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Class Information
Number: 250/504R
Name: Radiant energy > Radiant energy generation and sources > With radiation modifying member > Ultraviolet or infrared source
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459707 |
Exposure apparatus, light source apparatus and device fabrication |
Dec. 2, 2008 |
| 7459708 |
Extreme UV radiation source device and method for eliminating debris which forms within the device |
Dec. 2, 2008 |
| 7460646 |
Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma |
Dec. 2, 2008 |
| 7459694 |
Mobile germicidal system |
Dec. 2, 2008 |
| 7456417 |
Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device |
Nov. 25, 2008 |
| 7456408 |
Illumination system particularly for microlithography |
Nov. 25, 2008 |
| 7456416 |
Plug-in radiation source module for a weathering apparatus |
Nov. 25, 2008 |
| 7453077 |
EUV light source |
Nov. 18, 2008 |
| 7453071 |
Contamination barrier and lithographic apparatus comprising same |
Nov. 18, 2008 |
| 7449703 |
Method and apparatus for EUV plasma source target delivery target material handling |
Nov. 11, 2008 |
| 7449704 |
EUV light source |
Nov. 11, 2008 |
| 7446329 |
Erosion resistance of EUV source electrodes |
Nov. 4, 2008 |
| 7442948 |
Contamination barrier and lithographic apparatus |
Oct. 28, 2008 |
| 7443948 |
Illumination system particularly for microlithography |
Oct. 28, 2008 |
| 7439530 |
LPP EUV light source drive laser system |
Oct. 21, 2008 |
| 7435982 |
Laser-driven light source |
Oct. 14, 2008 |
| 7432517 |
Pulse modifier, lithographic apparatus, and device manufacturing method |
Oct. 7, 2008 |
| 7433447 |
X-ray generator and exposure apparatus |
Oct. 7, 2008 |
| 7429546 |
Silica glass containing TiO.sub.2 and process for its production |
Sep. 30, 2008 |
| 7427766 |
Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation |
Sep. 23, 2008 |
| 7425718 |
Lighting system, point source lights therefor and methods of making the same |
Sep. 16, 2008 |
| 7423275 |
Erosion mitigation for collector optics using electric and magnetic fields |
Sep. 9, 2008 |
| 7420191 |
Discharge radiation source, in particular UV radiation |
Sep. 2, 2008 |
| 7414253 |
EUV radiation source with high radiation output based on a gas discharge |
Aug. 19, 2008 |
| 7414251 |
Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system |
Aug. 19, 2008 |
| 7411202 |
Irradiating apparatus |
Aug. 12, 2008 |
| 7411203 |
EUV light source |
Aug. 12, 2008 |
| 7408179 |
Transition radiation apparatus and method therefor |
Aug. 5, 2008 |
| 7405416 |
Method and apparatus for EUV plasma source target delivery |
Jul. 29, 2008 |
| 7405417 |
Lithographic apparatus having a monitoring device for detecting contamination |
Jul. 29, 2008 |
| 7402818 |
Tactical integrated illumination countermeasure system |
Jul. 22, 2008 |
| 7402825 |
LPP EUV drive laser input system |
Jul. 22, 2008 |
| 7399967 |
Rapidly flashing thermal image beacon |
Jul. 15, 2008 |
| 7399979 |
Exposure method, exposure apparatus, and method for producing device |
Jul. 15, 2008 |
| 7399981 |
Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography |
Jul. 15, 2008 |
| 7399982 |
UV curing system and process with increased light intensity |
Jul. 15, 2008 |
| 7397056 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Jul. 8, 2008 |
| 7397045 |
Exposure apparatus and method thereof |
Jul. 8, 2008 |
| 7397055 |
Smith-Purcell radiation source using negative-index metamaterial (NIM) |
Jul. 8, 2008 |
| 7394083 |
Systems and methods for EUV light source metrology |
Jul. 1, 2008 |
| 7391851 |
EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
Jun. 24, 2008 |
| 7391041 |
Germicidal UV reactor and UV lamp |
Jun. 24, 2008 |
| 7391040 |
Thermal image beacons |
Jun. 24, 2008 |
| 7388219 |
Fluorescent lamp with optimized UVA/UVB transmission |
Jun. 17, 2008 |
| 7388220 |
EUV light source |
Jun. 17, 2008 |
| 7385211 |
Method of generating extreme ultraviolet radiation |
Jun. 10, 2008 |
| 7385212 |
Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus |
Jun. 10, 2008 |
| 7381976 |
Monochromatic fluid treatment systems |
Jun. 3, 2008 |
| 7378673 |
Source material dispenser for EUV light source |
May. 27, 2008 |
| 7372059 |
Plasma-based EUV light source |
May. 13, 2008 |
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