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Class Information
Number: 250/548
Name: Radiant energy > Photocells; circuits and apparatus > Photocell controls its own optical systems > Controlling web, strand, strip, or sheet
Description: Subject matter wherein the photocell detects a material having a cross-sectional dimension which is small compared to length and produces an electrical output which through additional structure controls the position, size or speed of the material.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7382446 |
Aberration measuring method |
Jun. 3, 2008 |
| 7379159 |
Lithographic apparatus and device manufacturing method |
May. 27, 2008 |
| 7369214 |
Lithographic apparatus and device manufacturing method utilizing a metrology system with sensors |
May. 6, 2008 |
| 7355157 |
Laser beam processing machine employing two beam spots having arcuate portions for forming a substantially rectangular combined spot |
Apr. 8, 2008 |
| 7332732 |
Alignment systems and methods for lithographic systems |
Feb. 19, 2008 |
| 7332733 |
System and method to correct for field curvature of multi lens array |
Feb. 19, 2008 |
| 7329888 |
Alignment systems and methods for lithographic systems |
Feb. 12, 2008 |
| 7326945 |
Dose transfer standard detector for a lithography tool |
Feb. 5, 2008 |
| 7317197 |
Method of detecting tightly adhering state, tight adhesion control method and method of and apparatus for near field exposure |
Jan. 8, 2008 |
| 7315038 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target |
Jan. 1, 2008 |
| 7307707 |
Method and system for measuring the imaging quality of an optical imaging system |
Dec. 11, 2007 |
| 7307262 |
Lithographic apparatus and device manufacturing method |
Dec. 11, 2007 |
| 7301137 |
Cantilever light detectors having a mechanical cantilever to mechanically respond to illuminated light |
Nov. 27, 2007 |
| 7301163 |
Lateral shift measurement using an optical technique |
Nov. 27, 2007 |
| 7297972 |
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target |
Nov. 20, 2007 |
| 7297969 |
Web marking and inspection system |
Nov. 20, 2007 |
| 7297911 |
Lithographic apparatus, illumination system, illumination controller and control method |
Nov. 20, 2007 |
| 7298482 |
Exposure apparatus and aligning method |
Nov. 20, 2007 |
| 7288779 |
Method for position determination, method for overlay optimization, and lithographic projection apparatus |
Oct. 30, 2007 |
| 7276717 |
Measuring apparatus, exposure apparatus and device manufacturing method |
Oct. 2, 2007 |
| 7274029 |
Lithographic apparatus and device manufacturing method |
Sep. 25, 2007 |
| 7268360 |
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion |
Sep. 11, 2007 |
| 7253891 |
Method and apparatus for simultaneous 2-D and topographical inspection |
Aug. 7, 2007 |
| 7247843 |
Long-range gap detection with interferometric sensitivity using spatial phase of interference patterns |
Jul. 24, 2007 |
| 7230706 |
Position detection method and apparatus, and exposure method and apparatus |
Jun. 12, 2007 |
| 7230675 |
Lithographic apparatus, device manufacturing method and device manufactured therewith |
Jun. 12, 2007 |
| 7211815 |
Method of achieving CD linearity control for full-chip CPL manufacturing |
May. 1, 2007 |
| 7205531 |
Sample information measuring method and scanning confocal microscope |
Apr. 17, 2007 |
| 7193231 |
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby |
Mar. 20, 2007 |
| 7193232 |
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid |
Mar. 20, 2007 |
| 7190456 |
Alignment method, alignment apparatus, exposure apparatus using the same, and device manufactured by using the same |
Mar. 13, 2007 |
| 7183566 |
Lithographic apparatus for manufacturing a device |
Feb. 27, 2007 |
| 7184181 |
Scanning module capable of finely tuning the optical length |
Feb. 27, 2007 |
| 7173716 |
Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices |
Feb. 6, 2007 |
| 7148949 |
Lithographic apparatus and device manufacturing method |
Dec. 12, 2006 |
| 7148973 |
Position detecting method and apparatus, exposure apparatus and device manufacturing method |
Dec. 12, 2006 |
| 7141813 |
Surface position detection apparatus and method, and exposure apparatus and device manufacturing method using the exposure apparatus |
Nov. 28, 2006 |
| 7136165 |
Substrate alignment apparatus and method, and exposure apparatus |
Nov. 14, 2006 |
| 7127810 |
Method of manufacturing electronic device including aligning first substrate, second substrate and mask, and transferring object from first substrate to second substrate, including irradiating |
Oct. 31, 2006 |
| 7130018 |
Catoptric projection optical system, exposure apparatus and device fabrication method |
Oct. 31, 2006 |
| 7126666 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Oct. 24, 2006 |
| 7122817 |
Lateral shift measurement using an optical technique |
Oct. 17, 2006 |
| 7113257 |
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus |
Sep. 26, 2006 |
| 7113256 |
Lithographic apparatus and device manufacturing method with feed-forward focus control |
Sep. 26, 2006 |
| 7112813 |
Device inspection method and apparatus using an asymmetric marker |
Sep. 26, 2006 |
| 7110084 |
Illumination optical system and exposure apparatus |
Sep. 19, 2006 |
| 7109508 |
Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus |
Sep. 19, 2006 |
| 7102730 |
Exposure device |
Sep. 5, 2006 |
| 7095480 |
Cooling apparatus |
Aug. 22, 2006 |
| 7092068 |
Reticle, exposure monitoring method, exposure method and manufacturing method for semiconductor device |
Aug. 15, 2006 |
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