure method |
Apr. 4, 2006 |
| 7019836 |
Position detection method and apparatus, and exposure method and apparatus |
Mar. 28, 2006 |
| 7015491 |
Lithographic apparatus, device manufacturing method and device manufactured thereby, control system |
Mar. 21, 2006 |
| 7015456 |
Exposure apparatus that acquires information regarding a polarization state of light from a light source |
Mar. 21, 2006 |
| RE39024 |
Exposure apparatus having catadioptric projection optical system |
Mar. 21, 2006 |
| 7012270 |
Photolithography system having multiple adjustable light sources |
Mar. 14, 2006 |
| 7006226 |
Alignment method, alignment apparatus, exposure apparatus using the same, and device manufactured by using the same |
Feb. 28, 2006 |
| 7002665 |
Lithography simulation method, mask pattern correction method, and substrate topography correction method |
Feb. 21, 2006 |
| 6998629 |
Reticle position detection system |
Feb. 14, 2006 |
| 6992766 |
Position detection apparatus and method |
Jan. 31, 2006 |
| 6992780 |
Position detecting method and apparatus, exposure apparatus and device manufacturing method |
Jan. 31, 2006 |
| 6989920 |
System and method for dose control in a lithographic system |
Jan. 24, 2006 |
| 6987555 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan. 17, 2006 |
| 6987556 |
Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby |
Jan. 17, 2006 |
| 6984838 |
Surface position detection apparatus and method, and exposure apparatus and device manufacturing method using the exposure apparatus |
Jan. 10, 2006 |
| 6984836 |
System and method for monitoring the topography of a wafer surface during lithographic processing |
Jan. 10, 2006 |
| 6979833 |
System for monitoring the topography of a wafer surface during lithographic processing |
Dec. 27, 2005 |
| 6974962 |
Lateral shift measurement using an optical technique |
Dec. 13, 2005 |
| 6974963 |
Substrate inspecting device, coating/developing device and substrate inspecting method |
Dec. 13, 2005 |
| 6969837 |
System and method for lithography process monitoring and control |
Nov. 29, 2005 |
| 6970004 |
Apparatus for inspecting defects of devices and method of inspecting defects |
Nov. 29, 2005 |
| 6965114 |
Apparatus and methods for mask/substrate alignment in charged-particle-beam pattern-transfer |
Nov. 15, 2005 |
| 6956640 |
Light energy detecting apparatus for exposure condition control in semiconductor manufacturing apparatus |
Oct. 18, 2005 |
| 6954275 |
Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography |
Oct. 11, 2005 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Oct. 4, 2005 |
| 6930302 |
Method and apparatus for scanning an optical beam using an optical conduit |
Aug. 16, 2005 |
| 6906785 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jun. 14, 2005 |
| 6903346 |
Stage assembly having a follower assembly |
Jun. 7, 2005 |
| 6900887 |
Method and system for measuring stray light |
May. 31, 2005 |
| 6897464 |
Active optical component alignment system and method |
May. 24, 2005 |
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