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Class Information
Number: 250/492.23
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Variable beam
Description: Subject matter including the use of a variable beam of charged particles which may be used to project a pattern onto an object.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622724 |
High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown |
Nov. 24, 2009 |
| 7598499 |
Charged-particle exposure apparatus |
Oct. 6, 2009 |
| 7598504 |
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus |
Oct. 6, 2009 |
| 7592604 |
Charged particle beam apparatus |
Sep. 22, 2009 |
| 7588803 |
Multi step ebeam process for modifying dielectric materials |
Sep. 15, 2009 |
| 7582884 |
Charged particle beam exposure method and charged particle beam exposure device |
Sep. 1, 2009 |
| 7579606 |
Method and system for logic design for cell projection particle beam lithography |
Aug. 25, 2009 |
| 7569842 |
Method for correcting electron beam exposure data |
Aug. 4, 2009 |
| 7566882 |
Reflection lithography using rotating platter |
Jul. 28, 2009 |
| 7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam |
Jul. 28, 2009 |
| 7564049 |
Pattern drawing system, electrically charged beam drawing method, photomask manufacturing method, and semiconductor device manufacturing method |
Jul. 21, 2009 |
| 7528023 |
Apparatus for crystallizing semiconductor with laser beams |
May. 5, 2009 |
| 7528932 |
SLM direct writer |
May. 5, 2009 |
| 7525103 |
Technique for improving uniformity of a ribbon beam |
Apr. 28, 2009 |
| 7521697 |
Method for fabricating semiconductor device and equipment for fabricating the same |
Apr. 21, 2009 |
| 7521688 |
Charged-particle beam instrument |
Apr. 21, 2009 |
| 7521700 |
Raster frame beam system for electron beam lithography |
Apr. 21, 2009 |
| 7504645 |
Method of forming pattern writing data by using charged particle beam |
Mar. 17, 2009 |
| 7485879 |
Electron beam writing apparatus and writing method |
Feb. 3, 2009 |
| 7476880 |
Writing a circuit design pattern with shaped particle beam flashes |
Jan. 13, 2009 |
| 7470920 |
Resonant structure-based display |
Dec. 30, 2008 |
| 7462848 |
Optics for generation of high current density patterned charged particle beams |
Dec. 9, 2008 |
| 7459705 |
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure de |
Dec. 2, 2008 |
| 7453075 |
Charged particle beam exposure system |
Nov. 18, 2008 |
| 7449699 |
Method and apparatus for creating a topography at a surface |
Nov. 11, 2008 |
| 7449700 |
Electron beam exposure apparatus, electron beam exposure method and method of manufacturing semiconductor device |
Nov. 11, 2008 |
| 7442946 |
Nonuniform ion implantation apparatus and method using a wide beam |
Oct. 28, 2008 |
| 7442947 |
Electron-beam exposure system and electron-beam exposure method |
Oct. 28, 2008 |
| 7432515 |
Charged particle beam lithography apparatus and method |
Oct. 7, 2008 |
| 7427765 |
Electron beam column for writing shaped electron beams |
Sep. 23, 2008 |
| 7425715 |
Digital parallel electron beam lithography stamp |
Sep. 16, 2008 |
| 7423277 |
Ion beam monitoring in an ion implanter using an imaging device |
Sep. 9, 2008 |
| 7417234 |
Spatial-phase locking of energy beams for determining two-dimensional location and beam shape |
Aug. 26, 2008 |
| 7414240 |
Particle remover, exposure apparatus having the same, and device manufacturing method |
Aug. 19, 2008 |
| 7410508 |
Apparatus for crystallizing semiconductor with laser beams |
Aug. 12, 2008 |
| 7405407 |
Ion beam therapy system and its couch positioning method |
Jul. 29, 2008 |
| 7405414 |
Method and apparatus for patterning a workpiece |
Jul. 29, 2008 |
| 7388214 |
Charged-particle beam exposure apparatus and method |
Jun. 17, 2008 |
| 7388217 |
Particle-optical projection system |
Jun. 17, 2008 |
| 7388215 |
Pattern drawing method, stamper manufacturing method, and pattern drawing apparatus |
Jun. 17, 2008 |
| 7385209 |
Micromachining process, system and product |
Jun. 10, 2008 |
| 7385194 |
Charged particle beam application system |
Jun. 10, 2008 |
| 7381979 |
Rotating irradiation apparatus |
Jun. 3, 2008 |
| 7377228 |
System for and method of gas cluster ion beam processing |
May. 27, 2008 |
| 7372049 |
Lithographic apparatus including a cleaning device and method for cleaning an optical element |
May. 13, 2008 |
| 7368736 |
Charged beam exposure apparatus and method for manufacturing mask and semiconductor device |
May. 6, 2008 |
| 7368737 |
Electron beam writing method, electron beam writing apparatus and semiconductor device manufacturing method |
May. 6, 2008 |
| 7368738 |
Advanced pattern definition for particle-beam exposure |
May. 6, 2008 |
| 7361909 |
Method and apparatus for correcting drift during automated FIB processing |
Apr. 22, 2008 |
| 7358512 |
Dynamic pattern generator for controllably reflecting charged-particles |
Apr. 15, 2008 |
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