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Class Information
Number: 250/492.24
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Photocathode projection
Description: Subject matter including using electrons emitted from photoemissive electrode irradiated by another source of electromagnetic radiation such as ultraviolet light.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8648319 Device for generating THz radiation with free electron beams Feb. 11, 2014
8445873 System and method for detecting at least one contamination species in a lithographic apparatus May. 21, 2013
8298029 Method for resurrecting negative electron affinity photocathodes after exposure to an oxidizing gas Oct. 30, 2012
8134135 Multiple beam charged particle optical system Mar. 13, 2012
7829863 Electron beam irradiation device Nov. 9, 2010
7816866 Photocathode comprising a plurality of openings on an electron emission layer Oct. 19, 2010
7800075 Multi-function module for an electron beam column Sep. 21, 2010
7767984 Resist collapse prevention using immersed hardening Aug. 3, 2010
7566882 Reflection lithography using rotating platter Jul. 28, 2009
7557365 Structures and methods for coupling energy from an electromagnetic wave Jul. 7, 2009
7521700 Raster frame beam system for electron beam lithography Apr. 21, 2009
7498593 Terahertz radiation sources and methods Mar. 3, 2009
7453074 Ion implanter with ionization chamber electrode design Nov. 18, 2008
7361916 Coupled nano-resonating energy emitting structures Apr. 22, 2008
7358512 Dynamic pattern generator for controllably reflecting charged-particles Apr. 15, 2008
7256406 Emitter for electron-beam projection lithography system, and method of manufacturing and operating the emitter Aug. 14, 2007
7253424 Method of implanting a substrate and an ion implanter for performing the method Aug. 7, 2007
7253426 Structures and methods for coupling energy from an electromagnetic wave Aug. 7, 2007
7250618 Radiantly heated cathode for an electron gun and heating assembly Jul. 31, 2007
7208712 Structures and methods for coupling energy from an electromagnetic wave Apr. 24, 2007
7161162 Electron beam pattern generator with photocathode comprising low work function cesium halide Jan. 9, 2007
7095036 Electron beam lithography apparatus using a patterned emitter and method of fabricating the patterned emitter Aug. 22, 2006
7095037 Electron beam lithography system having improved electron gun Aug. 22, 2006
6936981 Retarding electron beams in multiple electron beam pattern generation Aug. 30, 2005
6909104 Miniaturized terahertz radiation source Jun. 21, 2005
6903348 Wafer holding apparatus for ion implanting system Jun. 7, 2005
6891176 Planar electron emitter with extended lifetime and system using same May. 10, 2005
6870173 Electron-beam focusing apparatus and electron-beam projection lithography system employing the same Mar. 22, 2005
6870171 Exposure apparatus Mar. 22, 2005
6844560 Lithography system comprising a converter plate and means for protecting the converter plate Jan. 18, 2005
6841787 Maskless photon-electron spot-grid array printer Jan. 11, 2005
6828574 Modulator driven photocathode electron beam generator Dec. 7, 2004
6794666 Electron emission lithography apparatus and method using a selectively grown carbon nanotube Sep. 21, 2004
6765218 Lithographic projection apparatus with positioning system for use with reflectors Jul. 20, 2004
6744226 Photoelectron linear accelerator for producing a low emittance polarized electron beam Jun. 1, 2004
6740895 Method and apparatus for emission lithography using patterned emitter May. 25, 2004
6734445 Mechanized retractable pellicles and methods of use May. 11, 2004
6724002 Multiple electron beam lithography system with multiple beam modulated laser illumination Apr. 20, 2004
6614037 Electron beam irradiating apparatus Sep. 2, 2003
6593585 Lithographic projection apparatus with positioning system for use with reflectors Jul. 15, 2003
6573516 Electron-beam lithography method and electron-beam lithography system Jun. 3, 2003
6566666 Method and apparatus for pyroelectric lithography using patterned emitter May. 20, 2003
6538256 Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance Mar. 25, 2003
6528804 Method and apparatus for low energy ion implantation Mar. 4, 2003
6515292 High resolution electron projection Feb. 4, 2003
6476401 Moving photocathode with continuous regeneration for image conversion in electron beam lithography Nov. 5, 2002
6476402 Apparatus for pyroelectric emission lithography using patterned emitter Nov. 5, 2002
6448722 Permanent magnet focused X-band photoinjector Sep. 10, 2002
6448568 Electron beam column using high numerical aperture photocathode source illumination Sep. 10, 2002
6429443 Multiple beam electron beam lithography system Aug. 6, 2002

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