 |
|
 |
| |
 |
|
Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6753539 |
Ion implantation apparatus equipped with plasma shower and ion implantation method |
Jun. 22, 2004 |
| 6750460 |
System and method for adjusting the properties of a device by GCIB processing |
Jun. 15, 2004 |
| 6750462 |
Ion implanting method and apparatus |
Jun. 15, 2004 |
| 6745717 |
Method and apparatus for preparing nitride semiconductor surfaces |
Jun. 8, 2004 |
| 6744214 |
Electron beam ion source with integral low-temperature vaporizer |
Jun. 1, 2004 |
| 6744225 |
Ion accelerator |
Jun. 1, 2004 |
| 6744058 |
Geometric compensation method for charged particle beam irradiation |
Jun. 1, 2004 |
| 6740894 |
Adjustable implantation angle workpiece support structure for an ion beam implanter utilizing a linear scan motor |
May. 25, 2004 |
| 6740891 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
May. 25, 2004 |
| 6734439 |
Wafer pedestal tilt mechanism and cooling system |
May. 11, 2004 |
| 6734446 |
Apparatus and method for doping |
May. 11, 2004 |
| 6734447 |
Electron filter for current implanter |
May. 11, 2004 |
| 6727500 |
System for imaging a cross-section of a substrate |
Apr. 27, 2004 |
| 6727507 |
Electron beam proximity exposure apparatus and method |
Apr. 27, 2004 |
| 6724001 |
Electron beam lithography apparatus with self actuated vacuum bypass valve |
Apr. 20, 2004 |
| 6720564 |
Method and apparatus for fingerprint detection and analysis |
Apr. 13, 2004 |
| 6720563 |
Ion implantation apparatus and ion implantation method |
Apr. 13, 2004 |
| 6717165 |
Device and method for detecting the drive state of a turbo pump in a tandetron accelerator of an ion implantation device |
Apr. 6, 2004 |
| 6710358 |
Apparatus and method for reducing energy contamination of low energy ion beams |
Mar. 23, 2004 |
| 6710359 |
Methods and apparatus for scanned beam uniformity adjustment in ion implanters |
Mar. 23, 2004 |
| 6710360 |
Adjustable implantation angle workpiece support structure for an ion beam implanter |
Mar. 23, 2004 |
| 6703627 |
Real time monitor method and system for extraction electrode |
Mar. 9, 2004 |
| 6703628 |
Method and system for ion beam containment in an ion beam guide |
Mar. 9, 2004 |
| 6703626 |
Mask defect repair method |
Mar. 9, 2004 |
| 6696689 |
Method and apparatus for avoiding driver gas contamination in an ion implanter gas supply module |
Feb. 24, 2004 |
| 6696692 |
Process control methods for use with e-beam fabrication technology |
Feb. 24, 2004 |
| 6693289 |
Operationally positionable source magnet field |
Feb. 17, 2004 |
| 6690022 |
Ion beam incidence angle and beam divergence monitor |
Feb. 10, 2004 |
| 6686598 |
Wafer clamping apparatus and method |
Feb. 3, 2004 |
| 6686599 |
Ion production device for ion beam irradiation apparatus |
Feb. 3, 2004 |
| 6686600 |
TEM sample slicing process |
Feb. 3, 2004 |
| 6686601 |
Ion sources for ion implantation apparatus |
Feb. 3, 2004 |
| 6683320 |
Through-the-lens neutralization for charged particle beam system |
Jan. 27, 2004 |
| 6683317 |
Electrically insulating vacuum coupling |
Jan. 27, 2004 |
| 6683307 |
Scanning type charged particle beam microscope |
Jan. 27, 2004 |
| 6677598 |
Beam uniformity and angular distribution measurement system |
Jan. 13, 2004 |
| 6677594 |
Scanning wheel for ion implantation process chamber |
Jan. 13, 2004 |
| 6670624 |
Ion implanter in-situ mass spectrometer |
Dec. 30, 2003 |
| 6670623 |
Thermal regulation of an ion implantation system |
Dec. 30, 2003 |
| 6670622 |
Electron exposure device and method and electronic characteristics evaluation device using scanning probe |
Dec. 30, 2003 |
| 6670621 |
Clean room arrangement for electron beam lithography |
Dec. 30, 2003 |
| 6667485 |
Ion implanting apparatus and sample processing apparatus |
Dec. 23, 2003 |
| 6664552 |
Method and apparatus for specimen fabrication |
Dec. 16, 2003 |
| 6661008 |
Electron-optical system and inspection method using the same |
Dec. 9, 2003 |
| 6661017 |
Ion implantation system having an energy probe |
Dec. 9, 2003 |
| 6661016 |
Ion implantation uniformity correction using beam current control |
Dec. 9, 2003 |
| 6657210 |
Electron beam exposure method, a method of constructing exposure control data, and a computer-readable medium |
Dec. 2, 2003 |
| 6657187 |
System for inspecting microscopic samples with a scanning microscope |
Dec. 2, 2003 |
| 6657209 |
Method and system for determining pressure compensation factors in an ion implanter |
Dec. 2, 2003 |
| 6653642 |
Methods and apparatus for operating high energy accelerator in low energy mode |
Nov. 25, 2003 |
|
|
|
 |
|
 |
|
| |
Randomly Featured Patents |
|
