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Class Information
Number: 250/492.3
Name: Radiant energy > Irradiation of objects or material > Ion or electron beam irradiation
Description: Subject matter wherein the object or material is irradiated by a stream of charged particles.

Patents under this class:

Patent Number Title Of Patent Date Issued
8710469 Ion implantation method and ion implantation apparatus Apr. 29, 2014
8710465 Pattern data conversion for lithography system Apr. 29, 2014
8710464 Specimen preparation device, and control method in specimen preparation device Apr. 29, 2014
8710462 Charged particle cancer therapy beam path control method and apparatus Apr. 29, 2014
8710461 Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly Apr. 29, 2014
8709339 Apparatus and method for sterilizing vessel with electron beam Apr. 29, 2014
8704464 Charged particle trajectory control apparatus, charged particle accelerator, charged particle storage ring, and deflection electromagnet Apr. 22, 2014
8704197 Accelerator and method for irradiating a target volume Apr. 22, 2014
8704192 Drawing apparatus and method of manufacturing article Apr. 22, 2014
8692219 Method and apparatus for growing a III-nitride layer Apr. 8, 2014
8692218 Charged particle beam exposure apparatus Apr. 8, 2014
8692217 Multi-source plasma focused ion beam system Apr. 8, 2014
8692216 Ion implantation apparatus and control method thereof Apr. 8, 2014
8692215 Heated rotary seal and bearing for chilled ion implantation system Apr. 8, 2014
8691146 Electron beam sterilization method Apr. 8, 2014
8688197 Charged particle cancer therapy patient positioning method and apparatus Apr. 1, 2014
8686380 Charged particle beam apparatus Apr. 1, 2014
8686379 Method and apparatus for preparing serial planar cross sections Apr. 1, 2014
8686378 Charged particle beam drawing apparatus, and method of manufacturing article Apr. 1, 2014
8680491 Method of controlling ion implantation apparatus Mar. 25, 2014
8677511 Apparatus for charged particle lithography system Mar. 18, 2014
8674326 Driving type patient platform, control device for driving type patient platform, control program for driving type patient platform, and particle beam therapy system utilizing these items Mar. 18, 2014
8674320 Deconvolution of time-gated cathodoluminescence images Mar. 18, 2014
8674319 Beam monitor system and particle beam irradiation system Mar. 18, 2014
8674318 Particle beam irradiation apparatus and particle beam therapy system Mar. 18, 2014
8673450 Graphite member for beam-line internal member of ion implantation apparatus Mar. 18, 2014
8669541 Hadron treatment planning with adequate biological weighting Mar. 11, 2014
8669540 System and method for gas leak control in a substrate holder Mar. 11, 2014
8669538 Method of improving ion beam quality in an implant system Mar. 11, 2014
8669525 Sample inspection methods, systems and components Mar. 11, 2014
8669517 Mass analysis variable exit aperture Mar. 11, 2014
8664622 System and method of ion beam source for semiconductor ion implantation Mar. 4, 2014
8664620 Particle beam rotational irradiation apparatus Mar. 4, 2014
8664619 Hybrid electrostatic lens for improved beam transmission Mar. 4, 2014
8658994 Apparatus and method for controlled particle beam manufacturing Feb. 25, 2014
8658993 Self-powered lithography method and apparatus using radioactive thin films Feb. 25, 2014
8658991 Particle beam irradiation apparatus utilized in medical field Feb. 25, 2014
8658051 Lithography resolution improving method Feb. 25, 2014
8653807 Apparatus and method for measuring ion beam current Feb. 18, 2014
8653490 Ion implanter Feb. 18, 2014
8653489 Ion beam sample preparation apparatus and methods Feb. 18, 2014
8653488 Electron beam apparatus Feb. 18, 2014
8653486 Method and apparatus for improved uniformity control with dynamic beam shaping Feb. 18, 2014
8653474 Charged particle extraction device and method of design there for Feb. 18, 2014
8653473 Charged particle beam irradiation device Feb. 18, 2014
8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system Feb. 18, 2014
8648301 Particle beam system having a hollow light guide Feb. 11, 2014
8648300 Charged particle beam apparatus Feb. 11, 2014
8648299 Isotope ion microscope methods and systems Feb. 11, 2014
8647814 Method of making nanopatterns and nanostructures and nanopatterned functional oxide materials Feb. 11, 2014

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