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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6825480 |
Charged particle beam apparatus and automatic astigmatism adjustment method |
Nov. 30, 2004 |
| 6822246 |
Ribbon electron beam for inspection system |
Nov. 23, 2004 |
| 6822245 |
Ion beam apparatus and sample processing method |
Nov. 23, 2004 |
| 6821693 |
Method for adjusting a multilevel phase-shifting mask or reticle |
Nov. 23, 2004 |
| 6822247 |
Ion irradiation system |
Nov. 23, 2004 |
| 6818909 |
Ion sources for ion implantation apparatus |
Nov. 16, 2004 |
| 6815690 |
Ion beam source with coated electrode(s) |
Nov. 9, 2004 |
| 6815695 |
Simplified reticle stage removal system for an electron beam system |
Nov. 9, 2004 |
| 6815696 |
Beam stop for use in an ion implantation system |
Nov. 9, 2004 |
| 6815697 |
Ion beam charge neutralizer and method therefor |
Nov. 9, 2004 |
| 6815698 |
Charged particle beam exposure system |
Nov. 9, 2004 |
| 6806479 |
Apparatus and method for reducing implant angle variations across a large wafer for a batch disk |
Oct. 19, 2004 |
| 6803590 |
Ion beam mass separation filter, mass separation method thereof and ion source using the same |
Oct. 12, 2004 |
| 6800862 |
Ion implanting apparatus and ion implanting method |
Oct. 5, 2004 |
| 6800863 |
Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same |
Oct. 5, 2004 |
| 6797968 |
Ion beam processing method and apparatus therefor |
Sep. 28, 2004 |
| 6797965 |
Charged particle beam apparatus, pattern measuring method, and pattern drawing method |
Sep. 28, 2004 |
| 6797967 |
Method and system for dose control during an ion implantation process |
Sep. 28, 2004 |
| 6797969 |
Multi-column FIB for nanofabrication applications |
Sep. 28, 2004 |
| 6794663 |
Method and apparatus for specimen fabrication |
Sep. 21, 2004 |
| 6794664 |
Umbilical cord facilities connection for an ion beam implanter |
Sep. 21, 2004 |
| 6794662 |
Thermosetting resin wafer-holding pin |
Sep. 21, 2004 |
| 6794661 |
Ion implantation apparatus capable of increasing beam current |
Sep. 21, 2004 |
| 6791094 |
Method and apparatus for determining beam parallelism and direction |
Sep. 14, 2004 |
| 6791097 |
Adjustable conductance limiting aperture for ion implanters |
Sep. 14, 2004 |
| 6787779 |
Apparatus wherein ionizing radiation is generated |
Sep. 7, 2004 |
| 6787780 |
Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method of a semiconductor device |
Sep. 7, 2004 |
| 6781140 |
Method of and machine for pattern writing by an electron beam |
Aug. 24, 2004 |
| 6781139 |
Load lock vacuum conductance limiting aperture |
Aug. 24, 2004 |
| 6777687 |
Substrate positioning system |
Aug. 17, 2004 |
| 6777688 |
Rotational stage for high speed, large area scanning in focused beam systems |
Aug. 17, 2004 |
| 6777695 |
Rotating beam ion implanter |
Aug. 17, 2004 |
| 6777696 |
Deflecting acceleration/deceleration gap |
Aug. 17, 2004 |
| 6777699 |
Methods, apparatus, and systems involving ion beam generation |
Aug. 17, 2004 |
| 6777882 |
Ion beam generator |
Aug. 17, 2004 |
| 6774378 |
Method of tuning electrostatic quadrupole electrodes of an ion beam implanter |
Aug. 10, 2004 |
| 6774377 |
Electrostatic parallelizing lens for ion beams |
Aug. 10, 2004 |
| 6774373 |
Adjustable implantation angle workpiece support structure for an ion beam implanter |
Aug. 10, 2004 |
| 6772776 |
Apparatus for in situ cleaning of carbon contaminated surfaces |
Aug. 10, 2004 |
| 6774376 |
Wafer holding pin |
Aug. 10, 2004 |
| 6770888 |
High mass resolution magnet for ribbon beam ion implanters |
Aug. 3, 2004 |
| 6770889 |
Method of controlling electrostatic lens and ion implantation apparatus |
Aug. 3, 2004 |
| 6768110 |
Ion beam milling system and method for electron microscopy specimen preparation |
Jul. 27, 2004 |
| 6765219 |
Hybrid scanning system and methods for ion implantation |
Jul. 20, 2004 |
| 6765205 |
Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using same |
Jul. 20, 2004 |
| 6762423 |
Methods and apparatus for ion beam neutralization in magnets |
Jul. 13, 2004 |
| 6762417 |
System in which a rotating body is connected to a rotary shaft in an ion implanter |
Jul. 13, 2004 |
| 6759665 |
Method and system for ion beam containment in an ion beam guide |
Jul. 6, 2004 |
| 6756599 |
Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the same |
Jun. 29, 2004 |
| 6756600 |
Ion implantation with improved ion source life expectancy |
Jun. 29, 2004 |
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