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Class Information
Number: 250/492.3
Name: Radiant energy > Irradiation of objects or material > Ion or electron beam irradiation
Description: Subject matter wherein the object or material is irradiated by a stream of charged particles.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619751 |
High-accuracy pattern shape evaluating method and apparatus |
Nov. 17, 2009 |
| 7619230 |
Charged particle beam writing method and apparatus and readable storage medium |
Nov. 17, 2009 |
| 7619229 |
Technique for matching performance of ion implantation devices using an in-situ mask |
Nov. 17, 2009 |
| 7615765 |
Charged particle beam apparatus |
Nov. 10, 2009 |
| 7615764 |
Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus |
Nov. 10, 2009 |
| 7615763 |
System for magnetic scanning and correction of an ion beam |
Nov. 10, 2009 |
| 7612351 |
Ion implanter with function of compensating wafer cut angle and ion implantation method using the same |
Nov. 3, 2009 |
| 7612337 |
Focused ion beam system and a method of sample preparation and observation |
Nov. 3, 2009 |
| 7608843 |
Method and apparatus for scanning a workpiece through an ion beam |
Oct. 27, 2009 |
| 7608821 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method |
Oct. 27, 2009 |
| 7608312 |
Printed antifog film |
Oct. 27, 2009 |
| 7605383 |
Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium |
Oct. 20, 2009 |
| 7605382 |
Ion implanter |
Oct. 20, 2009 |
| 7601976 |
Dual beam system |
Oct. 13, 2009 |
| 7601968 |
Charged particle beam writing method and apparatus |
Oct. 13, 2009 |
| 7598507 |
Adjustable lithography blocking device and method |
Oct. 6, 2009 |
| 7598505 |
Multichannel ion gun |
Oct. 6, 2009 |
| 7595490 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device |
Sep. 29, 2009 |
| 7595482 |
Standard component for length measurement, method for producing the same, and electron beam metrology system using the same |
Sep. 29, 2009 |
| 7592613 |
Sensor and system for sensing an electron beam |
Sep. 22, 2009 |
| 7592612 |
Method and apparatus for surface potential reflection electron mask lithography |
Sep. 22, 2009 |
| 7590966 |
Data path for high performance pattern generator |
Sep. 15, 2009 |
| 7589334 |
Ion beam delivery equipment and an ion beam delivery method |
Sep. 15, 2009 |
| 7589333 |
Methods for rapidly switching off an ion beam |
Sep. 15, 2009 |
| 7588803 |
Multi step ebeam process for modifying dielectric materials |
Sep. 15, 2009 |
| 7586113 |
EUV illumination system |
Sep. 8, 2009 |
| 7586112 |
Particle therapy system |
Sep. 8, 2009 |
| 7586110 |
Techniques for detecting ion beam contamination in an ion implantation system and interlocking same |
Sep. 8, 2009 |
| 7586100 |
Closed loop control and process optimization in plasma doping processes using a time of flight ion detector |
Sep. 8, 2009 |
| 7586093 |
Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
Sep. 8, 2009 |
| 7582886 |
Gantry for medical particle therapy facility |
Sep. 1, 2009 |
| 7582885 |
Charged particle beam apparatus |
Sep. 1, 2009 |
| 7582884 |
Charged particle beam exposure method and charged particle beam exposure device |
Sep. 1, 2009 |
| 7582883 |
Method of scanning a substrate in an ion implanter |
Sep. 1, 2009 |
| 7579610 |
Expanding, monitoring, or adapting a particle energy distribution of a therapeutic particle beam installation |
Aug. 25, 2009 |
| 7579608 |
Particle-beam treatment system |
Aug. 25, 2009 |
| 7579607 |
Installation for sterilizing articles by electron bombardment |
Aug. 25, 2009 |
| 7579604 |
Beam stop and beam tuning methods |
Aug. 25, 2009 |
| 7579602 |
Ion implantation with a collimator magnet and a neutral filter magnet |
Aug. 25, 2009 |
| 7579590 |
Method of measuring thin layers using SIMS |
Aug. 25, 2009 |
| 7576342 |
Ion beam delivery equipment and ion beam delivery method |
Aug. 18, 2009 |
| 7576341 |
Lithography systems and methods for operating the same |
Aug. 18, 2009 |
| 7576337 |
Power supply for an ion implantation system |
Aug. 18, 2009 |
| 7573051 |
Ion beam guide tube |
Aug. 11, 2009 |
| 7569818 |
Method to reduce cross talk in a multi column e-beam test system |
Aug. 4, 2009 |
| 7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam |
Jul. 28, 2009 |
| 7566871 |
Method and apparatus for pattern inspection |
Jul. 28, 2009 |
| 7560717 |
Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
Jul. 14, 2009 |
| 7560715 |
System for the delivery of proton therapy |
Jul. 14, 2009 |
| 7560714 |
Sensor and system for sensing an electron beam |
Jul. 14, 2009 |
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