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Class Information
Number: 250/492.22
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Pattern control
Description: Subject matter having means (e.g., template, program) representing information necessary to variably expose the semiconductor object or material and means or steps responsive to the representing means to irradiate or re-irradiate the object or material accordingly.










Patents under this class:

Patent Number Title Of Patent Date Issued
8710468 Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample Apr. 29, 2014
8710467 Multi charged particle beam writing apparatus and multi charged particle beam writing method Apr. 29, 2014
8710465 Pattern data conversion for lithography system Apr. 29, 2014
8707222 Lithography mask functional optimization and spatial frequency analysis Apr. 22, 2014
8692214 Charged particle beam inspection method Apr. 8, 2014
8669539 Implant method and implanter by using a variable aperture Mar. 11, 2014
8669537 Charged particle beam writing apparatus and method Mar. 11, 2014
8658994 Apparatus and method for controlled particle beam manufacturing Feb. 25, 2014
8658985 Drawing apparatus and method of manufacturing article Feb. 25, 2014
8653487 Lithography apparatus and lithography method Feb. 18, 2014
8637835 Drawing apparatus, method of manufacturing article, and processing apparatus Jan. 28, 2014
8637382 Layer transfer of films utilizing thermal flux regime for energy controlled cleaving Jan. 28, 2014
8629416 Charged particle beam masking for laser ablation micromachining Jan. 14, 2014
8624206 Pattern modification schemes for improved FIB patterning Jan. 7, 2014
8624205 Charged particle beam writing apparatus and device production method Jan. 7, 2014
8618517 Pattern measuring apparatus Dec. 31, 2013
8618516 Charged-particle beam exposure apparatus and method of manufacturing article Dec. 31, 2013
8618515 Lithography apparatus and device manufacturing method Dec. 31, 2013
8618499 Electron beam irradiation apparatus Dec. 31, 2013
8618497 Drawing apparatus, method of manufacturing article, and information processing apparatus Dec. 31, 2013
8618496 Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams Dec. 31, 2013
8614427 Suspended membrane calibration sample Dec. 24, 2013
8610096 Charged particle beam writing apparatus and method Dec. 17, 2013
8610091 Charged particle beam writing apparatus and charged particle beam writing method Dec. 17, 2013
8610083 Systems and methods providing electron beam writing to a medium Dec. 17, 2013
8610082 Drawing apparatus and method of manufacturing article Dec. 17, 2013
8604411 Charged particle beam modulator Dec. 10, 2013
8598545 Multiple beam charged particle optical system Dec. 3, 2013
8598544 Method of generating a two-level pattern for lithographic processing and pattern generator using the same Dec. 3, 2013
8592713 Irradiating apparatus, semiconductor device manufacturing apparatus, semiconductor device manufacturing method, and display device manufacturing method Nov. 26, 2013
8586951 Multi charged particle beam writing apparatus and multi charged particle beam writing method Nov. 19, 2013
8586950 Method and system for feature function aware priority printing Nov. 19, 2013
8586949 Charged particle lithography system with intermediate chamber Nov. 19, 2013
8584057 Non-directional dithering methods Nov. 12, 2013
8581218 Treatment planning system, device for calculating a scanning path and particle therapy system Nov. 12, 2013
8581186 Charged particle beam apparatus Nov. 12, 2013
8563953 Charged particle beam writing apparatus and charged particle beam writing method Oct. 22, 2013
8563952 Charged particle beam writing apparatus Oct. 22, 2013
8563951 Exposure systems for integrated circuit fabrication Oct. 22, 2013
8558197 Ion implanting system Oct. 15, 2013
8558196 Charged particle lithography system with aperture array cooling Oct. 15, 2013
8552405 Charged particle beam writing apparatus and charged particle beam writing method Oct. 8, 2013
8552404 Ion implantation method and ion implantation apparatus Oct. 8, 2013
8552338 System and method for laser machining of three-dimensional structures Oct. 8, 2013
8546767 Pattern definition device with multiple multibeam array Oct. 1, 2013
8530864 Optimization of control parameters for a particle irradiation system Sep. 10, 2013
8525136 Work piece with concealed surface defects Sep. 3, 2013
8525135 System and method of electron beam writing Sep. 3, 2013
8525134 Lithography system Sep. 3, 2013
8507368 Single-shot semiconductor processing system and method having various irradiation patterns Aug. 13, 2013











 
 
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