| |
 |
|
Class Information
Number: 250/493.1
Name: Radiant energy > Radiant energy generation and sources
Description: Subject matter which includes radiation emitters of this class type and not provided for elsewhere.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459707 |
Exposure apparatus, light source apparatus and device fabrication |
Dec. 2, 2008 |
| 7459858 |
Hall thruster with shared magnetic structure |
Dec. 2, 2008 |
| 7460226 |
Spectrophotometer |
Dec. 2, 2008 |
| 7456416 |
Plug-in radiation source module for a weathering apparatus |
Nov. 25, 2008 |
| 7456417 |
Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device |
Nov. 25, 2008 |
| 7453076 |
Bi-polar treatment facility for treating target cells with both positive and negative ions |
Nov. 18, 2008 |
| 7453075 |
Charged particle beam exposure system |
Nov. 18, 2008 |
| 7453077 |
EUV light source |
Nov. 18, 2008 |
| 7446329 |
Erosion resistance of EUV source electrodes |
Nov. 4, 2008 |
| 7439529 |
High current density ion source |
Oct. 21, 2008 |
| 7439530 |
LPP EUV light source drive laser system |
Oct. 21, 2008 |
| 7435982 |
Laser-driven light source |
Oct. 14, 2008 |
| 7435980 |
Electron beam irradiation device |
Oct. 14, 2008 |
| 7435981 |
Electron beam sterilizer |
Oct. 14, 2008 |
| 7432517 |
Pulse modifier, lithographic apparatus, and device manufacturing method |
Oct. 7, 2008 |
| 7427766 |
Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation |
Sep. 23, 2008 |
| 7420191 |
Discharge radiation source, in particular UV radiation |
Sep. 2, 2008 |
| 7411202 |
Irradiating apparatus |
Aug. 12, 2008 |
| 7407617 |
Free radical polymerization method having reduced premature termination, apparatus for performing the method, and product formed thereby |
Aug. 5, 2008 |
| 7405416 |
Method and apparatus for EUV plasma source target delivery |
Jul. 29, 2008 |
| 7402825 |
LPP EUV drive laser input system |
Jul. 22, 2008 |
| 7397055 |
Smith-Purcell radiation source using negative-index metamaterial (NIM) |
Jul. 8, 2008 |
| 7397056 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Jul. 8, 2008 |
| 7397428 |
Coherent THz emitter with DC power reducing resistor |
Jul. 8, 2008 |
| 7394083 |
Systems and methods for EUV light source metrology |
Jul. 1, 2008 |
| 7391040 |
Thermal image beacons |
Jun. 24, 2008 |
| 7388220 |
EUV light source |
Jun. 17, 2008 |
| 7385211 |
Method of generating extreme ultraviolet radiation |
Jun. 10, 2008 |
| 7378672 |
Particle beam therapeutic apparatus |
May. 27, 2008 |
| 7378673 |
Source material dispenser for EUV light source |
May. 27, 2008 |
| 7372059 |
Plasma-based EUV light source |
May. 13, 2008 |
| 7368730 |
Weathering apparatus with UV radiation sources and radiation sensors containing a double-calibrated UV sensor |
May. 6, 2008 |
| 7368733 |
Contamination barrier and lithographic apparatus comprising same |
May. 6, 2008 |
| 7368741 |
Extreme ultraviolet light source |
May. 6, 2008 |
| 7368742 |
Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation |
May. 6, 2008 |
| 7365349 |
EUV light source collector lifetime improvements |
Apr. 29, 2008 |
| 7365348 |
Adjusting device of an apparatus for generating a beam of charged particles |
Apr. 29, 2008 |
| 7361915 |
Beam current stabilization utilizing gas feed control loop |
Apr. 22, 2008 |
| 7361916 |
Coupled nano-resonating energy emitting structures |
Apr. 22, 2008 |
| 7361918 |
High repetition rate laser produced plasma EUV light source |
Apr. 22, 2008 |
| 7355189 |
Charged particle therapy system, range modulation wheel device, and method of installing range modulation wheel device |
Apr. 8, 2008 |
| 7354504 |
Dielectric profile controlled microwave sterilization system |
Apr. 8, 2008 |
| 7351374 |
Surface plasmon enhanced illumination apparatus having non-periodic resonance configurations |
Apr. 1, 2008 |
| 7348582 |
Light source apparatus and exposure apparatus having the same |
Mar. 25, 2008 |
| 7335900 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Feb. 26, 2008 |
| 7329886 |
EUV illumination system having a plurality of light sources for illuminating an optical element |
Feb. 12, 2008 |
| 7323703 |
EUV light source |
Jan. 29, 2008 |
| 7323694 |
Fluid treatment system and radiation source module for use therein |
Jan. 29, 2008 |
| 7318907 |
Surface plasmon enhanced illumination system |
Jan. 15, 2008 |
| 7317196 |
LPP EUV light source |
Jan. 8, 2008 |
|
|
|
