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Class Information
Number: 250/492.21
Name: Radiant energy > Irradiation of objects or material > Irradiation of semiconductor devices > Ion bombardment
Description: Subject matter comprising a means for irradiating a semiconductive object or material with at least one ion beam.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7019314 |
Systems and methods for ion beam focusing |
Mar. 28, 2006 |
| 7019316 |
High-energy ion implanter and method of operation thereof |
Mar. 28, 2006 |
| 7019315 |
System and method for serial ion implanting productivity enhancements |
Mar. 28, 2006 |
| 7015661 |
Method and apparatus for accelerating charged particles |
Mar. 21, 2006 |
| 7012261 |
Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens |
Mar. 14, 2006 |
| 7009193 |
Utilization of an ion gauge in the process chamber of a semiconductor ion implanter |
Mar. 7, 2006 |
| 7005636 |
Method and apparatus for manipulating a microscopic sample |
Feb. 28, 2006 |
| 7005656 |
Ion implanter with vacuum-maintaining circuit board providing connections to internal faraday cups |
Feb. 28, 2006 |
| 7005657 |
Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recovery |
Feb. 28, 2006 |
| 7002150 |
Thin specimen producing method and apparatus |
Feb. 21, 2006 |
| 7002152 |
Sample preparation for transmission electron microscopy |
Feb. 21, 2006 |
| 7002166 |
Method and system for single ion implantation |
Feb. 21, 2006 |
| 6998625 |
Ion implanter having two-stage deceleration beamline |
Feb. 14, 2006 |
| 6998626 |
Method of producing a dopant gas species |
Feb. 14, 2006 |
| 6995381 |
System and method for multi-wafer scanning in ion implanters |
Feb. 7, 2006 |
| 6992311 |
In-situ cleaning of beam defining apertures in an ion implanter |
Jan. 31, 2006 |
| 6992310 |
Scanning systems and methods for providing ions from an ion beam to a workpiece |
Jan. 31, 2006 |
| 6992309 |
Ion beam measurement systems and methods for ion implant dose and uniformity control |
Jan. 31, 2006 |
| 6992308 |
Modulating ion beam current |
Jan. 31, 2006 |
| 6992288 |
Apparatus and method for directing gas towards a specimen |
Jan. 31, 2006 |
| 6989545 |
Device and method for measurement of beam angle and divergence |
Jan. 24, 2006 |
| 6984832 |
Beam angle control in a batch ion implantation system |
Jan. 10, 2006 |
| 6984831 |
Gas flow restricting cathode system for ion implanter and related method |
Jan. 10, 2006 |
| 6984833 |
Ion implanter and method for controlling the same |
Jan. 10, 2006 |
| 6977386 |
Angular aperture shaped beam system and method |
Dec. 20, 2005 |
| 6967340 |
Ion beam irradiation device and operating method thereof |
Nov. 22, 2005 |
| 6965114 |
Apparatus and methods for mask/substrate alignment in charged-particle-beam pattern-transfer |
Nov. 15, 2005 |
| 6965116 |
Method of determining dose uniformity of a scanning ion implanter |
Nov. 15, 2005 |
| 6963068 |
Method for the manufacture and transmissive irradiation of a sample, and particle-optical system |
Nov. 8, 2005 |
| 6960774 |
Fault detection and control methodologies for ion implantation processes, and system for performing same |
Nov. 1, 2005 |
| 6958481 |
Decaborane ion source |
Oct. 25, 2005 |
| 6958476 |
Methods to improve resolution of cross sectioned features created using an ion beam |
Oct. 25, 2005 |
| 6956225 |
Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systems |
Oct. 18, 2005 |
| 6956223 |
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
Oct. 18, 2005 |
| 6954009 |
Positioning apparatus |
Oct. 11, 2005 |
| 6953942 |
Ion beam utilization during scanned ion implantation |
Oct. 11, 2005 |
| 6952014 |
End-point detection for FIB circuit modification |
Oct. 4, 2005 |
| 6949756 |
Shaped and low density focused ion beams |
Sep. 27, 2005 |
| 6946663 |
Method of fabricating multipole lens, multipole lens, and charged-particle beam instrument equipped therewith |
Sep. 20, 2005 |
| 6946667 |
Apparatus to decelerate and control ion beams to improve the total quality of ion implantation |
Sep. 20, 2005 |
| 6943349 |
Multi beam charged particle device |
Sep. 13, 2005 |
| 6940079 |
Method of correction for wafer crystal cut error in semiconductor processing |
Sep. 6, 2005 |
| 6936180 |
Thin-film patterning method, manufacturing method of thin-film device and manufacturing method of thin-film magnetic head |
Aug. 30, 2005 |
| 6933507 |
Controlling the characteristics of implanter ion-beams |
Aug. 23, 2005 |
| 6933511 |
Ion implanting apparatus |
Aug. 23, 2005 |
| 6933512 |
Charged particle beam instrument |
Aug. 23, 2005 |
| 6931619 |
Apparatus for reshaping a patterned organic photoresist surface |
Aug. 16, 2005 |
| 6930316 |
Ion implantation system and ion implantation method |
Aug. 16, 2005 |
| 6924493 |
Ion beam lithography system |
Aug. 2, 2005 |
| 6921907 |
Substrate positioning system |
Jul. 26, 2005 |
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