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Class Information
Number: 250/492.23
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Variable beam
Description: Subject matter including the use of a variable beam of charged particles which may be used to project a pattern onto an object.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8710467 Multi charged particle beam writing apparatus and multi charged particle beam writing method Apr. 29, 2014
8669537 Charged particle beam writing apparatus and method Mar. 11, 2014
8669539 Implant method and implanter by using a variable aperture Mar. 11, 2014
8664594 Electron-optical system for high-speed and high-sensitivity inspections Mar. 4, 2014
8658994 Apparatus and method for controlled particle beam manufacturing Feb. 25, 2014
8653487 Lithography apparatus and lithography method Feb. 18, 2014
8637835 Drawing apparatus, method of manufacturing article, and processing apparatus Jan. 28, 2014
8624205 Charged particle beam writing apparatus and device production method Jan. 7, 2014
8618497 Drawing apparatus, method of manufacturing article, and information processing apparatus Dec. 31, 2013
8610082 Drawing apparatus and method of manufacturing article Dec. 17, 2013
8610096 Charged particle beam writing apparatus and method Dec. 17, 2013
8598545 Multiple beam charged particle optical system Dec. 3, 2013
8592713 Irradiating apparatus, semiconductor device manufacturing apparatus, semiconductor device manufacturing method, and display device manufacturing method Nov. 26, 2013
8586460 Controlling laser annealed junction depth by implant modification Nov. 19, 2013
8581217 Method for monitoring ion implantation Nov. 12, 2013
8563951 Exposure systems for integrated circuit fabrication Oct. 22, 2013
8563953 Charged particle beam writing apparatus and charged particle beam writing method Oct. 22, 2013
8525135 System and method of electron beam writing Sep. 3, 2013
8525075 Laser irradiation apparatus Sep. 3, 2013
8519364 Positioning system and method for precise stage and pattern used therof Aug. 27, 2013
8502176 Imaging system Aug. 6, 2013
8487281 Electron beam exposure apparatus and electron beam exposure method Jul. 16, 2013
8481960 Deceleration lens Jul. 9, 2013
8466430 Electrostatic lens Jun. 18, 2013
8445872 System and method for layer-wise proton beam current variation May. 21, 2013
8440987 System and method for automated cyclotron procedures May. 14, 2013
8431913 Charged particle beam processing method Apr. 30, 2013
RE44179 Charged particle beam writing method Apr. 30, 2013
8426832 Cell projection charged particle beam lithography Apr. 23, 2013
8405045 Particle beam device with deflection system Mar. 26, 2013
8389962 System and method for compensating for magnetic noise Mar. 5, 2013
8373144 Quasi-annular reflective electron patterning device Feb. 12, 2013
8354655 Method and system for controlling critical dimension and roughness in resist features Jan. 15, 2013
8330129 Uniformity of a scanned ion beam Dec. 11, 2012
8314369 Managing thermal budget in annealing of substrates Nov. 20, 2012
8309884 Laser irradiation apparatus Nov. 13, 2012
8304749 Charged-particle exposure apparatus with electrostatic zone plate Nov. 6, 2012
8294125 High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture Oct. 23, 2012
8288741 Apparatus and method for three dimensional ion processing Oct. 16, 2012
8222616 Method for adapting fractionation of a radiation therapy dose Jul. 17, 2012
8198601 Method for producing a multi-beam deflector array device having electrodes Jun. 12, 2012
8188450 Multiple beam charged particle optical system May. 29, 2012
8183543 Multi-beam source May. 22, 2012
8173977 Laser irradiation apparatus and laser irradiation method May. 8, 2012
8153996 Pattern forming apparatus and pattern forming method Apr. 10, 2012
8143602 High-volume manufacturing massive e-beam maskless lithography system Mar. 27, 2012
8129698 Charged-particle beam writing method and charged-particle beam writing apparatus Mar. 6, 2012
8124946 Post-decel magnetic energy filter for ion implantation systems Feb. 28, 2012
8067752 Semiconductor testing method and semiconductor tester Nov. 29, 2011
8049191 Method of transferring pattern of reticle, computer readable storage medium, and method of manufacturing device Nov. 1, 2011

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