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Class Information
Number: 250/503.1
Name: Radiant energy > Radiant energy generation and sources > With radiation modifying member
Description: Subject matter which includes in addition to a radiation source, means to alter a radiation beams as to its cross section, intensity, direction or spectral or energy content.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7453077 |
EUV light source |
Nov. 18, 2008 |
| 7443577 |
Reflecting filtering cover |
Oct. 28, 2008 |
| 7439530 |
LPP EUV light source drive laser system |
Oct. 21, 2008 |
| 7432517 |
Pulse modifier, lithographic apparatus, and device manufacturing method |
Oct. 7, 2008 |
| 7427766 |
Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation |
Sep. 23, 2008 |
| 7411202 |
Irradiating apparatus |
Aug. 12, 2008 |
| 7402825 |
LPP EUV drive laser input system |
Jul. 22, 2008 |
| 7399981 |
Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography |
Jul. 15, 2008 |
| 7397056 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Jul. 8, 2008 |
| 7391040 |
Thermal image beacons |
Jun. 24, 2008 |
| 7378673 |
Source material dispenser for EUV light source |
May. 27, 2008 |
| 7378672 |
Particle beam therapeutic apparatus |
May. 27, 2008 |
| 7378669 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
May. 27, 2008 |
| 7372056 |
LPP EUV plasma source material target delivery system |
May. 13, 2008 |
| 7368716 |
Infrared imaging system and lens module for use with the same |
May. 6, 2008 |
| 7365351 |
Systems for protecting internal components of a EUV light source from plasma-generated debris |
Apr. 29, 2008 |
| 7355192 |
Adjustable suspension assembly for a collimating lattice |
Apr. 8, 2008 |
| 7355189 |
Charged particle therapy system, range modulation wheel device, and method of installing range modulation wheel device |
Apr. 8, 2008 |
| 7355191 |
Systems and methods for cleaning a chamber window of an EUV light source |
Apr. 8, 2008 |
| 7282706 |
Advanced optics for rapidly patterned laser profiles in analytical spectrometry |
Oct. 16, 2007 |
| 7250620 |
EUV lithography filter |
Jul. 31, 2007 |
| 7247870 |
Systems for protecting internal components of an EUV light source from plasma-generated debris |
Jul. 24, 2007 |
| 7247869 |
Particle therapy system |
Jul. 24, 2007 |
| 7230258 |
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source |
Jun. 12, 2007 |
| 7169481 |
Radiation image conversion panel and manufacturing method therefor |
Jan. 30, 2007 |
| 7148497 |
Variable wavelength ultraviolet lamp |
Dec. 12, 2006 |
| 7126110 |
Optronic passive surveillance device |
Oct. 24, 2006 |
| 7122812 |
Leak detection lamp |
Oct. 17, 2006 |
| 7109503 |
Systems for protecting internal components of an EUV light source from plasma-generated debris |
Sep. 19, 2006 |
| 7056389 |
Method and device for thermal treatment of substrates |
Jun. 6, 2006 |
| 7022382 |
UV-cure of coatings for an optical fiber with a laser |
Apr. 4, 2006 |
| 7002169 |
Method for generating photons by sonoluminescence |
Feb. 21, 2006 |
| 6984835 |
Irradiation apparatus and irradiation method |
Jan. 10, 2006 |
| 6927407 |
Radiation shielding arrangement |
Aug. 9, 2005 |
| 6891178 |
Method for checking positional accuracy of the leaves of a multileaf collimator |
May. 10, 2005 |
| 6867929 |
Light source device |
Mar. 15, 2005 |
| 6834984 |
Curved reflective surface for redirecting light to bypass a light source coupled with a hot mirror |
Dec. 28, 2004 |
| 6835679 |
Lossy fiber UV curing method and apparatus |
Dec. 28, 2004 |
| 6815681 |
Electron beam lithography apparatus using a patterned emitter |
Nov. 9, 2004 |
| 6744060 |
Pulse power system for extreme ultraviolet and x-ray sources |
Jun. 1, 2004 |
| 6740893 |
Optical instrument, and device manufacturing method |
May. 25, 2004 |
| 6717161 |
Apparatus and method providing substantially uniform irradiation of surfaces of elongated objects with a high level of irradiance |
Apr. 6, 2004 |
| 6713774 |
Structure and method for controlling the thermal emissivity of a radiating object |
Mar. 30, 2004 |
| 6674829 |
Neutron radiation installation for treatment of cancer |
Jan. 6, 2004 |
| 6667487 |
Radio frequency trap for containment of plasmas in antimatter propulsion systems using rotating wall electric fields |
Dec. 23, 2003 |
| 6639235 |
Apparatus for holding and transporting multiple radiation modulating devices and method therefor |
Oct. 28, 2003 |
| 6614037 |
Electron beam irradiating apparatus |
Sep. 2, 2003 |
| 6614135 |
Apparatus for generating electromagnetic radiation directed at certain targets |
Sep. 2, 2003 |
| 6563126 |
Ultraviolet light permeable filter for flaw detection light and method for detection of flaws |
May. 13, 2003 |
| 6552864 |
Beam generation method and system |
Apr. 22, 2003 |
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