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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6918351 |
Apparatus for ion beam implantation |
Jul. 19, 2005 |
| 6914244 |
Ion beam milling system and method for electron microscopy specimen preparation |
Jul. 5, 2005 |
| 6911832 |
Focused ion beam endpoint detection using charge pulse detection electronics |
Jun. 28, 2005 |
| 6911660 |
Method of measuring ion beam angles |
Jun. 28, 2005 |
| 6911656 |
Rotational stage for high speed, large area scanning in focused beam systems |
Jun. 28, 2005 |
| 6909103 |
Ion irradiation of a target at very high and very low kinetic ion energies |
Jun. 21, 2005 |
| 6909102 |
Ion implanter system, method and program product including particle detection |
Jun. 21, 2005 |
| 6903336 |
Polarity exchanger and ion implanter having the same |
Jun. 7, 2005 |
| 6903345 |
Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method |
Jun. 7, 2005 |
| 6903346 |
Stage assembly having a follower assembly |
Jun. 7, 2005 |
| 6903351 |
Charged particle beam irradiation equipment having scanning electromagnet power supplies |
Jun. 7, 2005 |
| 6903350 |
Ion beam scanning systems and methods for improved ion implantation uniformity |
Jun. 7, 2005 |
| 6903349 |
Ion implanter and a method of implanting ions |
Jun. 7, 2005 |
| 6903348 |
Wafer holding apparatus for ion implanting system |
Jun. 7, 2005 |
| 6900447 |
Focused ion beam system with coaxial scanning electron microscope |
May. 31, 2005 |
| 6900446 |
Charged particle beam irradiation equipment and control method thereof |
May. 31, 2005 |
| 6900444 |
Adjustable implantation angle workpiece support structure for an ion beam implanter |
May. 31, 2005 |
| 6897457 |
Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus |
May. 24, 2005 |
| 6894287 |
Microfabrication apparatus and microfabrication method |
May. 17, 2005 |
| 6894296 |
Multi-inlet PFS arc chamber for hi-current implanter |
May. 17, 2005 |
| 6894294 |
System and method for reducing charged particle contamination |
May. 17, 2005 |
| 6891174 |
Method and system for ion beam containment using photoelectrons in an ion beam guide |
May. 10, 2005 |
| 6891173 |
Ion implantation systems and methods utilizing a downstream gas source |
May. 10, 2005 |
| 6885014 |
Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam |
Apr. 26, 2005 |
| 6881968 |
Electron beam exposure apparatus, electron beam exposure method, semiconductor device manufacturing method, and electron beam shape measuring method |
Apr. 19, 2005 |
| 6881970 |
Charged particle beam irradiation equipment and control method thereof |
Apr. 19, 2005 |
| 6881967 |
Method of correction for wafer crystal cut error in semiconductor processing |
Apr. 19, 2005 |
| 6881966 |
Hybrid magnetic/electrostatic deflector for ion implantation systems |
Apr. 19, 2005 |
| 6872959 |
Thermoelectron generating source and ion beam radiating apparatus with the same |
Mar. 29, 2005 |
| 6872953 |
Two dimensional stationary beam profile and angular mapping |
Mar. 29, 2005 |
| 6870170 |
Ion implant dose control |
Mar. 22, 2005 |
| 6870320 |
Device and method for ion beam acceleration and electron beam pulse formation and amplification |
Mar. 22, 2005 |
| 6867422 |
Apparatus for ion implantation |
Mar. 15, 2005 |
| 6864494 |
Semiconductor processing apparatus having a moving member and a force compensator therefor |
Mar. 8, 2005 |
| 6864495 |
Device for generating an ion beam |
Mar. 8, 2005 |
| 6861187 |
Methods and devices for evaluating imaging characteristics of a charged-particle-beam microlithography system |
Mar. 1, 2005 |
| 6858851 |
Apparatus for specimen fabrication and method for specimen fabrication |
Feb. 22, 2005 |
| 6858854 |
Method and apparatus for measuring inclination angle of ion beam |
Feb. 22, 2005 |
| 6855942 |
Apparatus for pre-acceleration of ion beams used in a heavy ion beam applications system |
Feb. 15, 2005 |
| 6852984 |
Advanced ion beam measurement tool for an ion implantation apparatus |
Feb. 8, 2005 |
| 6849856 |
Electron beam duplication lithography method and apparatus |
Feb. 1, 2005 |
| 6849857 |
Beam processing apparatus |
Feb. 1, 2005 |
| 6847043 |
Ion sources for ion implantation apparatus |
Jan. 25, 2005 |
| 6841789 |
Apparatus for surface modification of polymer, metal and ceramic materials using ion beam |
Jan. 11, 2005 |
| 6838685 |
Ion beam apparatus, ion beam processing method and sample holder member |
Jan. 4, 2005 |
| 6835508 |
Large-area membrane mask and method for fabricating the mask |
Dec. 28, 2004 |
| 6835937 |
Correcting method for correcting exposure data used for a charged particle beam exposure system |
Dec. 28, 2004 |
| 6831280 |
Methods and apparatus for precise measurement of time delay between two signals |
Dec. 14, 2004 |
| 6828572 |
Ion beam incident angle detector for ion implant systems |
Dec. 7, 2004 |
| 6825482 |
Ion implantation system for manufacturing semiconductor device |
Nov. 30, 2004 |
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