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Class Information
Number: 250/492.3
Name: Radiant energy > Irradiation of objects or material > Ion or electron beam irradiation
Description: Subject matter wherein the object or material is irradiated by a stream of charged particles.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459706 |
Installation and method for sterilising objects by low-energy electron bombardment |
Dec. 2, 2008 |
| 7459705 |
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure de |
Dec. 2, 2008 |
| 7459704 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms |
Dec. 2, 2008 |
| 7459702 |
Apparatus and method for polishing gemstones and the like |
Dec. 2, 2008 |
| 7459683 |
Charged particle beam device with DF-STEM image valuation method |
Dec. 2, 2008 |
| 7456415 |
Charged particle beam extraction system and method |
Nov. 25, 2008 |
| 7453076 |
Bi-polar treatment facility for treating target cells with both positive and negative ions |
Nov. 18, 2008 |
| 7453075 |
Charged particle beam exposure system |
Nov. 18, 2008 |
| 7453074 |
Ion implanter with ionization chamber electrode design |
Nov. 18, 2008 |
| 7453063 |
Calibration substrate and method for calibrating a lithographic apparatus |
Nov. 18, 2008 |
| 7449702 |
Particle-beam exposure apparatus and particle-beam therapeutic apparatus |
Nov. 11, 2008 |
| 7449701 |
Particle beam irradiation equipment and particle beam irradiation method |
Nov. 11, 2008 |
| 7449700 |
Electron beam exposure apparatus, electron beam exposure method and method of manufacturing semiconductor device |
Nov. 11, 2008 |
| 7449699 |
Method and apparatus for creating a topography at a surface |
Nov. 11, 2008 |
| 7449690 |
Inspection method and inspection apparatus using charged particle beam |
Nov. 11, 2008 |
| 7446328 |
Patient alignment system with external measurement and object coordination for radiation therapy system |
Nov. 4, 2008 |
| 7446327 |
Apparatus for amplifying a stream of charged particles |
Nov. 4, 2008 |
| 7444199 |
Method for preparing mask and wafer data files |
Oct. 28, 2008 |
| 7442946 |
Nonuniform ion implantation apparatus and method using a wide beam |
Oct. 28, 2008 |
| 7442930 |
Method for correcting distortions in electron backscatter diffraction patterns |
Oct. 28, 2008 |
| 7439528 |
Particle therapy system and method |
Oct. 21, 2008 |
| 7439525 |
Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particl |
Oct. 21, 2008 |
| 7439502 |
Electron beam apparatus and device production method using the electron beam apparatus |
Oct. 21, 2008 |
| 7438963 |
Method for producing a laser-printable film |
Oct. 21, 2008 |
| 7435981 |
Electron beam sterilizer |
Oct. 14, 2008 |
| 7435980 |
Electron beam irradiation device |
Oct. 14, 2008 |
| 7435979 |
Optical device and method of manufacture |
Oct. 14, 2008 |
| 7435978 |
System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor devic |
Oct. 14, 2008 |
| 7435977 |
Ion beam angle measurement systems and methods for ion implantation systems |
Oct. 14, 2008 |
| 7435973 |
Material processing system and method |
Oct. 14, 2008 |
| 7435972 |
Focused ion beam apparatus and liquid metal ion source |
Oct. 14, 2008 |
| 7435960 |
Charged particle beam apparatus |
Oct. 14, 2008 |
| 7432516 |
Rapid cycling medical synchrotron and beam delivery system |
Oct. 7, 2008 |
| 7429743 |
Irradiation system ion beam and method to enhance accuracy of irradiation |
Sep. 30, 2008 |
| 7427753 |
Method of cross-section milling with focused ion beam (FIB) device |
Sep. 23, 2008 |
| 7425717 |
Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
Sep. 16, 2008 |
| 7425716 |
Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam |
Sep. 16, 2008 |
| 7425715 |
Digital parallel electron beam lithography stamp |
Sep. 16, 2008 |
| 7425714 |
Measurement method of electron beam current, electron beam writing system and electron beam detector |
Sep. 16, 2008 |
| 7425713 |
Synchronous raster scanning lithographic system |
Sep. 16, 2008 |
| 7423278 |
Ion acceleration system for hadrontherapy |
Sep. 9, 2008 |
| 7423276 |
Irradiation system with ion beam/charged particle beam |
Sep. 9, 2008 |
| 7423274 |
Electron beam writing system and electron beam writing method |
Sep. 9, 2008 |
| 7423269 |
Automated feature analysis with off-axis tilting |
Sep. 9, 2008 |
| 7423268 |
Projection imaging type electron microscope |
Sep. 9, 2008 |
| 7423267 |
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
Sep. 9, 2008 |
| 7423266 |
Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus |
Sep. 9, 2008 |
| 7421973 |
System and method for performing SIMOX implants using an ion shower |
Sep. 9, 2008 |
| 7420189 |
Ultra precise polishing method and ultra precise polishing apparatus |
Sep. 2, 2008 |
| 7420181 |
Liquid metal ion gun |
Sep. 2, 2008 |
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