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Class Information
Number: 250/492.23
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Variable beam
Description: Subject matter including the use of a variable beam of charged particles which may be used to project a pattern onto an object.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7459705 |
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure de |
Dec. 2, 2008 |
| 7453075 |
Charged particle beam exposure system |
Nov. 18, 2008 |
| 7449700 |
Electron beam exposure apparatus, electron beam exposure method and method of manufacturing semiconductor device |
Nov. 11, 2008 |
| 7449699 |
Method and apparatus for creating a topography at a surface |
Nov. 11, 2008 |
| 7442947 |
Electron-beam exposure system and electron-beam exposure method |
Oct. 28, 2008 |
| 7442946 |
Nonuniform ion implantation apparatus and method using a wide beam |
Oct. 28, 2008 |
| 7432515 |
Charged particle beam lithography apparatus and method |
Oct. 7, 2008 |
| 7427765 |
Electron beam column for writing shaped electron beams |
Sep. 23, 2008 |
| 7425715 |
Digital parallel electron beam lithography stamp |
Sep. 16, 2008 |
| 7423277 |
Ion beam monitoring in an ion implanter using an imaging device |
Sep. 9, 2008 |
| 7417234 |
Spatial-phase locking of energy beams for determining two-dimensional location and beam shape |
Aug. 26, 2008 |
| 7414240 |
Particle remover, exposure apparatus having the same, and device manufacturing method |
Aug. 19, 2008 |
| 7410508 |
Apparatus for crystallizing semiconductor with laser beams |
Aug. 12, 2008 |
| 7405414 |
Method and apparatus for patterning a workpiece |
Jul. 29, 2008 |
| 7405407 |
Ion beam therapy system and its couch positioning method |
Jul. 29, 2008 |
| 7388217 |
Particle-optical projection system |
Jun. 17, 2008 |
| 7388215 |
Pattern drawing method, stamper manufacturing method, and pattern drawing apparatus |
Jun. 17, 2008 |
| 7388214 |
Charged-particle beam exposure apparatus and method |
Jun. 17, 2008 |
| 7385209 |
Micromachining process, system and product |
Jun. 10, 2008 |
| 7385194 |
Charged particle beam application system |
Jun. 10, 2008 |
| 7381979 |
Rotating irradiation apparatus |
Jun. 3, 2008 |
| 7377228 |
System for and method of gas cluster ion beam processing |
May. 27, 2008 |
| 7372049 |
Lithographic apparatus including a cleaning device and method for cleaning an optical element |
May. 13, 2008 |
| 7368736 |
Charged beam exposure apparatus and method for manufacturing mask and semiconductor device |
May. 6, 2008 |
| 7368737 |
Electron beam writing method, electron beam writing apparatus and semiconductor device manufacturing method |
May. 6, 2008 |
| 7368738 |
Advanced pattern definition for particle-beam exposure |
May. 6, 2008 |
| 7361909 |
Method and apparatus for correcting drift during automated FIB processing |
Apr. 22, 2008 |
| 7358512 |
Dynamic pattern generator for controllably reflecting charged-particles |
Apr. 15, 2008 |
| 7351987 |
Irradiation system with ion beam |
Apr. 1, 2008 |
| 7351984 |
Controlling the characteristics of implanter ion-beams |
Apr. 1, 2008 |
| 7326943 |
Electron beam irradiating apparatus and irradiating method |
Feb. 5, 2008 |
| 7326940 |
Exposure apparatus, exposure method and semiconductor device production method |
Feb. 5, 2008 |
| 7304320 |
Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device |
Dec. 4, 2007 |
| 7301161 |
Method of producing electron beam writing data, program of producing electron beam writing data, and electron beam writing apparatus |
Nov. 27, 2007 |
| 7301156 |
Controlling the characteristics of implanter ion-beams |
Nov. 27, 2007 |
| 7301159 |
Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same |
Nov. 27, 2007 |
| 7287240 |
Designing method and device for phase shift mask |
Oct. 23, 2007 |
| 7282725 |
Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and stencil mask |
Oct. 16, 2007 |
| 7279687 |
Technique for implementing a variable aperture lens in an ion implanter |
Oct. 9, 2007 |
| 7276714 |
Advanced pattern definition for particle-beam processing |
Oct. 2, 2007 |
| 7274029 |
Lithographic apparatus and device manufacturing method |
Sep. 25, 2007 |
| 7271400 |
Methods, apparatus, and systems involving ion beam generation |
Sep. 18, 2007 |
| 7268358 |
Method of modulating laser-accelerated protons for radiation therapy |
Sep. 11, 2007 |
| 7268357 |
Immersion lithography apparatus and method |
Sep. 11, 2007 |
| 7265382 |
Method and apparatus employing integrated metrology for improved dielectric etch efficiency |
Sep. 4, 2007 |
| 7253424 |
Method of implanting a substrate and an ion implanter for performing the method |
Aug. 7, 2007 |
| 7239370 |
Lithographic apparatus and device manufacturing method |
Jul. 3, 2007 |
| 7235799 |
System and method for evaluation using electron beam and manufacture of devices |
Jun. 26, 2007 |
| 7235795 |
Semiconductor device manufacturing apparatus and a method of controlling a semiconductor device manufacturing process |
Jun. 26, 2007 |
| 7230252 |
Aberration adjusting method, device fabrication method, and charged particle beam lithography machine |
Jun. 12, 2007 |
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