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Class Information
Number: 250/492.24
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Photocathode projection
Description: Subject matter including using electrons emitted from photoemissive electrode irradiated by another source of electromagnetic radiation such as ultraviolet light.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7453074 |
Ion implanter with ionization chamber electrode design |
Nov. 18, 2008 |
| 7361916 |
Coupled nano-resonating energy emitting structures |
Apr. 22, 2008 |
| 7358512 |
Dynamic pattern generator for controllably reflecting charged-particles |
Apr. 15, 2008 |
| 7256406 |
Emitter for electron-beam projection lithography system, and method of manufacturing and operating the emitter |
Aug. 14, 2007 |
| 7253426 |
Structures and methods for coupling energy from an electromagnetic wave |
Aug. 7, 2007 |
| 7253424 |
Method of implanting a substrate and an ion implanter for performing the method |
Aug. 7, 2007 |
| 7250618 |
Radiantly heated cathode for an electron gun and heating assembly |
Jul. 31, 2007 |
| 7208712 |
Structures and methods for coupling energy from an electromagnetic wave |
Apr. 24, 2007 |
| 7161162 |
Electron beam pattern generator with photocathode comprising low work function cesium halide |
Jan. 9, 2007 |
| 7095037 |
Electron beam lithography system having improved electron gun |
Aug. 22, 2006 |
| 7095036 |
Electron beam lithography apparatus using a patterned emitter and method of fabricating the patterned emitter |
Aug. 22, 2006 |
| 6936981 |
Retarding electron beams in multiple electron beam pattern generation |
Aug. 30, 2005 |
| 6909104 |
Miniaturized terahertz radiation source |
Jun. 21, 2005 |
| 6903348 |
Wafer holding apparatus for ion implanting system |
Jun. 7, 2005 |
| 6891176 |
Planar electron emitter with extended lifetime and system using same |
May. 10, 2005 |
| 6870171 |
Exposure apparatus |
Mar. 22, 2005 |
| 6870173 |
Electron-beam focusing apparatus and electron-beam projection lithography system employing the same |
Mar. 22, 2005 |
| 6844560 |
Lithography system comprising a converter plate and means for protecting the converter plate |
Jan. 18, 2005 |
| 6841787 |
Maskless photon-electron spot-grid array printer |
Jan. 11, 2005 |
| 6828574 |
Modulator driven photocathode electron beam generator |
Dec. 7, 2004 |
| 6794666 |
Electron emission lithography apparatus and method using a selectively grown carbon nanotube |
Sep. 21, 2004 |
| 6765218 |
Lithographic projection apparatus with positioning system for use with reflectors |
Jul. 20, 2004 |
| 6744226 |
Photoelectron linear accelerator for producing a low emittance polarized electron beam |
Jun. 1, 2004 |
| 6740895 |
Method and apparatus for emission lithography using patterned emitter |
May. 25, 2004 |
| 6734445 |
Mechanized retractable pellicles and methods of use |
May. 11, 2004 |
| 6724002 |
Multiple electron beam lithography system with multiple beam modulated laser illumination |
Apr. 20, 2004 |
| 6614037 |
Electron beam irradiating apparatus |
Sep. 2, 2003 |
| 6593585 |
Lithographic projection apparatus with positioning system for use with reflectors |
Jul. 15, 2003 |
| 6573516 |
Electron-beam lithography method and electron-beam lithography system |
Jun. 3, 2003 |
| 6566666 |
Method and apparatus for pyroelectric lithography using patterned emitter |
May. 20, 2003 |
| 6538256 |
Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance |
Mar. 25, 2003 |
| 6528804 |
Method and apparatus for low energy ion implantation |
Mar. 4, 2003 |
| 6515292 |
High resolution electron projection |
Feb. 4, 2003 |
| 6476401 |
Moving photocathode with continuous regeneration for image conversion in electron beam lithography |
Nov. 5, 2002 |
| 6476402 |
Apparatus for pyroelectric emission lithography using patterned emitter |
Nov. 5, 2002 |
| 6448568 |
Electron beam column using high numerical aperture photocathode source illumination |
Sep. 10, 2002 |
| 6448722 |
Permanent magnet focused X-band photoinjector |
Sep. 10, 2002 |
| 6429443 |
Multiple beam electron beam lithography system |
Aug. 6, 2002 |
| 6373072 |
Lithographic projection apparatus |
Apr. 16, 2002 |
| 6215128 |
Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography |
Apr. 10, 2001 |
| 6054713 |
Electron beam exposure apparatus |
Apr. 25, 2000 |
| 5424549 |
Scanning systems for high resolution e-beam and X-ray lithography |
Jun. 13, 1995 |
| 5395738 |
Electron lithography using a photocathode |
Mar. 7, 1995 |
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